Linear Motor

Piezo Ceramic Motors / Piezo Linear Motor Stages /
Non Magnetic Ceramic Actuators


Piezo Motor Pushers Translation Stages High-Res / High Force XY Motor Slide Motor Controllers
Rod Drives Translation Stages High Res / High Force XY Slide Piezo Motors
Highload Actuators Flexure Actuators Bender Actuators Long Life Piezo Stacks Stepper Actuators
Highload Actuators Flexure Actuators Bender Actuators Long Life Piezo Stacks Stepper Actuators


PI manufactures several types of piezoelectric linear motors: Ultrasonic piezo motors (resonant motors), and Piezo Walk® stepping motors. Both are intrinsically vacuum compatible, non-magnetic and are self locking at rest. They basically provide unlimited travel, yet they are very different in their design, specifications and performance.

Ultrasonic resonant motors and piezo motor actuators (PILine®) are characterized by very high speed to 1000 mm/s and a very compact and simple design (systems down to 8mm in length are available).

PiezoWalk® linear motors (NEXLINE® and NEXACT® types) can achieve much higher forces and picometer range resolution but are more complex and not as fast.

PiezoWalk® and ultrasonic piezo motors are in principle nonmagnetic and vacuum-compatible, a perfect match for many applications in the semiconductor industry.


PiezoWalk (NEXLINE® / NEXACT®) High-Force Motors & Nanopositioning Drives



N-900 Miniature Stage, Non-Magnetic, Vacuum Compatible


Piezo-Motor XYZ-Mini Stage This sub-miniature stage is driven by piezo walk motors and was designed to align samples in applications such as SEM.
  • X, XY & XYZ combinations
  • 10 mm Travel, 5 N Force
  • Self-Locking at Rest, No Heat Generation
  • Sub-Micron Resolution
  • Non-Magnetic & Vacuum Compatible
  • Can Operate in Strong Magnetic Fields
  • Patented PiezoWalk® Motor
  • Custom Designs
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N-310 PiezoWalk® Compact NEXACT® OEM Piezo Stepping Drives


Nanopositioning Drive
  • 20 mm Standard Travel Range
  • Compact and Cost-Effective Design
  • 0.03 nm Resolution
  • To 10 N Push/Pull Force
  • Low Operating Voltage
  • Self Locking, with no Heat Dissipation, Nanometer Stability
  • Non-Magnetic and Vacuum-Compatible Working Principle
Product Description | Specs / Drawings | Ordering Info | PDF




N-900 Nonmagnetic Piezo-Motor Linear Actuator


Piezo-Motor Linear Actuator
  • Piezo-Walk Motor-Driven Linear Actuator
  • Works in High Magnetic Fields (MRI)
  • 70mm Motorized Positioning Range
  • Self-Aligning & Self Locking Design
  • Made from non-magnetic materials
  • 5N Force (1 lb)
Back to Top Product Description | Specs / Drawings | Request More Info | PDF


Piezo Stepping Drives

N-381 PiezoWalk® Linear Actuator, Manipulator, Piezo Stepper


Piezo Stepper
  • Travel Range 30 mm
  • Novel, Zero-Wear Piezo Stepping Drive, Ideal for Micro- and Nano-Manipulation
  • Integrated Linear Encoder Option for Highest Accuracy with 20 nm Resolution
  • Very High Acceleration, e.g. for Cell Penetration
  • Two Operating Modes: Continuous Stepping Mode and Continuously Variable, High-Dynamics Analog Mode for 30 pm Resolution**
  • Up to 10 N Force Generation
  • Self Locking at Rest, no Heat Generation
  • Smooth Motion, no Closed-Loop Jitter
  • Vacuum-Compatible and Non-Magnetic Versions
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N-111 NEXLINE® OEM Linear Actuator Nanopositioning Over Long Travel, PiezoWalk® Principle


Piezo Nanopositioning Drive
  • Travel Range 10 mm
  • Resolutionto 0.025 nm Open-Loop,5 nm Closed-Loop
  • Up To 50 N Force Generation and 70 N Holding Force
  • Self-Locking at Rest, No Heat Generation
  • Non-Magnetic and Vacuum-Compatible Working Principle
  • Cleanroom Compatible
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Linear Actuator Nanopositioning Over Long Travel

N-216 NEXLINE® Linear Actuator High-Force PiezoWalk® Drive for Long-Range Nanopositioning


