M-036 Closed-Loop Servo Motor Precision Rotary Table with 1 µrad Resolution

  • Closed Loop Servo Feedback Motor Drive with 1 µrad Resolution
  • Piezo Drive Option for Highest Resolution, Precision and Dynamic Scanning and Tracking
  • 360 ° Coarse Range, > 20 ° Fine Range
  • 30 mm ø Clear Aperture
  • Standard Limit Switches

M-036 high performance series of closed-loop servo motor driven precision rotation tables provide the highest resolution, excellent repeatability and minimum wobble. The stages are equipped with double rotational ball bearings for minimum backlash and high load capacity. Both the rotation platform and the scale ring (graduated in 2-degree increments) can be independently coarse positioned over 360 degrees and then be locked by screws.

The basic version, M-036.D0, is equipped with a DC servo motor drive providing a rotational range of ±10.5 degrees. A set of limit switches eliminates the possibility of overtravel. 

The ultra-high precision rotational stage versions M-036.DS and M-036.DP provide additional piezoelectric µrad fine adjustment over a range of ±350 µrad. The piezoelectric fine motion range also allows dynamic scanning and tracking.

The .DS version is equipped with a closed loop PZT drive (model P-841.30), while the .DP version comes with an open loop PZT actuator (model P-840.30). Both drives provide a linear range of 45 microns and sub-nanometer linear resolution (see "PZT Actuators" section for further details and recommended drivers).

For the highest precision and highest performance, high speed air bearing rotary tables are recommended. 

See "Accessories", for adapters, brackets, etc.

ORDERING INFORMATION:
M-036.D0 Tangential Arm Rotary Stage, ø 100 mm, Closed-Loop Servo Feedback Motor
M-036.DP Tangential Arm Rotary Stage, ø 100 mm, Closed-Loop Servo Feedback Motor + Piezo Drive
M-036.DS Tangential Arm Rotary Stage, ø 100 mm, Closed-Loop Servo Feedback Motor + Closed Loop Piezo Drive

Math on linear to rotation conversion see here.

TECHNICAL DATA:

Models

M-036.D0

M-036.DP

M-036.DS

Units

Notes

Rotation range coarse

360

360

360

deg

 

Rotation range motorized

±10.5

±10.5

±10.5

deg

 

Rotation range (PZT drive)

-

±350

±350

µrad

 

Min. incremental motion
(PZT drive)

-

1

1

µrad

A4

Repeatability (PZT drive)

-

-

2

µrad

 

Design resolution (DC motor)

0.88

0.88

0.88

µrad

A3

Min. incremental motion
(DC motor)

2

2

2

µrad

A4

Rotation / linear input

15

15

15

µrad / µm

A5

Tangent arm length

66

66

66

mm

A5

Unidirectional repeatability

10

10

10

µrad

 

** Backlash

80

80

80

µrad

 

Wobble

< 75

< 75

< 75

µrad

 

Max. velocity

0.6

0.6

0.6

° /sec

 

Maximum axial force

± 400

± 400

± 400

N

 

Maximum torque (q X, q Y)

± 6000

± 6000

± 6000

mNm

 

Maximum torque CW*

4500

4500

4500

mNm

 

Maximum torque CCW*

75

75

75

mNm

 

Drive

M-224.20
DC-Mike

M-224.20
DC-Mike

M-224.20
DC-Mike

  

PZT drive

-

P-840.30

P-841.30

 

D1

Weight

1.05

1.15

1.17

kg

 

Recommended PZT controller

-

A, C, G

D, H

 

M

Material

Al, St

Al, St

Al, St

Al, St

L

Recommended motor controller

C-842,
C-844

C-842,
C-844

C-842,
C-844

 

D2

* CW: clockwise; CCW: counter-clockwise ** the PZT drives are backlash free

Related Products and Additional Resources

This is a legacy product that may have limited availability or may have been replaced. Ask a PI engineer for an equivalent new model.

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