Linear Motor

 

 

Linear Motors / Linear Motor Stages
Non Magnetic Actuators / Rotary Positioners


PI manufactures several types of piezoelectric linear motors: Ultrasonic piezo motors (resonant motors), and Piezo Walk® stepping motors. Both are intrinsically vacuum compatible, non-magnetic and are self locking at rest. They basically provide unlimited travel, yet they are very different in their design, specifications and performance.

It is important to understand the principles to pick the best type for an application. For more information on the differences between piezo motors and actuators and their applications refer to the piezo motion tutorial or just contact a PI applications engineer for help.

Stick-Slip Stage
Ultrasonic  Actuators
Stick-Slip Intertia Actuators
Flexure-Guided  Actuators
Piezo Stack  Actuators
Mini Stages Fast Motors Stick-Slip PiezoWalk Drive Fast Rotary

Ultrasonic resonant motors and piezo motor actuators (PILine®) are characterized by very high speed to 1000 mm/sec and a very compact and simple design (systems down to 8mm in length are available).

PiezoWalk® linear motors (NEXLINE® and NEXACT® types) can achieve much higher forces and picometer range resolution but are more complex and not as fast.

PiezoWalk® and ultrasonic piezo motors are in principle nonmagnetic and vacuum-compatible, a perfect match for many applications in the semiconductor industry.

Inertial piezo motors (PIshift stick-slip motors) are low cost and compact motors with forces to 10N and speed to 10 mm/sec.

Classical Piezo Actuators / Flexure Mechanisms (analog) provide short travel and high forces with sub-millisecond response. Click here for Overview of piezo stacks and flexure actuators.

Piezo Motor Overview / Technical Background

Download the piezo motor overview with technical background and product data sheets
Translation Stages


Piezo Motor Stages
Linear & Rotary


High Resolution Translation Stages


Electromagnetic Linear Motor Stages


High Speed Translation Stages

Piezo Linear Motors / Actuators


High Speed Translation Stages




Economical Precision Linear Translation Stages (Stick-Slip Piezo)





LPS-22 Miniature Piezo Positioning Stage, 1/4" to 1" Travel



Mini Stage
    The LPS-22 series of economical mini positioning stages are driven by a compact piezo inertia motor. They are offered with travel ranges of 1/4", 1/2" and 1". Featuring dimensions as small as 22x22x10 mm, the LPS-22 is one of the smallest precision linear stages available on the market. Open-loop and encoder equipped versions are available enabling resolution of 1 nm. The optimized piezo motor drive allows for maximum push/pull forces of 3 N and a velocity of to 10 mm/sec. LPS-22 stages can be combined with the RPS series of miniature rotary positioners. No adapter plates are required for mounting.

  • Piezo Inertial Drive (Stick-slip)
  • Optical Encoder Option
  • Self Locking with no Current Draw
  • Vacuum Option
  • 1/4", 1/2" and 1" Travel
  • Velocity to 10 mm/sec
  • From 22x22x10 mm
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Specifications & Drawings, Request Quote | PDF Brochure




RPS Miniature Rotation Stages, 14 - 32 mm diameter



Mini Rotation Stage
    RPS miniature piezo driven rotary stages come in diameters from 14 to 32 mm. They provide microradian resolution and velocity to 45°/sec. RPS stages can be combined with the LPS-22 series of linear positioners.

  • Piezo Inertial Drive (Stick-slip)
  • Self Locking with no Current Draw
  • 14 mm, 22 mm and 32 mm Diameter
  • Vacuum Option
  • Velocity to 45°/sec
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Specifications & Drawings, Request Quote | PDF Brochure




LPS-45 Linear Piezo Nanopositioning Stage, 1/2" and 1 Inch Travel



Piezo Positioner
    This low profile linear translation stage is driven by a PIshift inertia-type piezo motor. The closed-loop stage is equipped with a high precision optical linear encoder providing for nanometer-level repeatability. An open-loop version and vacuum compatible and non-magnetic versions are also offered. The PIShift piezo inertia drive is very quiet, due to its high operating frequency of 20 kHz. It provides high holding forces of 10 N. The drive principle works similar to the classic tablecloth trick, a cyclical alternation of static und sliding friction between a moving runner and the drive element.