High Load Piezo Nanopositioning Drive
  • Travel Range 20 mm
  • Resolutionto 0.03 nm Open-Loop, 5 nm Closed-Loop
  • Up to 800 N Holding Force
  • Self-Locking at Rest
  • Non-Magnetic and Vacuum-Compatible Working Principle
  • Cleanroom Compatible
Product Description | Specs / Drawings | Ordering Info | PDF




N-661 PiezoWalk Motor-Driven Nanopositioning Stage; 20mm Travel, 20nm Encoder



Miniature Linear Stage with NEXACT® Drive
  • Travel Range 20 mm
  • Self Locking at Rest, no Heat Generation, no Servo Dither
  • Compact Design: 70 x 50 x 20 mm
  • Zero-Wear Piezo Stepping Drive, Ideal for Micro- and Nano-Manipulation
  • Integrated Linear Encoder Option for Highest Accuracy with 20 nm Resolution
  • Two Operating Modes: Continuous Stepping Mode and Continuously Variable, High-Dynamics Analog Mode for 30 pm Resolution**
  • Up to 10 N Force Generation
Product Description | Specs / Drawings | Ordering Info | PDF




N-664 PiezoWalk Motor-Driven Nanopositioning Stage; 30mm Travel, 0.5nm Encoder



High-Resolution Translation Stage
  • Travel range 30 mm
  • Encoder resolution 0.5 nm
  • Minimal incremental motion 2 nm
  • Excellent guiding accuracy
  • Max. velocity 10 mm/s
Product Description | Specs / Drawings | Ordering Info | PDF




N-510K High-Stiffness NEXLINE® Z Stage High-Precision Positioning, with Capacitive Sensors


  • Self Locking at Rest, No Heat Generation
  • Hybrid Drive: PiezoWalk® plus PICMA®
  • Travel Range: 400 µm Coarse + 40 µm Fine
  • 2 nm Closed-Loop Resolution
  • Direct Metrology: One Single Control Loop with Capacitive Sensors
  • High Push and Holding Force to 25 N
  • Piezo Walking Drive w/o Wear and Tear & Outstanding Lifetime due to PICMA® Piezo Actuators
Back to Top     Product Description | Specs / Drawings | Ordering Info | PDF




PILine® Ultrasonic Linear Piezo Motor / Actuators



M-272 Linear Shaft Motor Drive for Automation: Ultrasonic Self-Locking Motor


 Linear Shaft Motor with Ultrasonic Motor and Linear Encoder
  • Fast: Velocity up to 8"/second
  • Self-Locking Ultrasonic Shaft Motor
  • Easy Integration: Linear Guides and Linear Encoder are Integrated
Watch Video | Product Description | Specs / Drawings | Ordering Info | PDF


linear motors

M-674 PILine® RodDrive Integrated Piezo Linear Motor Drive


Integrated Piezo Linear Motor Drive
  • Drive-Component for Integration into Micropositioning Systems
  • Flexible Choice of Travel Ranges to Several 100 mm
  • Flexible Choice of Push/Pull Forces to Several 10 N
  • Minimum Incremental Motion to 0.05 Micron
  • Velocity to 400 mm/s
  • Self-Locking
Integrated Piezo Linear Motor Drive
Product Description | Specs / Drawings | Ordering Info | PDF


linear motor control

PILine® Translation Stages



M-663 PILine® Miniature Translation Stages with Closed-Loop Ultrasonic Piezo Linear Motors


Closed Loop Ultrasonic Piezo Linear Motors
  • Smallest Translation Stage with Closed-Loop Linear Motor Drive and Linear Encoder
  • 19 mm Travel Range
  • Velocity up to 400 mm/s
  • Accelerations up to 20 g
  • Resolution to 0.1 Micron
  • Integrated Direct-Metrology Linear Encoder
  • AutoLock Feature
  • XY Combinations Available
  • 20000 h MTBF
  • Vacuum Versions Available
Back to Top Product Description | Specs / Drawings | Ordering Info | PDF


linear motor actuator

M-664 PILine® Miniature Translation Stages with Closed-Loop Ultrasonic Piezo Linear Motors


Miniature Translation Stages
  • Travel Range 25 mm
  • Max. Velocity 400 mm/s
  • Ultra-Low Profile, 15 mm
  • Direct Metrology Linear Encoder with 0.1 µm Resolution
  • High Guiding Accuracy with Crossed Roller Bearings
  • Compact XY Combinations
  • Piezo Linear Motor with 6 N Drive Force
  • Self Locking at Rest
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Translation Stages

