Category: Nanopositioning

Surface Slope Metrology: High Precision Tilt Stage Achieves 30nrad Absolute Accuracy

A recent paper shows significant advances in the accuracy of long trace profilers, auto-collimator based deflectometers, and other surface metrology instrumentation. Scientists at the ALS X-Ray Optics Laboratory, HZB/BESSY-II and PTB devised a new universal calibration method for deflectometers.  One key component in the system is a high accuracy, piezo-motor-driven flexure tilt stage developed in […]

Sinusoidal Scanning Motion Performance: Air Bearings vs. Mechanical Bearings

1.  Application Description Most of the motion solutions we work on typically require either point-to-point positioning or constant velocity scanning motion. In these applications, customers are usually concerned with accuracy, repeatability, or velocity regulation. One special type of motion that is occasionally required is sinusoidal scanning motion. In these applications, the motion stage is expected […]

6-Axis Parallel Kinematics for UHV Alignment and Active Vibration Cancellation for Semiconductor Applications

Inspection tools in the semiconductor industry, laser alignment and adjustment tools for the next generation of extreme ultraviolet lithography (EUVL) require highly accurate motion, often in all 6 degrees of freedom. Parallel kinematics structures provide an elegant and highly flexible way to achieve precise multi-axis motion. Different designs have found successful applications in 6D precision […]

Nanopositioning: How Mounting and Environmental Conditions Affect Performance

Nanopositioning equipment manufacturers can follow the latest design rules and put the best components into their mechanisms and controllers, often to no avail. If the user does not take the time to follow best practices for mounting, figuring out a suitable supporting structure, the right cable draping, and environmental conditions, much of the intrinsic performance […]

Tracking Down Nanometer Instabilities: Every Detail Matters

  When you work in the nano world, details matter. Instabilities can be caused by a variety of things, ranging from floor disturbances leaking past isolation systems, to acoustic energy coupled into the application structure, to tuning issues with the motion system embedded in the application, to resonant excitation of structural elements of the setup. In real life applications, instabilities […]

Self-Locking Actuator for Hexapod Applications Combines High Push-Pull Force with Picometer Resolution for Active Optical Alignment in Astronomy

1. Introduction Astronomical telescopes usually employ active position control for primary mirror surfaces using motorized mechanical actuators. The motion needed is generally quasistatic, to compensate gravitational and thermal effects. Another application for precision actuators within the telescope at a significantly faster motion response is the high speed tip/tilt control of a secondary or tertiary mirror. […]

Overview of Different Piezo Motor Design Principles

The basic principle of the piezo ceramic motor has been known for almost 100 years. However, it took decades to get from an idea to a reliable, industrial product. Just like with electromagnetic motors, many different types have been developed and tested over the years. Today, one can say that piezo motors have become mainstream […]

Piezo-Mechanisms in X-Ray Spectroscopy: Energy Selection in a Beam Line

PiezoWalk principle shows advantages for Monochromator crystal fine adjustment Piezo-based mechanisms have long been used in precision scientific instruments for precision motion generation. Previously, the limited motion characteristics of simple piezo actuators often made the use of a dual stage coarse/fine approach necessary. A novel approach based on a long-travel PiezoWalk drive shows promise in […]

Fast Optical Alignment for SiP Production

Industry-leading speed and capability is an enabler for “photonomics” from wafer to packaged device 2016 Finalist for “The Oscars of Photonics”! Problem The convergence of photonics and semiconductors promises a leap in data throughput, parallelism and energy efficiency. Design and materials challenges have by now been addressed. Practicalities of testing and packaging have not. Test […]

Advances in Precision Positioning Stage Design-Optimized Outgassing and Motion Performance in Ultra-High Vacuum Applications

Many processes in advanced research and industrial manufacturing can only be performed in a vacuum, such as thin-film sputtering and ion milling, and technologies formerly reserved for exotic materials processing are seeing application in new fields. And of course the march of Moore’s Law means new types of equipment have been developed that impose vacuum […]

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About PI

PI (Physik Instrumente) is a leading manufacturer of precision motion control equipment, piezo motors, air bearing stages and hexapod parallel-kinematics for semiconductor applications, photonics, bio-nano-technology and medical engineering. PI has been developing and manufacturing standard & custom precision products with piezoceramic and electromagnetic drives for 4 decades. The company has been ISO 9001 certified since 1994 and provides innovative, high-quality solutions for OEM and research. PI is present worldwide with eleven subsidiaries, R&D / engineering on 3 continents and total staff of 850+.

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