Linear Motor High-Resolution Positioning - Several Types of Piezo & Magnetic Motors at PI-USA
Linear Motor

Magnetic Linear Motors / Piezo Linear Motors
Direct-Drive Linear Stages & Rotary Stages


PI manufactures electromagnetic linear motors and several types of piezoelectric linear motors: Ultrasonic piezo motors (resonant motors), Piezo Stepping Motors and Inertia Motors.

Piezo Motors are intrinsically vacuum compatible, non-magnetic and self locking at rest. Compared to classical piezo drives they are not limited in travel. The individual drive concepts are optimized for different applications, they differ in their design, size, cost, force & speed and other performance parameters.

It is important to understand the principles to pick the best type for an application. For background information on piezo motors and actuators refer to the piezo motion tutorial or just contact a PI applications engineer for help.







Magnetic Linear



Fast Ultrasonic



Mini Inertia

Piezo Walk




Mini Ratchet

Magnetic Linear
3-Phase Motors
Fast Ultrasonic
Piezo Motors
Mini Inertia
Piezo Motors
PiezoWalk
Linear Motors
Mini Ratchet
Linear Actuators

Ultrasonic resonant motors (PILine®) are characterized by very high speed to 1000 mm/sec and a very compact and simple design (systems down to 8mm in length are available).

PiezoWalk® linear motors (NEXLINE® and NEXACT®) can achieve much higher forces and picometer range resolution but are more complex and not as fast.

Inertial piezo motors (PIshift stick-slip motors) are low cost and compact motors with forces to 10N and speed to 10 mm/sec. Linear Actuators are also available.

Traditional piezo mechanisms provide short travel, high forces & sub-nm resolution.

Electro-magnetic linear motors and air bearing stages are also available from PI.




Economical Precision Linear Translation Stages (Stick-Slip Piezo)





Q-522 Miniature Piezo Positioning Stage, 1/4" to 1" Travel, Direct Drive Inertia Motor



Mini Stage
Q-Motion Miniature Stages
Stick Slip Inertia Motor Working Principle and Applications in Precision Motion



    The Q-522 series of economical mini positioning stages are equipped with a compact piezo stick-slop inertia motor. Featuring dimensions from 22x22x10mm, the Q-522 is one of the smallest precision linear stages available on the market, offered with travel ranges of 1/4", 1/2" and 1".
    The optimized piezo motor direct drive enables resolution up to 1 nanometer and velocity to 10 mm/second. Open-loop and encoder equipped versions are available. Q-522 stages can be combined with the Q-612 series of miniature rotary positioners. No adapter plates are required for mounting.

  • Piezo Inertial Drive (Stick-slip)
  • Closed Loop Optical Encoder Option
  • Self Locking with no Current Draw
  • Vacuum Option
  • 1/4", 1/2" and 1" Travel
  • Velocity to 10mm/sec
  • From 22x22x10mm





Specifications & Drawings, Request Quote | PDF Datasheet




Q-521 Miniature Piezo Positioning Stage, 12mm to 32mm Travel, Direct Drive Inertia Motor



Q-521 mini stage The Q-521 miniature piezo positioner is an even smaller version of the Q-522 series, with dimensions from 21×30×10mm. It comes in open and closed-loop versions with two linear encoder options for 1 and 4 namometer resolution, respectively. Vacuum compatible versions are also offered for pressures as low as 10-9 hP. Applications include optics and photonics, metrology, microscopy, micromanipulation, biotechnology and automation.

  • 21 mm wide and 10 mm high with integrated encoder
  • 1nm and 4nm resolution encoder options
  • XY configurations w/o adapter plate
  • Travel range 12, 22 or 32 mm
  • Velocity 10 mm/sec
  • UHV versions


Specifications & Drawings, Request Quote




Q-632 Miniature Rotation Stages, 14 - 32mm Diameter, Direct Drive Inertia Motor



Mini Rotation Stage
    Q-632 miniature piezo driven rotary stages come in diameters from 14 to 32 mm. They provide microradian resolution and velocity to 45°/sec. Q-632 stages can be combined with the Q-522 series of linear positioners.

