Category: Multi-Axis Motion

Advances in Laser Micromachining and Microprocessing

New Motion Control Approaches Deliver Improved Accuracy and Faster Time to Market Introduction Experienced Laser Microprocessing and Micromachining system integrators have no trouble providing proof of concept demonstrations for new applications. Turning the concept into a robust solution is a different story altogether – at least it used to be.  Here is why: Delivering laser […]

Hexapod 6-Axis Micro-Robots – Enablers for Today’s Advanced Camera Manufacturing… and Tomorrow’s

Hexapod micro-motion robots are a novel motion technology that provides all six degrees of freedom in an unusually stiff, compact, and high-precision structure, composed of a single moving platform supported in parallel by six motorized struts arranged with optimized constraint (“parallel kinematics”). From a motion control standpoint, hexapods are the equivalent of an XYZ stack with […]

Hexapod Robots in Laser Microsurgery Research

Laser micro-surgery can benefit from tracking and image-based methods that improve precision and safety. Advanced software together with stereo camera feedback allow for motion estimation reduce tracking errors.  A highly precise parallel kinematics motion system (Model H-824 from Physik Instrumente) with 6 degrees of freedom was used to evaluate the performance. More information is available […]

XYZ Positioning Mechanism Integrated in Automated Medical Instrument Developed in Partnership with ITL

Standard or Custom Engineered Solutions when Time is Critical? The old question – standard or custom – was one of the key considerations when ITL Group decided on what precision multi-axis motion system to use in one of their latest projects. In this particular case, ITL was approached by a client with an open frame […]

High Performance Motion Control – Systems Approach Provides Nanometer Precision for Industrial Applications

High performance motion control plays a key part in positioning and handling applications, such as those in semiconductor manufacturing, laser and materials processing, optical inspection systems, additive manufacturing or industrial digital printing. In addition to providing reliability and robustness, deterministic behavior with minimized latency, high-speed synchronization with external devices, such as lasers and cameras, is […]

Hexapod Robots in Automotive Applications

As the precision requirements in the automotive industry are increasing, the need for advanced robotics arises. Traditional robots are fast, can handle heavy loads, but lack positioning accuracy. Hexapod robots have a long history in precision alignment & micro-manufacturing automation, but were considered too precise for the automotive industry. The situation is rapidly changing. Modern […]

Hexapod in Proof of Concept for High-Speed Interstellar Travel with Directed Energy

The velocity of present-day spacecraft may seem galactic in contrast to what humans experience in their daily commutes involving even the fastest trains, planes or automobiles. However, compared to the warp-drive performance known from science fiction classics such as Star Trek and Star Wars, space travel in the early 21th century still moves at a […]

Air Bearings are Critical in CMM and Metrology Applications

Air bearings have played a crucial role in the development and construction of coordinate measuring machines (CMMs) and other metrology tools for decades. Since they are inherently frictionless and highly stable, air bearings play a key role in delivering the precision required in metrology equipment. Performance criteria, such as repeatability and minimized error motions, geometric […]

Precision Robotics and Automation: Hexapods Advance Production Processes

Summary Hexapods, six-legged parallel-kinematic machines, are quickly gaining ground in a broad range of industrial automation applications after “learning” how to directly communicate with PLC or CNC controllers via fieldbus interfaces. As far as the semiconductor and electronics industry, automobile industry, and precision assembly are concerned, many production processes have become inconceivable without them. Today, […]

6-Axis Parallel Kinematics for UHV Alignment and Active Vibration Cancellation for Semiconductor Applications

Inspection tools in the semiconductor industry, laser alignment and adjustment tools for the next generation of extreme ultraviolet lithography (EUVL) require highly accurate motion, often in all 6 degrees of freedom. Parallel kinematics structures provide an elegant and highly flexible way to achieve precise multi-axis motion. Different designs have found successful applications in 6D precision […]

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About PI

PI (Physik Instrumente) is a leading manufacturer of precision motion control equipment, piezo motors, air bearing stages and hexapod parallel-kinematics for semiconductor applications, photonics, bio-nano-technology and medical engineering. PI has been developing and manufacturing standard & custom precision products with piezoceramic and electromagnetic drives for 4 decades. The company has been ISO 9001 certified since 1994 and provides innovative, high-quality solutions for OEM and research. PI is present worldwide with fifteen subsidiaries, R&D / engineering on 3 continents and total staff of more than 1,000.

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