Applications for programmable (semi-active) shims can be found where the alignment between two or more subassemblies is critical and realignment may be required at some point due to environmental changes, creep or settling processes, etc.
- Precision mechanical engineering
- High-end optical assemblies for astronomy and semiconductor manufacturing
- Material research test systems in synchrotrons
PIRest active shim technology is based on piezo ceramics and uses a hand-held programmer to change the displacement within seconds. Once a new position is programmed, the position is held stable to within nanometers over many days. These programmable shims can be made in virtually any shape and size such as plates or rings. Hybrid combinations with traditional piezo actuators for dynamic applications (e.g. vibration cancellation, precision motion control, etc.) are also feasible.