  • Vacuum Version
  • Optical Encoder, 2nm Resolution
  • Piezo Inertial Drive (Stick-slip)
  • 1/2" and 1" Travel
  • Velocity of 10 mm/sec
  • Load capacity up to 1 kg
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Specifications & Drawings, Request Quote | PDF Brochure




Nanometer Precision Linear Translation Stages (PiezoWalk)





LPS-24 PiezoWalk Motor-Driven Nanopositioning Stage; 15mm Travel, 0.5 nm Encoder



Miniature Linear Stage, Piezo Motor
    PiezoWalk is a more powerful and complex drive principle than stick-slip. It provides better volocity control and also allows for a highly dynamic direct-piezo mode actuation range of several microns, with picometer class sensitivity.

  • 15mm Travel Range
  • Very Compact Design
  • High Resolution Linear encoder, 0.5 nanometer / 150 nm versions
  • 1 lb Holding Force
  • Integrated Miniature Piezo Linear Motor
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Specifications & Drawings, Request Quote | PDF Datasheet




N-664 PiezoWalk Linear Motor-Driven Nanopositioning Stage; 30mm Travel, 0.5 Nanometer Encoder



High-Resolution Translation Stage
  • 0.5 Nanometer Encoder Resolution
  • Two Operating Modes: Continuous Stepping Mode and Continuously Variable, High-Dynamics Analog Mode for upt to 30 Picometers Resolution**
  • Travel range 30 mm
  • Low Profile, Small Footprint: 20x65x120mm
  • Maximum Speed 10 mm/second
Specifications & Drawings, Request Quote | PDF Datasheet


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High-Speed Linear Translation / Rotation Stages (Ultrasonic Motor)





M-663 Miniature Linear Stage, Closed-Loop Ultrasonic Motor


Closed Loop Ultrasonic Piezo  Motors
  • Smallest Translation Stage with Closed-Loop Linear Motor Drive and Linear Encoder
  • 18 mm Travel Range
  • Velocity up to 250 mm/s
  • Accelerations up to 20 g
  • Resolution to 0.1 Micron
  • Integrated Direct-Metrology Linear Encoder
  • AutoLock Feature
  • XY Combinations Available
  • 20000 h MTBF
  • Vacuum Versions Available
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Specifications & Drawings, Request Quote | PDF Datasheet





U-624 Miniature Rotation Stage, Closed-Loop Ultrasonic Motor


Closed Loop Ultrasonic Piezo  Motors
  • Smallest Direct Drive Rotation Stage with Direct Metrology
    Encoder & Closed-Loop High-Speed Piezo Motor
  • 30x30x12 mm Small
  • Velocity up to 720 deg/sec
  • Resolution to 0.1 Micron
  • Integrated Direct-Metrology Encoder
  • Auto Locking with no Current Draw
  • Vacuum Versions Available
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Specifications & Drawings, Request Quote | PDF Datasheet





M-660 Piezo Motor Rotation Stage: High Speed, Ultra-Low Profile


Micro Rotation Stages with PILine® Motor

  • Continous Rotation Range
  • Direct Drive: Maximum Speed 720 degrees/second
  • Very low Profile Height of only 15mm Allows for Compact Multi-Axis Combinations
  • Self-Locking Ceramic Direct Drive: Energy Saving & High Position Stability
  • Direct Metrology Encoder: to 4 µrad Resolution
  • PILine® Ultrasonic Direct Drive Motor: Non-Magnetic and Vacuum-Compatible Working Principle

Micro Rotation Stages with PILine® Motor
Watch Video Animation
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Specifications & Drawings, Request Quote | PDF Datasheet




M-664 PILine® Linear Motor Stage, Closed-Loop Ultrasonic Drive


Miniature Translation Stages
  • Travel Range 25 mm
  • Max. Velocity 400 mm/s
  • Ultra-Low Profile, 15 mm
  • Direct Metrology Linear Encoder with 0.1 µm Resolution
  • High Guiding Accuracy with Crossed Roller Bearings
  • Compact XY Combinations
  • Piezo Linear Motor with 6 N Drive Force
  • Self Locking at Rest
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Specifications & Drawings, Request Quote | PDF Datasheet


