Nano-Measuring, Nano-Metrology |
Capacitance Sensors Measure to better than 1 Nanometer | ||
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PI has been a world market leader in nanopositioning technology for decades. In order to provide nanopositioning systems of the highest accuracy class, PI had to develop its own capacitive position sensing devices 15 years ago. Since then, thousands of dual probe sensors and controllers have been manufactured for use in PI's closed-loop piezo positioning stages and in a variety of custom nanomeasuring applications.
PI has now introduced a number of new single probe sensors and stand-alone electronics for easy setup & integration into measuring and motion control systems. | ||
 Capacitive Sensor Tutorial | ||
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D-015, D-050, D-100 Sub-Nanometer-Resolution Dual-Plate Capacitive Position Sensors | ||
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D-510 Single-Probe Capacitive Nanometrology Gauge | ||
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| PISeca™ capacitive displacement sensors perform non-contact measurements of geometric quantities representing separation, position, length or other linear dimension against electrically conductive references such as metallic planes. These single-probe sensors combine superior resolution and linearity with very high bandwidth for dynamic measurements. Standard come with measuring ranges from 20 to 1000 µm. Capacitive position gauges such as PISeca™ are fundamentally very temperature stable and easy to work with. | ||
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E-852 PISeca™ Signal Conditioner For Capacitive Single-Plate Sensors | ||
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E-509 PISeca™ Signal Conditioner / Piezo Servo Module | ||
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PI Capacitive Position Sensors, Metrology Solutions Brochure | White paper-Nanopositioning: Keeping Pace | Nanopositioning Systems Catalog |