M-661 - M-662 PILine® Miniature Translation Stages with Ultrasonic Piezo Linear Motors


Smallest Translation
  • Smallest Translation Stage with High-Speed Linear Motor Drive
  • 20 mm Travel Range
  • Velocity to 500 mm/s
  • Acceleration to 20 g
  • Resolution to 50 Nanometer
  • Self-Locking
  • XY-Combinations Available
  • 20000 h MTBF
  • Vacuum Versions to 10-7 hPa
Product Description | Specs / Drawings | Ordering Info | PDF


linear actuator motor

M-683 Precision Micro Translation Stage Low-Profile & High-Speed with Ultrasonic Piezomotor, Direct Position Metrology


Precision Micro Translation Stage
  • Max. Velocity 350 mm/sLow Profile: Only 21 mm Height
  • Compact XY Combination Possible
  • Up to 6 N Force Generation
  • Direct Metrology Linear Encoder, 0.1 µm Resolution
  • Travel Range 50 mm
  • Excellent Guiding Accuracy Through Crossed Roller Bearings
  • PILine®: Non-Magnetic and Vacuum-Compatible Working Principle
  • Self-Locking at Rest
Product Description | Specs / Drawings | Ordering Info | PDF


Direct Metrology Linear Encoder

M-686 Low-Profile XY Open-Frame Piezomotor Linear Slide with Linear Encoders


Linear Slide with Linear Encoders
  • Integrated Closed-Loop Piezomotor Drives Provide High Speed to 100 mm/s
  • 25 x 25 mm Travel Ranges
  • Integrated Linear Encoders with 0.1 µm Resolution
  • Compact Design; 27 mm Profile Height, 150 x 150 mm Footprint
  • Large Clear Aperture 78 x 78 mm, 66 x 66 mm in Extreme Position
  • Self-Locking at Rest
  • Compatible with PI Piezo Nanopositioning / Scanning Stages
Product Description | Specs / Drawings | Ordering Info | PDF


linear actuator motor


M-660 PILine® Rotation Stage Fast Positioning, Ultra-Low Profile


Micro Rotation Stages with PILine® Motor
  • Unlimited Travel Range
  • Max. Velocity 720 °/s
  • Low Profile: Only 15 mm in Height
  • Self-Locking Ceramic Direct Drive: Energy Saving & High Position Stability
  • Direct Metrology Linear Encoder, 40 µrad Resolution
  • PILine® Direct Drive: Non-Magnetic and Vacuum-Compatible Working Principle
  • Compact Combinations with Linear Stages
Product Description | Specs / Drawings | Ordering Info | PDF




M-545.2U XY Microscope Stage with Ultrasonic Linear Drives

Open Frame Piezomotor Stage
  • Integrated Closed-Loop Linear Piezomotor Drives Provide Smooth Motion and High Speed to 50 mm/s
  • Travel Ranges 25 x 25 mm
  • Integrated Linear Encoders with 0.5 µm Resolution
  • Compact Design: 30 mm Profile Height, Mounts Directly to Microscopes
  • Self-Locking at Rest, with no Servo Dither
  • Compatible with PI Piezo Nanopositioning / Scanning Stages
PDF




U-164 PILine® Linear Drive, Fast, Compact OEM Ultrasonic Linear Motor


Ultrasonic Linear Motor
  • Patented Principle Features with High Forces in Small Space
  • Easy Mounting
  • Max. Velocity 500 mm/s
  • Acceleration up to 5 g
  • Min. Incremental Motion to 0,05 µm
  • Self Locking, Push-/Pull Forces to 4 N
  • No Electro-Magnetic Fields
  • Integrated Actuators & Positioning Systems Also Available
Back to Top Product Description | Specs / Drawings | Ordering Info | PDF


linear motors

Download These Catalogs and Brochures for More Information...

Linear Actuators Catalog Miniature Linear Stages Brochure Piezo Motors Catalog
More Data...

Piezo Linear Motor IntroductionPiezo Linear Motor Introduction
Piezomotor Working PrinciplePILine® Ultrasonic Piezomotor Working
    Principle

Piezo Walk Working PrincipleNEXLINE® Piezo-Walk® Working Principle
Linear Actuators
    Catalog
Miniature Linear
    Stages Brochure
Piezo Motors Catalog