High Accuracy Vertical Linear Stages / Elevation Positioners - Precision Motion Control, by PI USA
XY Motorized Stages / Multi-Axis Stages

Precision Vertical Linear Positioners, Z-Stages


PI provides a very large variety of vertical linear stages, spanning from stepper motor driven stages, to piezo-Z flexure nanopositioners and hybrid ultra-precision vertical positioners. Vertical positioning stages (Z-stages, lift stages, or elevator stages) are used in focusing or precision positioning and alignment applications and are often mission-critical in high-end industrial and research applications from optics to photonics alignment and semiconductor testing.

A dedicated Z-stage provides better stiffness and straightness compared to a translation stage mounted vertically on a bracket, and gives full access to the sample to be positioned.

Many Options: PI provides a variety of different Z-stages, from low-cost stepper-motor motor units, to high-accuracy lift stages with closed-loop motors and linear encoders for direct position feedback.

Ultra-High-Precision: Piezo Flexure Z-stages and Z-Tip-Tilt positioners and Piezo-Walk Z-Stages as well as Hybrid Nanopositioning vertical stages are also available for nanometer and sub-nanometer precise positioning applications.

Vacuum, too
As a specialist for vacuum motion systems, PI miCos also offers HV and UHV vacuum compatible linear positioning stages.


UPL-120 Ultra Precision Elevation Stage
Closed-loop Stepper Piezo Motor
High Load
Closed Loop Servo Hybrid Piezo Flexure



UPL-120 Ultra Precision Elevation Stage

 
UPL-120 Ultra Precision Elevation Stage
The UPL-120 is our highest precision vertical linear stage. It is driven by a closed-loop servo motor or closed-loop micro-stepped, 2-phase stepper motor and utilizes a linear scale for position feedback. Other options include an open-loop stepper motor. The high performance of this elevator stage makes it ideal for applications in optical lithography, semiconductor test equipment, photonics alignment, and wafer inspection.

  • Closed-Loop Servo and Stepper Motors with Linear Scale
  • Motorized Elevation Range: 13mm
  • Maximum Load: 15kg
  • Maximum Velocity: 6mm/second
  • Bidirectional Position Reproducibility: ±0.05µm


Specifications & Drawings, Request Quote l PDF Datasheet


L-310 Motorized Precision Vertical Linear Stage, 1", Stepper / Servo Motor

 
L-310 Motorized Precision Vertical Linear Stage, 1 inch, Stepper Motor
The L-310 vertical translation stage is available with stepper and servo motors and is driven by a precision ground ball screw and guided by cross-roller bearings. A linear scale option provides higher linearity and repeatability, with resolution to 50 nanometers. L-310 stages can be mounted directly to the L-511 linear stage and L-611 rotary stage series.

  • Stepper and Servo Motor Options
  • Motorized Elevation Range: 26 millimeters
  • Maximum Load: 55 N
  • Maximum Velocity: 15 mm/second
  • Maximum Positioning Resolution: 0.05 µm
  • Position Reproducibility: 0.1 µm unidirectional
  • Linear Position Feedback Encoder: Optional



Specifications & Drawings, Request Quote l PDF Datasheet
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M-501 Vertical Linear Positioning Stage, 1/2" Travel, DC Servo, Self locking to 10 kg

 
Vertical Linear Stage
  • Closed-Loop ActiveDrive™ DC Motor
  • Travel Range 12.5 mm (1/2")
  • Ultra-High-Resolution Encoder
  • Choice of Motion Controllers
  • Stress-Relieved Aluminum Stage Base for Highest Stability
  • Zero-Backlash Recirculating Ballscrews
  • Non-Contact Origin and Limit Switches
  • >20,000 Hours MTBF

Specifications & Drawings, Request Quote | PDF Datasheet


M-451 Vertical Linear Positioning Stage, 1/2" Travel, 12kg Load, DC Servo

 
 High-Load Vertical Micropositioning Stage
  • 3 Nanometer Design Resolution
  • Closed-Loop ActiveDrive™ DC Motor
  • 12 kg Load Capacity (Self Locking), High Stiffness
  • <100 Nanometer Minimum Incremental Motion
  • 12.5 mm (1/2") Travel Range
  • Choice of Motion Controllers
  • Non-Contact Origin and Limit Switches
  • Mounting Platform for P-500 and PIMars™ Piezo- Nanopositioning Systems
  • Self Locking