  • Piezo Inertial Drive (Stick-slip)
  • Self Locking with no Current Draw
  • 14 mm, 22 mm and 32 mm Diameter
  • Vacuum Option
  • Velocity to 45°/sec


Q-Motion Miniature Stages
Watch Video Animation




Specifications & Drawings, Request Quote | PDF Datasheet




Q-545 Linear Piezo Nanopositioning Stage, 1/2" and 1" Travel, Direct Drive Inertia Motor



Piezo Positioner
    This low profile linear translation stage is driven by a PIshift inertia-type piezo motor. The closed-loop stage is equipped with a high precision optical linear encoder providing for nanometer-level repeatability. An open-loop version and vacuum compatible and non-magnetic versions are also offered. The PIShift piezo inertia drive is very quiet, due to its high operating frequency of 20 kHz. It provides high holding forces of 10 N. The drive principle works similar to the classic tablecloth trick, a cyclical alternation of static und sliding friction between a moving runner and the drive element.

  • Vacuum Version
  • Optical Encoder, 2nm Resolution
  • Piezo Inertial Drive (Stick-slip)
  • 1/2" and 1" Travel
  • Velocity of 10 mm/sec
  • Load capacity up to 1 kg

Specifications & Drawings, Request Quote | PDF Datasheet




Nanometer Precision Linear Translation Stages (PiezoWalk)




N-565 Nanometer-Precision Compact Linear Stage with PiezoWalk Direct Drive Linear Motor

 
N-565 Nanometer-Precision Compact Linear Stage with PiezoWalk Linear Motor
Equipped with a PiezoWalk® direct drive linear motor, which combines piezo class resolution with long travel ranges, subnanometer resolution, high forces and stiffness, these nanopositioners are not subject to sliding friction or wear as motion is achieved when the “legs” lift off for each step. Designed for high-end applications in bio-nanotechnology, fiber-optics, microscopy, semiconductor testing, and metrology and scientific research in beamlines and laser labs.

  • Ultra-High Precision Design: 0.5nm Encoder Resolution
  • Patented PiezoWalk® Technology combines piezo-class resolution with long travel and extreme reliability.
  • Self-Locking at power off. No drift, no heat generation at position hold.
  • 3 Travel Ranges: ˝”, 1” and 2”
  • Compact Design: 65mm Width, 20mm Height


  • PiezoMike Actuators
    Watch Video Animation


Specifications & Drawings, Request Quote l PDF Datasheet



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High-Speed Linear Translation / Rotation Stages (Ultrasonic Motor)


Ultrasonic linear and rotary direct drive motors are based on a compact piezo ceramic element is driven at high frequencies of 100’s of kHz. Each oscillation cycle transfers nanoscopic motion to a linear or rotary ceramic surface bonded to a linear runner or rotary platform. Ultrasonic motors provide very fast start/stop behavior, smooth motion with a very wide dynamic range from microns/second to 100’s of millimeters/second.

Learn more on Ultrasonic Motors
Positioning Performance of Ultrasonic Motors
Reliability of Ultrasonic Motors



U-521 / M-663 Miniature Linear Stage, Closed-Loop Direct Drive Ultrasonic Motor


Closed Loop Ultrasonic Piezo  Motors
  • Smallest Translation Stage with High-Speed Ultrasonic Linear Motor and Closed-Loop Linear Encoder
  • 18 mm Travel Range
  • Velocity up to 250 mm/sec
  • Accelerations up to 20 g
  • Resolution to 0.1 Micron
  • Integrated Direct-Metrology Linear Encoder
  • AutoLock Feature
  • XY Combinations Available
  • 20000 h MTBF
  • Vacuum Versions Available


Ultrasonic Motor Operating Principle Animation





Specifications & Drawings, Request Quote | PDF Datasheet





U-624 Miniature Direct Drive Rotation Stage, Closed-Loop Ultrasonic Motor


Closed Loop Ultrasonic Piezo  Motors
  • Smallest Direct Drive Rotation Stage with Direct Metrology
    Encoder & Closed-Loop High-Speed Piezo Motor
  • 30x30x12 mm Small
  • Velocity up to 720 deg/sec
  • Resolution to 0.1 Micron
  • Integrated Direct-Metrology Encoder
  • Auto Locking with no Current Draw
  • Vacuum Versions Available

Specifications & Drawings, Request Quote | PDF Datasheet





U-651 / M-660 Piezo Motor Direct Drive Rotation Stage: High Speed, Ultra-Low Profile


Micro Rotation Stages with PILine® Motor

  • Continous Rotation Range
  • Direct Drive: Maximum Speed 720 degrees/second
  • Very low Profile Height of only 15mm Allows for Compact Multi-Axis Combinations
  • Self-Locking Ceramic Direct Drive: Energy Saving & High Position Stability
  • Direct Metrology Encoder: to 4 µrad Resolution
  • PILine® Ultrasonic Direct Drive Motor: Non-Magnetic and Vacuum-Compatible Working Principle

