“We have created a hybrid solution with smart actuator arrays to cover the customer requirements of tomorrow.” Engineers Jonas Reiser and Mathias Winter give insights into the development process of PI's surface shaping solutions for the future.
Programmable Ceramic Spacers and Shims
PIRest is a programmable piezo shim technology that can hold position without power and change its thickness in increments less than one nanometer. The combination of this technology with common piezoelectric actuator technologies in smart actuator arrays can cover the precision requirements customers will have to deal with in the future.
Dynamic Compensation of Local Changes on Substrate Surfaces
Other customers are searching for solutions that offer dynamic compensation of local changes on substrate surfaces that can be caused by heat changes or substrate inaccuracies. In the context of adaptive optics corrections for dynamic and quasi-static imaging errors are needed. These semi-active piezo actuator elements are based on our patented PIRest technology and with that technology, we can change the remnant strain of the piezo actuators in the application, i.e., they can hold any programmed position without the need of any supply voltage.
The combination of active and semi-active actuator elements into one solution helps us shape surfaces dynamically. At the same time we can also correct static changes that are caused by tolerances such as aging or drifting without the need to supply power to the actuators permanently. With piezoelectric actuators we can create resolution and precision in the range of nanometers and sub nanometers while travel ranges from below one micron to tens of microns are feasible.
The challenge is to find an ingenious actuator array and drive concepts that can drive up to several thousands of piezo actuators, while adjusting them very precisely with nanometer resolution.
We are developing a simulation tool that can help us simulate and test several connection and drive concepts virtually, simplifying and accelerating the development process. New challenging projects and close cooperation with our customers is what we are looking for, so let's push the boundaries of what is feasible and reach the next level of precision together.
Active Surface-Shaping in Brief
Flexible Actuator Design: Through the combination of active, semi-active or hybrid piezo actuator technologies with different designs, specific requirements in terms of strokes, forces, or resolutions can be met.
Flexible in Operation: The combination of dynamic, quasi-static, and mixed operation makes the generation of different amplitudes with minimized position noise possible.
Flexible in Shape: Variable arrangements of actuators or actuator arrays will enable different types of deformations with highest resolution. Smart wiring, drive, and sensor concepts can simplify the hardware environment.
Flexible in Feature Size: Utilizing piezo ceramic material with a structured composition will enable highest operational flexibility and shaping of the smallest features.
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