XY Positioning Stage - XY Motorized Stages by PI USA
XY Motorized Stages / Multi-Axis Stages

XY Precision Positioning Stages / Motorized


XY Planar Motion
PI provides a number of innovative planar XY positioning stages with positional resolution from microns to nanometers and below.

Air Bearing XY Stages
Air Bearing XY stages come in stacked and planar (3-motor) designs. Air Bearings are used when the highest precision is required in terms of straightness & flatness, smoothness of motion, and constance of velocity. Air bearning stages are driven by linear motors and can provide very high velocity and acceleration, ideal prerequisites for industrial precision manufacturing applications.
More information on XY Air Bearing Stages

Multi-Axis: XYZ, Pitch, Yaw, Roll
If motion in more than one plane is required, Multi-Axis Stages with up to 6 degrees of freedom are also available.

Servo, Stepper and Piezo Drives
For highest flexibility we have developed different drive technologies, such as open & closed-loop steppers, servo motors, linear motors and ultrasonic piezo motor drives.

Actuators, Single-Axis Stages, Vertical Motion and Rotary Stages
In addition to the linear translation stages shown on this page, vertical (lift) positioners as well as single-axis systems, and rotary motion systems are also available.

Vacuum, too
As a specialist for vacuum motion systems, PI miCos also offers HV and UHV vacuum compatible linear positioning stages.



Servo / Stepper Planar & Air Bearing Piezo Motor Planar Piezo Flexure Manual



Planar & Air Bearing Stages



PIglide AT XY Air Bearing Stage Series

 
Motorized XY Air Bearing Stages: Atlas XY Series
  • Load to 35g
  • Velocity to 1m/s, Acceleration to 2g's
  • Straightness/Flatness to 0.50µm



Specifications & Drawings, Request Quote
Read Blog: "Straightness and Flatness of Air Bearings"


A-311 PIglide IS Series Planar Air Bearing Stage

 
Motorized XY Planar Air Bearing Stages: NP Series


Specifications & Drawings, Request Quote
Read Blog: "Why To Use Air Bearing Stages Over Mechanical Bearings"


A-322 PIglide HS Series Planar Air Bearing Positioning System



HS Series Motorized XY Planar Air Bearing Stage
  • Travel 350mm (cross axis) x 500mm (lower axis)
  • Flexural Coupling Between Axes
  • Dynamic Mapping Achieves Near "Laser" Performance
  • Active Error Compensation Algorithms for Straightness and Yaw Motions
  • Load to 15kg
  • Velocity to 1m/s, Acceleration to 1g
  • Straightness/Flatness to 0.25µm


Planar XY Air Bearing Stage: How does it work?



Specifications & Drawings, Request Quote
Read Blog: "Scanning Performance of Air Bearings"

More Air Bearing Stages, Components, Systems
Read More Air Bearing Blog Articles




Servo / Stepper Stages




MCS High Precision XY Positioning Stage for Test & Metrology Applications

 
MCS XY Linear Translation Stage for Metrology
  • Motor Options: Linear Servo, Servo w/Ballscrew; Stepper w/Ball Screw
  • Precision XY Translation Stage for Metrology Applications
  • 4x4" Positioning Range (8 & 12" Version on request)
  • Clear aperture of 150x150mm
  • Repeatability to 0.1µm
  • Linear Encoder Resolution 5nm and 1nm
  • Velocity 1µm/sec to 200mm/sec
  • 20kg Load capacity


Specifications & Drawings, Request Quote l PDF Datasheet



L-731 Integrated XY Linear Motor Stage with Cross Roller Bearings for Metrology, 8"x8"

 
731 XY Metrology Stage
This low-profile integrated XY stage provides smooth motion with velocity to 100mm/sec. Driven by ironless linear motors and equipped with linear encoders for direct position feedback, the stage is ideal for metrology and precision automation applications. Crossed roller bearings with anti-creep cage assist provide guiding accuracy of 1.5µm straightness / flatness for loads up to 20kg.

  • Integrated Direct Drive Linear Motors and Linear Encoders
  • Low Profile Integrated XY Stage 310×310×80mm
  • Travel Range 205mm x 205mm (8”)
  • 5nm Sensor Resolution
  • Repeatability to 0.1µm
  • Velocity to 100mm/s
  • Load Capacity to 20kg


Specifications & Drawings (PDF) | Request Information, Quote


CS-430 XY Positioning Stage

 
CS-430 XY Positioning Stage
  • Motorized Positioning Range: 350 x 300 millimeters
  • Maximum Load: 30 kg
  • Maximum Velocity: 100 mm/second
  • Maximum Positioning Resolution: 0.05 micrometers
  • Position Reproducibility: 0.1 micrometers unidirectional +/- 0.1 micrometers bidirectional
  • Linear Position Feedback Encoder: Optional



Specifications & Drawings, Request Quote l PDF Datasheet


MS-8 XY Positioning Stage

 
MS-8 XY Positioning Stage
  • Motorized Positioning Range: 205 x 205 millimeters
  • Maximum Load: 4 kg
  • Maximum Velocity: 90 mm/second
  • Maximum Positioning Resolution: 0.05 micrometers
  • Position Reproducibility: 0.25 micrometers unidirectional +/- 0.5 micrometers bidirectional
  • Linear Position Feedback Encoder: Optional



Specifications & Drawings, Request Quote l PDF Datasheet


MS-4 XY Positioning Scan Table

 
MS-4 XY Positioning Scan Table
  • Motorized Positioning Range: 102 x 102 millimeters
  • Maximum Load: 3 kg
  • Maximum Velocity: 90 mm/second
  • Maximum Positioning Resolution: 0.05 micrometers
  • Position Reproducibility: 0.25 micrometers unidirectional +/- 0.5 micrometers bidirectional
  • Linear Position Feedback Encoder: Optional