Micro Rotation Stages with PILine® Motor
Watch Video Animation

Specifications & Drawings, Request Quote | PDF Datasheet




M-664 PILine® Direct Drive Linear Motor Stage, Closed-Loop Ultrasonic Motor


Miniature Translation Stages
  • Travel Range 25 mm
  • Max. Velocity 400 mm/sec
  • Ultra-Low Profile, 15 mm
  • Direct Metrology Linear Encoder with 0.1 µm Resolution
  • High Guiding Accuracy with Crossed Roller Bearings
  • Compact XY Combinations
  • Piezo Linear Motor with 6 N Drive Force
  • Self Locking at Rest

Specifications & Drawings, Request Quote | PDF Datasheet


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M-683 Direct Drive Linear Motor Translation Stage: High-Speed, Ultrasonic Motor


Precision Micro Translation Stage
  • Max. Velocity 350 mm/sec
  • Low Profile: Only 21 mm Height
  • Compact XY Combination Possible
  • Up to 6 N Force Generation
  • Direct Metrology Linear Encoder, 0.1 µm Resolution
  • Travel Range 50 mm
  • Excellent Guiding Accuracy Through Crossed Roller Bearings
  • PILine®: Non-Magnetic and Vacuum-Compatible Working Principle
  • Self-Locking at Rest

Specifications & Drawings, Request Quote | PDF Datasheet


Direct Metrology  Encoder

M-686 Low-Profile XY Direct Drive Linear-Motor Stage with Integrated Encoders


Linear Motor Stage with Encoders
  • Integrated Closed-Loop Piezomotor Drives Provide High Speed to 100 mm/sec
  • 25 x 25 mm Travel Ranges
  • Integrated Linear Encoders with 0.1 µm Resolution
  • Compact Design; 27 mm Profile Height, 150 x 150 mm Footprint
  • Large Clear Aperture 78 x 78 mm, 66 x 66 mm in Extreme Position
  • Self-Locking at Rest
  • Compatible with PI Piezo Nanopositioning / Scanning Stages
Specifications & Drawings, Request Quote | PDF Datasheet




M-687 XY Microscope Stage with Direct Drive Ultrasonic Linear Motor

Open Frame Piezomotor Stage
  • Integrated Closed-Loop Piezomotor Drives Provide Smooth Motion and High Speed to 120 mm/sec
  • Travel Ranges 135mmx85 mm
  • Integrated Linear Encoders with 0.1 µm Resolution
  • Compact Design: Low Profile Height, for Inverted Microscopes
  • Self-Locking at Rest, with no Servo Dither
  • Compatible with PI Piezo Nanopositioning / Scanning Stages


Specifications & Drawings, Request Quote




PILine® Ultrasonic Piezo Motor / Actuators




U-264KSPA PILine® Ultrasonic Direct Drive Linear Motor Actuator for OEMs (Closed-Loop, Unguided)


  Shaft Motor with Ultrasonic Motor and  Encoder
  • OEM Actuator for Integration into Micropositioning Systems
  • Compact, Low Profile
  • High Speed to 150 mm/second
  • Positioning ranges to 200mm (optional 100 to 300 mm)
  • LinearEncoder provides 0.6 µm resolution
  • Holding force 6N
  • Self-Clamping Principle


PDF Datasheet



PiezoWalk Linear Nanopositioning Drives / High Force Motors



PiezoWalk Linear Motors are based on the coordinated motion of several piezo elements. They provide a very responsive short travel mode (no stepping required) with sub-nanometer resolution and several long travel modes, optimized for maximum force, speed or constant velocity. PI makes two basic types of PiezoWalk motors: the smaller and faster 300-series and the higher-force 100-series. Both provide very high stability and sub-nanometer resolution.



