Category: Beamline Instrumentation

Irradiation Tests for Piezo Actuators in SRF Cavity Tuner at LCLS II

Fermilab (FNAL) is contributing to the SLAC Linac Coherent Light Source II (LCLS-II) project with superconducting radio-frequency (SRF) accelerator technology and cryogenics. The LCLS-II will produce a high-power free-electron laser for research from nano/bio-technology to materials engineering. The SRF technology will increase the pulse rate from 120Hz in the current LCLS to 1MHz in the […]

Novel Sample Stage Alignment Hexapod for X-ray Microscopy and Tomography

Hexapod with Additional Linear Encoders to Achieve the Highest Precision 1. Application: X‑Ray Microscopy / Tomography For synchrotron-based sub-micrometer hard X‑ray Tomography, the sample rotation axis must be aligned very precisely in at least five degrees of freedom with respect to the field of view, the lens, the detector or the beam itself. High stiffness […]

Surface Slope Metrology: High Precision Tilt Stage Achieves 30nrad Absolute Accuracy

A recent paper shows significant advances in the accuracy of long trace profilers, auto-collimator based deflectometers, and other surface metrology instrumentation. Scientists at the ALS X-Ray Optics Laboratory, HZB/BESSY-II and PTB devised a new universal calibration method for deflectometers.  One key component in the system is a high accuracy, piezo-motor-driven flexure tilt stage developed in […]

6-Axis Parallel Kinematics for UHV Alignment and Active Vibration Cancellation for Semiconductor Applications

Inspection tools in the semiconductor industry, laser alignment and adjustment tools for the next generation of extreme ultraviolet lithography (EUVL) require highly accurate motion, often in all 6 degrees of freedom. Parallel kinematics structures provide an elegant and highly flexible way to achieve precise multi-axis motion. Different designs have found successful applications in 6D precision […]

Piezo-Mechanisms in X-Ray Spectroscopy: Energy Selection in a Beam Line

PiezoWalk principle shows advantages for Monochromator crystal fine adjustment Piezo-based mechanisms have long been used in precision scientific instruments for precision motion generation. Previously, the limited motion characteristics of simple piezo actuators often made the use of a dual stage coarse/fine approach necessary. A novel approach based on a long-travel PiezoWalk drive shows promise in […]

Advances in Precision Positioning Stage Design-Optimized Outgassing and Motion Performance in Ultra-High Vacuum Applications

Many processes in advanced research and industrial manufacturing can only be performed in a vacuum, such as thin-film sputtering and ion milling, and technologies formerly reserved for exotic materials processing are seeing application in new fields. And of course the march of Moore’s Law means new types of equipment have been developed that impose vacuum […]

Performance of a Large Motorized Rotary Air Bearing Stage for Synchrotron Crystallography

PI recently built a large 300mm diameter rotary air bearing stage for use in a synchrotron beamline test facility. The beamline, when finished, will be used for Macromolecular Crystallography. This stage was designed with the goal of achieving best-possible performance for the following specifications: Stiffness Load capacity Radial runout error motion Velocity smoothness The application […]

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About PI

PI (Physik Instrumente) is a leading manufacturer of precision motion control equipment, piezo motors, air bearing stages and hexapod parallel-kinematics for semiconductor applications, photonics, bio-nano-technology and medical engineering. PI has been developing and manufacturing standard & custom precision products with piezoceramic and electromagnetic drives for 4 decades. The company has been ISO 9001 certified since 1994 and provides innovative, high-quality solutions for OEM and research. PI is present worldwide with fifteen subsidiaries, R&D / engineering on 3 continents and total staff of more than 1,000.

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