Active Optics / Steering Mirrors |
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Very fast, piezo-driven systems. Application examples: Image stabilization, resolution enhancement. 1 - 3 axis, up to 6° beam deflection
Single-Axis Platforms / Shifters
Multi-Axis Tip/Tilt Platforms
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Capacitive Nanometrology Sensors |
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Up to 0.01 nanometer resolution. Absolute measuring, noncontact, high bandwidth, high linearity, vacuum compatible, ideal for parallel metrology
Capacitive Sensors |