6-Axis Micropositioning Stages & Hexapods

High-Load Hexapods

• Six Degrees of Freedom
• Works in Any Orientation
• No Moving Cables for Improved Reliability and Precision
• 200 kg Load Capacity (Vertical)
• Heavy-Duty, Ultra-High-Resolution Bearings for 24/7 Applications
• Repeatability to ±1 Micron
• Actuator Resolution to 0.005 Micron
• Significantly Smaller and Stiffer Package than Conventional Multi-Axis Positioners
• Vacuum-Compatible Versions
• Linear and Rotary Multi-Axis Scans
• Virtualized Center of Rotation (Pivot Point)
• Sophisticated Controller Using Vector Algorithms
• 20000 h MTBF

• Six Degrees of Freedom
• Works in Any Orientation
• No Moving Cables for Improved Reliability and Precision
• 1000 kg Load Capacity (Vertical)
• Heavy-Duty, Ultra-High-Resolution Bearings for 24/7 Applications
• Repeatability to 0.5 µm
• Actuator Resolution 0.008 µm
• Significantly Smaller and Stiffer Package than Conventional Multi-Axis Positioners
• Vacuum-Compatible Versions
• Linear and Rotary Multi-Axis Scans
• Virtualized Center of Rotation (Pivot Point)
• Sophisticated Controller Using Vector Algorithms

• Load Capacity to 1000 kg in Any Orientation
• Six Degrees of Freedom Travel Ranges to ±200 mm, to ±20°
• Resolution to 0.8 µm, to 0.5 µrad
• Drive: Brushless Motors with Brake
• Sophisticated Controller Using Vector Algorithms

Miniature Hexapods

• Most-Compact Hexapod in the PI Portfolio
• Travel Ranges 40 x 40 x 13 mm, Rotation to 60 Degrees
• Load Capacity to 5 kg
• Resolution of a Single Strut 40 Nm
• Min. Incremental Motion to 200 Nm
• Repeatability up to ±0.5 µm
• Velocity to 10 mm/s

• Vacuum-Compatible Miniature Hexapod
• Complete with Specialized Hexapod Controller and Software
• Travel Ranges 34 x 32 x 13 mm, Rotation to 42 Degrees
• Load Capacity to 5 kg
• Actuator Resolution 40 nm
• Min. Incremental Motion to 200 nm
• Repeatability up to ±0.2 µm
• Velocity to 10 mm/s

• Low Cost, Ultra-Precision Hexapod Alignment System
• Parallel Kinematics with 6 Degrees of Freedom
• 0.033 Micron Actuator Resolution
• Repeatability 0.3 Micron in Space
• No Moving Cables for Improved Reliability, Reduced Friction
• Better Dynamics, More Compact than Serial Kinematics Systems
• For Scanning and Alignment
• Cartesian Coordinate Control with Virtualized Pivot Point.
• Powerful Digital Controller with Open Source LabView™ Drivers, DLL Libraries...
• Integrated Fiber Alignment Routines

Vacuum Compatible Hexapods

• Six Degrees of Freedom
• Vacuum Compatible Versions
• Load Capacity 10 kg
• Travel Ranges to 45 mm (linear), 25° (rotation)
• 7 Nanometer Resolution
• 300 Nanometer Min. Incremental Motion
• Repeatability ±0.5 Micron
• Very Compact Design
• Self Locking to 10 kg

• Six Degrees of Freedom
• Rapid Response
• No Moving Cables for Improved Reliability and Precision
• 10 kg Load Capacity
• Repeatability to ±2 Micron
• Actuator Resolution to 0.016 Micron
• Significantly Smaller and Stiffer than Serial-Kinematics Systems, Better Dynamics
• Vacuum-Compatible Versions
• Virtualized Pivot Point
• Sophisticated Controller Using Vector Algorithms
• 20000 h MTBF

Hexapods for Extreme Conditions

• 6 Degrees of Freedom, Works in Any Orientation
• Vacuum Compatible up to 10^-6 hPa
• 200 kg Load Capacity (Vertical)
• Repeatability to ±1 µm
• Encoder Resolution to 5 nm

Video on ALMA telescope. Shows PI Hexapod (time 0:38)

• Travel Ranges 10 mm Linear, 6° Rotation
• Large Clear Aperture Ø 202 mm
• Non-MagneticNanometer Resolution
• Low-Profile: 140 mm Height Only
• Parallel Kinematics for Enhanced Dynamics and Better Multi-Axis Accuracy
• Up to 500 N Force Generation
• Self-Locking at Rest, No Heat Generation

6-Axis Stages

• For Scanning and Positioning in all Six Degrees of Freedom
• 800 x 800 x 200 Micron Linear Range
• Up to 10 mad Rotational Range
• Precision Trajectory Control
• Parallel - Kinematics / Metrology for Enhanced Responsiveness / Multi-Axis Precision
• Direct Metrology with Capacitive Sensors for Highest Precision
• ID-Chip for Auto Calibration Function
• PICMA^® High - Performance Multilayer Piezo Drives

• 6 Motion Axes: 3 x Linear, 3 x Rotation
• Travel Ranges to 200 µm Linear and 1 mrad Tilt Angle
• Enhanced Responsiveness & Multi-Axis Precision: Parallel Kinematics / Metrology
• Highest Linearity and Stability with Capacitive Sensors
• Frictionless, High-Precision Flexure Guiding System
• Excellent Scan-Flatness
• Clear Aperture 66 x 66 mm
• Outstanding Lifetime Due to PICMA® Piezo Actuators
• UHV Versions to 10^-9 hPa