Specifications & Drawings, Request Quote l PDF Datasheet


KT-120 Compact XY Positioning Stage

 
KT-120 Compact XY Positioning Stage
  • Motorized Positioning Range: 26 x 26 millimeters
  • Maximum Load: 5 kg
  • Maximum Velocity: 3.5 mm/second
  • Maximum Positioning Resolution: 0.2 micrometers
  • Position Reproducibility: 2 micrometers unidirectional +/- 5 micrometers bidirectional
  • Linear Position Feedback Encoder: Not Available



Specifications & Drawings, Request Quote l PDF Datasheet


Piezo Motor Stages



M-687 Low Profile High Stability XY Microscope Stage, with Ultrasonic Piezo Linear Motor

 
High Resolution XY Microscope Stage, Ultrasonic Linear-Motor-Driven
The M-687 and M-686 XY stages are based on ultrasonic piezo-electric linear motors. These compact motors allow a low profile stage design, provide a large dynamic velocity range from microns/second to >100mm/sec. The ceramic motors auto-clamp at rest, providing significantly better long term stability than other motors w/o the need for a brake.

  • Designed for High Resolution Inverted Microscopy Applications
  • High Stability and Smooth Motion based on PILine Ultrasonic Linear Motor
  • 135mmx85mm Positioning Range
  • Integrated Optical Linear Encoders
  • Self-Clamping: No Heat, no Servo Dither
  • Includes Controller and Joystick


Specifications & Drawings, Request Quote | PDF Datasheet

More Microscope XY Stages


M-686 Low-Profile XY Stage with Ultrasonic Linear Motors

 
XY Motorized Microscope Stage The M-686 XY stage is features ultrasonic piezo-electric linear motors. These compact motors allow a low profile stage design, provide a large dynamic velocity range from microns/second to >100mm/sec. The ceramic motors auto-clamp at rest, providing significantly better long term stability than other motors w/o the need for a brake.

  • Integrated Closed-Loop Linear Piezo Motor, Provides Stability and a wide Dynamic Velocity Range
  • 25x25mm (1x1") Positioning Range
  • Integrated Optical Linear Encoders
  • Compact Footprint 150x150mm; 27mm Height
  • 78x78mm Aperture
  • Self-Clamping Design for Long Term Stability, no Sevo Dither
  • Can be Combined with PI Flexure Nanopositioning Stages


Specifications & Drawings, Request Quote | PDF Datasheet
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U-521 / M-663 Miniature Stage, XY Combination, Ultrasonic Piezo Motor


Piezo-Motor Mini XY Stage Combination The M-663 miniature positioning stage provides high acceleration and speed to 250mm/sec. It is based on a compact ultrasonic ceramic linear motor and provides 18mm travel. Two linear encoder versions are offered, featuring 0.6 and 0.1 microns resolution, respectively. The M-663's square footprint makes it suitable for use in compact XY configurations.


  • Fast and Compact Positioning Stage with Closed-Loop Linear Motor and Encoder
  • 18mm Positioning Range
  • Velocity to 250mm/sec
  • Fast Step & Settle
  • Self-Clamping Design for Long Term Stability, no Sevo Dither
  • Choice of Encoders: Economical / Precision /li>
  • Vacuum Option

Specifications & Drawings, Request Quote | PDF Datasheet


Q-522 Sub-Miniature Piezo Stage, Inertia Motor


Mini Stage These sub-miniature positioning stages are available in X, XY and XY-Rotation assemblies. Driven by a compact stick-slip piezo motor they provide travel ranges up to 26mm.

  • Stick-slip Piezo Miniature Motor
  • Optical Linear Encoder Option
  • High Vacuum Version
  • Travel up to 26mm
  • Velocity to 10mm/sec
  • Choice of Encoders: Economical / Precision /li>

Specifications & Drawings, Request Quote | PDF Datasheet
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Planar Piezo Flexure Stages




P-542 XY Piezo Flexure Nanopositioning Stage

 
P-541 XY Positioning Stage
Piezo flexure stages provide sub-nanometer resolution, frictionless motion and very fast step and settle response. They are used in microscopy, imaging, semiconductor metrology and precision optics applications. PI provides a very large selection of flexure stages, from one to 6 axes.

Learn more on Piezo Flexure Stages





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Manual Stages with Motor Upgrade Option




M-545 Open-Frame Microscope Stage, Manual w/ Motor Option

 
M-545 Open Frame Microscope Stage
The M-545 stage was designed as a high stability platform for high-speed XY and XYZ piezo flexure scanning stages in microscopy applications. In its basic version it comes with manual micrometers. Motorized micrometers are available in an upgrade kit.

  • Long-Range Motion and High Stability for Sample Positioning
  • Compatible with P-545 PInano® Piezo Scanning Stages
  • Low Profile for Easy Integration: 30 mm
  • 25 x 25 mm Travel Range
  • Micrometer Screws, Motor Upgrade Available
  • For Nikon, Zeiss, Leica und Olympus Microscopes

More Microscope Stages


Specifications & Drawings, Request Quote | PDF Datasheet
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Hexapod Multi-Axis Positioner




Muti-Axis Stages: XYZ-Pitch-Roll-Yaw

 
Muti-Axis Stages: XYZ-Pitch-Roll-Yaw
  • 6 Axis Motion with virtual pivot point (XYZ, Pitch, Roll, Yaw)
  • Many standard and custom designs
  • For loads from 2 kg to 2 tons
  • Actuator resolution in the nanometer range
  • Sub-micron 6-Axis Repeatability



Learn more on Hexapod 6-Axis Stages l Hexapod Multi-Axis Stage Catalog
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Linear Stages Z Stages Rotary Stages Pushers / Actuators


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