Specifications & Drawings, Request Quote | PDF Datasheet
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M-714 Ultra-High Precision Hybrid Piezo/Servo Motor Nanopositioning Stage, for Vertical Use, 2nm, 7mm

 
 M-714 Hybrid Piezo/DC-Motor Nanopositioning Z-Stage
  • Hybrid Sytem Combines Advantages of Piezoelectrics and Electromagnetic Drives
  • 2 Nanometer Linear Encoder Resolution
  • High Holding Forces with Minimum Power Consumption, without Counterbalancing the Load
  • Active Compensation of Stick/Slip During Startup and Settling
  • Active Backlash Compensation
  • Excellent Velocity Control
  • Millisecond Settling to Nanometer Accuracy
  • Reliable Execution of Minimal Increments

PDF Datasheet


N-510K High-Stiffness NEXLINE® Z Stage High-Precision Positioning, with Capacitive Sensors

 
  • Self Locking at Rest, No Heat Generation
  • Hybrid Drive: PiezoWalk® plus PICMA®
  • Travel Range: 400 µm Coarse + 40 µm Fine
  • 2 nm Closed-Loop Resolution
  • Direct Metrology: One Single Control Loop with Capacitive Sensors
  • High Push and Holding Force to 25 N
  • Piezo Walking Drive w/o Wear and Tear & Outstanding Lifetime due to PICMA® Piezo Actuators

Specifications & Drawings, Request Quote |PDF Datasheet


PIHera Piezo-Z Nanopositioning Stage Family,
Closed-Loop, Direct Metrology, <1 nm Resolution


Vertical Piezo Nanopositioning Stage, Direct Metrology
    These piezo-driven, flexure-guided Z-stages are completely frictionless and provide very fast response in the millisecond range. Capacitive feedback provides high resolution and nanometer repeatability. PIHera stages can be combined with long-travel motorized stages or with other PIHera piezo flexure X and XY stages.

  • Z-Axis Travel to 400 Micron
  • Low Profile
  • Resolution <1 Nanometer
  • Frictionless Precision Flexure Guiding System
  • PICMA® High-Performance Multilayer Piezo Drives
  • Direct Metrology with Capacitive Sensors for Highest Precision
  • 0.02% Position Accuracy
  • X, XY, Z, XYZ Versions
  • Vacuum-Compatible Versions

Specifications & Drawings, Request Quote | PDF Datasheet
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Additional Piezo Flexure Vertical Stages






UPL-160 Ultra High Precision Vertical Linear Stage (Elevator)

 
UPL-160 Ultra High Precision Vertical Linear Stage (Elevator)
  • Motorized Elevation Range: 26 millimeters
  • Maximum Load: 30 kg
  • Maximum Velocity: 30 mm/second
  • Maximum Positioning Resolution: 0.001 micrometers
  • Position Reproducibility: 0.03 micrometers unidirectional 0.035 micrometers bidirectional
  • Linear Position Feedback Encoder: Optional


PDF Datasheet


ES-82 Motorized Elevation Stage

 
ES-82 Motorized Elevation Stage
  • Motorized Elevation Range: 13 to 26 millimeters
  • Maximum Load: 5.5 kg
  • Maximum Velocity: 20 mm/second
  • Maximum Positioning Resolution: 0.05 micrometers
  • Position Reproducibility: 0.05 micrometers unidirectional 0.01 micrometers bidirectional
  • Linear Position Feedback Encoder: Optional


PDF Datasheet
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ES-70 Motorized Linear Vertical Positioning Stage

 
ES-70 Motorized Linear Vertical Positioning Stage
  • Motorized Elevation Range: 6.25 millimeters
  • Maximum Load: 2 kg
  • Maximum Velocity: 0.1 mm/second
  • Maximum Positioning Resolution: 0.3 micrometers
  • Position Reproducibility: 0.3 micrometers unidirectional 2 micrometers bidirectional
  • Linear Position Feedback Encoder: Not Available



PDF Datasheet


ES-65 Compact Motorized Elevation Stage

 
ES-65 Compact Motorized Elevation Stage
  • Motorized Elevation Range: 26 millimeters
  • Maximum Load: 2 kg
  • Maximum Velocity: 20 mm/second
  • Maximum Positioning Resolution: 1 micrometers
  • Position Reproducibility: 5 micrometers unidirectional +/ 2 micrometers bidirectional
  • Linear Position Feedback Encoder: Not Available


PDF Datasheet
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