N-310 PiezoWalk® Compact OEM Piezo Stepping Linear Motor


Nanopositioning Drive

  • Up to 125 mm Positioning Range
  • Compact Design
  • 0.03 nm Resolution
  • To 10 N Push/Pull Force
  • Low Operating Voltage
  • Self Locking, with no Heat Dissipation, Nanometer Stability
  • Non-Magnetic and Vacuum-Compatible Working Principle


Piezo Motor Actuator
Watch Video Animation


Specifications & Drawings, Request Quote | PDF Datasheet




N-381 PiezoWalk® Direct Drive Linear Actuator, Piezo Stepper


Piezo Stepper
  • Travel Range 30 mm
  • Novel, Zero-Wear Piezo Stepping Drive, Ideal for Micro- and Nano-Manipulation
  • Optional Linear Encoder: Highest Accuracy, 20 nm Resolution
  • Very High Acceleration, e.g. for Cell Penetration
  • Two Operating Modes: Stepping and Dither Mode for 30 pm Resolution**
  • Up to 10 N Force Generation
  • Self Locking, no Heat Generation
  • Smooth Motion, no Closed-Loop Jitter
  • Vacuum-Compatible and Non-Magnetic Versions

Specifications & Drawings, Request Quote | PDF Datasheet




N-111 NEXLINE® High-Force PiezoWalk® Direct Drive Linear Motor Actuator


Piezo Nanopositioning Drive
  • Travel Range 10 mm
  • Resolution to 0.025 nm Open-Loop,5 nm Closed-Loop
  • Up To 50 N Force Generation and 70 N Holding Force
  • Self-Locking at Rest, No Heat Generation
  • Non-Magnetic and Vacuum-Compatible Working Principle
  • Cleanroom Compatible
Specifications & Drawings, Request Quote | PDF Datasheet


Linear Motor Long Travel

N-216 NEXLINE® High Force PiezoWalk® Direct Drive Linear Motor Actuator


High Load Linear Motor
  • Travel Range 20 mm
  • Resolutionto 0.03 nm Open-Loop, 5 nm Closed-Loop
  • Up to 800 N Holding Force
  • Self-Locking at Rest
  • Non-Magnetic and Vacuum-Compatible Working Principle
  • Cleanroom Compatible



Piezo Motor Actuator
Watch Video Animation



Specifications & Drawings, Request Quote | PDF Datasheet




N-510K NEXLINE® High Stiffness Elevation Stage with Direct Drive PiezoWalk Motors


  • Based on NEXLINE® Piezowalk Motor Technology
  • Self Locking at Rest, No Heat Generation
  • Hybrid Drive: PiezoWalk® plus PICMA®
  • Travel Range: 400 µm Coarse + 40 µm Fine
  • 2 nm Closed-Loop Resolution
  • Direct Metrology: One Single Control Loop with Capacitive Sensors
  • High Push and Holding Force to 25 N
  • Piezo Walking Drive w/o Wear and Tear & Outstanding Lifetime due to PICMA® Piezo Actuators

Specifications & Drawings, Request Quote | PDF Datasheet




Stick-Slip Inertia Motors: Rachet / Direct Drive

 

Linear Motor Long Travel

N-470 / N-472 PiezoMike Micrometer, with Piezo Ratchet Drive & Sensor Option


Piezo-Motor Actuator
  • Very Compact Inertial Piezo Motor-Drive
  • Closed-Loop Version with Position Encoder Available
  • Vacuum Versions
  • Self-Clamping: Holding force >100 N
  • Pushing force 4 lbs
  • 30 nanometer step size
  • Positioning range to 13mm
  • Self-clamping, no heat generation at rest
  • Non-magnetic and vacuum-compatible operating principle

PiezoMike Actuators
Watch Video Animation




Specifications: N-472 Closed-Loop Version | Specifications: N-470 Basic Version
Specifications: Vacuum Version | PDF Datasheet


N-412 Miniature Actuator with Mini-Rod Direct Drive Piezo Inertia Linear Motor


Piezo-Motor  Actuator
  • Velocity > 5 mm/sec
  • Very Compact
  • Easy front mount
  • 300 nm resolution
  • 7 N Push/Pull Force
  • Self-locking, no heat generation at rest

PiezoMike Actuators
Watch Video Animation


Specifications & Drawings, Request Quote | PDF Datasheet


Linear Motor Long Travel

N-422 Miniature Actuator with Mini-Rod Direct Drive Piezo Inertia Linear Motor


Piezo-Motor Linear Actuator
  • Compact Stick-Slip Drive
  • AutoLock at Rest, 10N Holding Force
  • 5mm/Second Max. Speed
  • Low-Noise, Patented Design





Specifications & Drawings, Request Quote | PDF Datasheet


Linear Motor Long Travel





Download These Catalogs and Brochures for More Information...

Linear Actuators Catalog Miniature Linear Stages Brochure Piezo Motors Catalog


Linear Actuators
    Catalog
Miniature Linear Stages Brochure Piezo Motors Catalog



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