Piezo Ceramic Motors / Piezo Linear Motor Stages / |
| Piezo Motor Pushers | Translation Stages | High-Res / High Force | XY Motor Slide | Motor Controllers | ||||
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| Highload Actuators | Flexure Actuators | Bender Actuators | Long Life Piezo Stacks | Stepper Actuators | ||||
PI manufactures several types of piezoelectric linear motors: Ultrasonic piezo motors (resonant motors), and Piezo Walk® stepping motors. Both are intrinsically vacuum compatible, non-magnetic and are self locking at rest. They basically provide unlimited travel, yet they are very different in their design, specifications and performance. Ultrasonic resonant motors and piezo motor actuators (PILine®) are characterized by very high speed to 1000 mm/s and a very compact and simple design (systems down to 8mm in length are available). PiezoWalk® linear motors (NEXLINE® and NEXACT® types) can achieve much higher forces and picometer range resolution but are more complex and not as fast. PiezoWalk® and ultrasonic piezo motors are in principle nonmagnetic and vacuum-compatible, a perfect match for many applications in the semiconductor industry. |
PiezoWalk (NEXLINE® / NEXACT®) High-Force Motors & Nanopositioning Drives |
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N-900 Miniature Stage, Non-Magnetic, Vacuum Compatible | |||
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This sub-miniature stage is driven by piezo walk motors and was designed to align samples in applications such as SEM.
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N-310 PiezoWalk® Compact NEXACT® OEM Piezo Stepping Drives | ||
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N-900 Nonmagnetic Piezo-Motor Linear Actuator | ||
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N-381 PiezoWalk® Linear Actuator, Manipulator, Piezo Stepper | ||
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N-111 NEXLINE® OEM Linear Actuator Nanopositioning Over Long Travel, PiezoWalk® Principle
- Travel Range 10 mm
- Resolutionto 0.025 nm Open-Loop,5 nm Closed-Loop
- Up To 50 N Force Generation and 70 N Holding Force
- Self-Locking at Rest, No Heat Generation
- Non-Magnetic and Vacuum-Compatible Working Principle
- Cleanroom Compatible
N-216 NEXLINE® Linear Actuator High-Force PiezoWalk® Drive for Long-Range Nanopositioning | ||
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N-661 PiezoWalk Motor-Driven Nanopositioning Stage; 20mm Travel, 20nm Encoder | ||
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N-664 PiezoWalk Motor-Driven Nanopositioning Stage; 30mm Travel, 0.5nm Encoder | ||
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N-510K High-Stiffness NEXLINE® Z Stage High-Precision Positioning, with Capacitive Sensors | ||
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PILine® Ultrasonic Linear Piezo Motor / Actuators | |||
M-272 Linear Shaft Motor Drive for Automation: Ultrasonic Self-Locking Motor | |||
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M-674 PILine® RodDrive Integrated Piezo Linear Motor Drive |
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PILine® Translation Stages |
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M-663 PILine® Miniature Translation Stages with Closed-Loop Ultrasonic Piezo Linear Motors | |||
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M-664 PILine® Miniature Translation Stages with Closed-Loop Ultrasonic Piezo Linear Motors | ||
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M-661 - M-662 PILine® Miniature Translation Stages with Ultrasonic Piezo Linear Motors |
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M-683 Precision Micro Translation Stage Low-Profile & High-Speed with Ultrasonic Piezomotor, Direct Position Metrology | ||
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M-686 Low-Profile XY Open-Frame Piezomotor Linear Slide with Linear Encoders | ||
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M-660 PILine® Rotation Stage Fast Positioning, Ultra-Low Profile | ||
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M-545.2U XY Microscope Stage with Ultrasonic Linear Drives | ||
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U-164 PILine® Linear Drive, Fast, Compact OEM Ultrasonic Linear Motor
- Patented Principle Features with High Forces in Small Space
- Easy Mounting
- Max. Velocity 500 mm/s
- Acceleration up to 5 g
- Min. Incremental Motion to 0,05 µm
- Self Locking, Push-/Pull Forces to 4 N
- No Electro-Magnetic Fields
- Integrated Actuators & Positioning Systems Also Available
Download These Catalogs and Brochures for More Information... | ![]() |
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More Data... Principle |
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Stages Brochure |
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