Category: UHV Positioning Stage

6-Axis Parallel Kinematics for UHV Alignment and Active Vibration Cancellation for Semiconductor Applications

Inspection tools in the semiconductor industry, laser alignment and adjustment tools for the next generation of extreme ultraviolet lithography (EUVL) require highly accurate motion, often in all 6 degrees of freedom. Parallel kinematics structures provide an elegant and highly flexible way to achieve precise multi-axis motion. Different designs have found successful applications in 6D precision […]

Advances in Precision Positioning Stage Design-Optimized Outgassing and Motion Performance in Ultra-High Vacuum Applications

Many processes in advanced research and industrial manufacturing can only be performed in a vacuum, such as thin-film sputtering and ion milling, and technologies formerly reserved for exotic materials processing are seeing application in new fields. And of course the march of Moore’s Law means new types of equipment have been developed that impose vacuum […]

Performance and Applications of Inertia Based Positioning Drives: Q-Motion

Size matters in miniaturization and automation – smaller is usually better. Traditional electromagnetic motors have limitations when it comes to shrinking dimensions while maintaining high efficiency and accuracy of motion with minimized energy consumption. Piezo ceramic inertia motors can fill this gap. The Q-Motion dubbed miniature direct drives can be employed in linear positioners, rotary […]

Electron Microscopy: Nonmagnetic Drives and Stages for Vacuum

Electron microscopy allows investigations with extremely high lateral resolution down to a range of less than one nanometer. However, this places great demands on the imaging elements. And, of course, the specimens need to be positioned with the same precision to give meaningful measured results. Drives and positioning systems therefore perform important tasks in electron […]

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About PI

PI (Physik Instrumente) is a leading manufacturer of precision motion control equipment, piezo motors, air bearing stages and hexapod parallel-kinematics for semiconductor applications, photonics, bio-nano-technology and medical engineering. PI has been developing and manufacturing standard & custom precision products with piezoceramic and electromagnetic drives for 4 decades. The company has been ISO 9001 certified since 1994 and provides innovative, high-quality solutions for OEM and research. PI is present worldwide with fifteen subsidiaries, R&D / engineering on 3 continents and total staff of more than 1,000.

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