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M-683 Linear Translation Stage: Low-Profile & High-Speed, Ultrasonic Motor, Direct Position Metrology


Precision Micro Translation Stage
  • Max. Velocity 350 mm/sLow Profile: Only 21 mm Height
  • Compact XY Combination Possible
  • Up to 6 N Force Generation
  • Direct Metrology Encoder, 0.1 µm Resolution
  • Travel Range 50 mm
  • Excellent Guiding Accuracy Through Crossed Roller Bearings
  • PILine®: Non-Magnetic and Vacuum-Compatible Working Principle
  • Self-Locking at Rest
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Specifications & Drawings, Request Quote | PDF Datasheet


Direct Metrology  Encoder

M-686 Low-Profile XY Linear-Motor Stage with Integrated Encoders


Linear Motor Stage with Encoders
  • Integrated Closed-Loop Piezomotor Drives Provide High Speed to 100 mm/s
  • 25 x 25 mm Travel Ranges
  • Integrated Linear Encoders with 0.1 µm Resolution
  • Compact Design; 27 mm Profile Height, 150 x 150 mm Footprint
  • Large Clear Aperture 78 x 78 mm, 66 x 66 mm in Extreme Position
  • Self-Locking at Rest
  • Compatible with PI Piezo Nanopositioning / Scanning Stages
Specifications & Drawings, Request Quote | PDF Datasheet




M-687 XY Microscope Stage with Ultrasonic Linear Motor

Open Frame Piezomotor Stage
  • Integrated Closed-Loop Piezomotor Drives Provide Smooth Motion and High Speed to 120 mm/sec
  • Travel Ranges 135mmx85 mm
  • Integrated Linear Encoders with 0.1 µm Resolution
  • Compact Design: Low Profile Height, for Inverted Microscopes
  • Self-Locking at Rest, with no Servo Dither
  • Compatible with PI Piezo Nanopositioning / Scanning Stages


Specifications & Drawings, Request Quote |




PILine® Ultrasonic Piezo Motor / Actuators




M-272 Linear Shaft Motor for Automation: Ultrasonic Self-Locking Motor


  Shaft Motor with Ultrasonic Motor and  Encoder
  • Fast: Velocity up to 8"/second
  • Self-Locking Ultrasonic Shaft Motor
  • Easy Integration: Guiding System and Encoder Integrated




Piezo Motor Actuator
Watch Video Animation
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Watch Video | Specifications & Drawings, Request Quote | Ordering Info | PDF Datasheet


 motors

RodDrive Piezo Motor Drive for OEMs


Integrated Piezo  Motor Drive
Integrated Piezo  Motor Drive
  • OEM Linear drive for integration in to positioning sytems
  • Requires external linear encoder for position feedback
  • Velocity up to 250 mm/sec
  • Travel ranges up to 150 mm
  • Generated force up to 15 N


Piezo Motor Actuator
Watch Video Animation


Specifications & Drawings, Request Quote | PDF Datasheet




PiezoWalk Linear Nanopositioning Drives / High Force Motors



PiezoWalk Linear Motors are based on the coordinated motion of several piezo elements. They provide a very responsive short travel mode (no stepping required) with sub-nanometer resolution and several long travel modes, optimized for maximum force, speed or constant velocity. PI makes two basic types of PiezoWalk motors: the smaller and faster 300-series and the higher-force 100-series. Both provide very high stability and sub-nanometer resolution.



N-310 PiezoWalk® Compact OEM Piezo Stepping Linear Motor


Nanopositioning Drive

  • Up to 125 mm Positioning Range
  • Compact Design
  • 0.03 nm Resolution
  • To 10 N Push/Pull Force
  • Low Operating Voltage
  • Self Locking, with no Heat Dissipation, Nanometer Stability
  • Non-Magnetic and Vacuum-Compatible Working Principle


Piezo Motor Actuator
Watch Video Animation


Specifications & Drawings, Request Quote | PDF Datasheet




N-381 PiezoWalk® Actuator, Piezo Stepper


Piezo Stepper
  • Travel Range 30 mm
  • Novel, Zero-Wear Piezo Stepping Drive, Ideal for Micro- and Nano-Manipulation
  • Optional Linear Encoder: Highest Accuracy, 20 nm Resolution
  • Very High Acceleration, e.g. for Cell Penetration
  • Two Operating Modes: Stepping and Dither Mode for 30 pm Resolution**
  • Up to 10 N Force Generation
  • Self Locking, no Heat Generation
  • Smooth Motion, no Closed-Loop Jitter
  • Vacuum-Compatible and Non-Magnetic Versions
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Specifications & Drawings, Request Quote | PDF Datasheet




N-111 NEXLINE® High-Force PiezoWalk® Linear Motor Actuator


Piezo Nanopositioning Drive
  • Travel Range 10 mm
  • Resolution to 0.025 nm Open-Loop,5 nm Closed-Loop
  • Up To 50 N Force Generation and 70 N Holding Force
  • Self-Locking at Rest, No Heat Generation
  • Non-Magnetic and Vacuum-Compatible Working Principle
  • Cleanroom Compatible
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Specifications & Drawings, Request Quote | PDF Datasheet


Linear Motor Long Travel

N-216 NEXLINE® High Force PiezoWalk® Linear Motor Actuator


High Load Linear Motor
  • Travel Range 20 mm
  • Resolutionto 0.03 nm Open-Loop, 5 nm Closed-Loop
  • Up to 800 N Holding Force
  • Self-Locking at Rest
  • Non-Magnetic and Vacuum-Compatible Working Principle
  • Cleanroom Compatible


Piezo Motor Actuator
Watch Video Animation


Specifications & Drawings, Request Quote | PDF Datasheet




N-510K High Stiffness PiezoWalk Elevation Stage


  • Self Locking at Rest, No Heat Generation
  • Hybrid Drive: PiezoWalk® plus PICMA®
  • Travel Range: 400 µm Coarse + 40 µm Fine
  • 2 nm Closed-Loop Resolution
  • Direct Metrology: One Single Control Loop with Capacitive Sensors
  • High Push and Holding Force to 25 N
  • Piezo Walking Drive w/o Wear and Tear & Outstanding Lifetime due to PICMA® Piezo Actuators
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Specifications & Drawings, Request Quote | PDF Datasheet






Stick-Slip Motors (Inertia Drive)

 

Linear Motor Long Travel

N-470 PiezoMike Inertial Motor Micrometer


Piezo-Motor  Actuator
  • Very Compact Inertial Piezo Motor-Drive
  • Vacuum Versions
  • Self-Clamping: Holding force >100 N
  • Pushing force 4 lbs
  • 30 nanometer step size
  • Travel range 7mm
  • No heat generation at rest
  • Non-magnetic and vacuum-compatible operating principle
Specifications & Drawings, Request Quote | Vacuum Version | PDF Datasheet |


Linear Motor Long Travel

N-422 Stick-Slip Piezo Linear Motor


Piezo-Motor Linear Actuator
  • Compact Stick-Slip Drive
  • AutoLock at Rest, 10N Holding Force
  • 5 mm/Second Max. Speed
  • Low-Noise, Patented Design
Specifications & Drawings, Request Quote | PDF Data Sheet


Linear Motor Long Travel


Higher Resolution Stages


High Resolution Translation Stages

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Higher Speed Stages


High Speed Translation Stages


linear motor actuator
Translation Stages


Higher Speed Pushers


High Speed Pushers

Higher Resolution Pushers


Miniature Translation Stages
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Product Technology Description / | PDF Datasheet




High Speed Piezo Motor Pushers PiezoWalk Motors (High Precision) Translation Stages (High Speed / Res) XY Motor Slide
Rotation Stages
Rod Drives High Res / High Force Translation Stages XY Slide
Piezo Motors Flexure Actuators Traditional Actuators Stepper Actuators
Motor Controllers Flexure Actuators Stack Actuators Stepper Actuators






Download These Catalogs and Brochures for More Information...

Linear Actuators Catalog Miniature Linear Stages Brochure Piezo Motors Catalog


Linear Actuators
    Catalog
Miniature Linear Stages Brochure Piezo Motors Catalog


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