Linear Motor High-Resolution Positioning - Several Types of Piezoelectric Motor at PI-USA
Linear Motor

 

 

Linear Motors / Linear Motor Stages
Non Magnetic Actuators / Rotary Positioners


PI manufactures classical electromagnetic linear motors and several types of piezoelectric linear motors: Ultrasonic piezo motors (resonant motors), and Piezo Walk® stepping motors. Both are intrinsically vacuum compatible, non-magnetic and are self locking at rest. They basically provide unlimited travel, yet they are very different in their design, specifications and performance.

It is important to understand the principles to pick the best type for an application. For more information on the differences between piezo motors and actuators and their applications refer to the piezo motion tutorial or just contact a PI applications engineer for help. More information on motion systems using classical electromagnetic linear motors (mechancal bearings and air bearings).

Stick-Slip Stage
Electromagnetic Linear Motor
Stick-Slip Intertia Actuators
Flexure-Guided  Actuators
Piezo Stack  Actuators
Mini Stages w/Piezo Motors Classical Linear Motors Stick-Slip PiezoWalk Drive Linear Motor Fast Rotary

Ultrasonic resonant motors and piezo motor actuators (PILine®) are characterized by very high speed to 1000 mm/sec and a very compact and simple design (systems down to 8mm in length are available).

PiezoWalk® linear motors (NEXLINE® and NEXACT® types) can achieve much higher forces and picometer range resolution but are more complex and not as fast.

PiezoWalk® and ultrasonic piezo motors are in principle nonmagnetic and vacuum-compatible, a perfect match for many applications in the semiconductor industry.

Inertial piezo motors (PIshift stick-slip motors) are low cost and compact motors with forces to 10N and speed to 10 mm/sec.

Classical Piezo Actuators / Flexure Mechanisms (analog) provide short travel and high forces with sub-millisecond response. Click here for Overview of piezo stacks and flexure actuators.

Classical magnetic linear motor actuators and linear motors air bearing stages are also available from PI.

Piezo Motor Overview / Technical Background

Read the Piezo Motion Tutorial for more details on the different types of piezo linear motors.
Translation Stages


Piezo Motor Stages
Linear & Rotary


High Resolution Translation Stages


Electromagnetic Linear Motor Stages


High Speed Translation Stages

Piezo Linear Motors / Actuators


High Speed Translation Stages




Economical Precision Linear Translation Stages (Stick-Slip Piezo)





Q-522 Miniature Piezo Positioning Stage, 1/4" to 1" Travel



Mini Stage
    The Q-522 series of economical mini positioning stages are driven by a compact piezo inertia motor. They are offered with travel ranges of 1/4", 1/2" and 1". Featuring dimensions as small as 22x22x10 mm, the Q-522 is one of the smallest precision linear stages available on the market. Open-loop and encoder equipped versions are available enabling resolution up to 1 nanometer. The optimized piezo motor drive allows for maximum velocity of to 10 mm/second. Q-522 stages can be combined with the Q-612 series of miniature rotary positioners. No adapter plates are required for mounting.

  • Piezo Inertial Drive (Stick-slip)
  • Smallest Linear Stage with Closed Loop
    Optical Encoder Option
  • Self Locking with no Current Draw
  • Vacuum Option
  • 1/4", 1/2" and 1" Travel
  • Velocity to 10 mm/sec
  • From 22x22x10 mm

Linear Stage
Watch Video Animation


Specifications & Drawings, Request Quote | PDF Datasheet
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Q-521 Miniature Piezo Positioning Stage, 12mm to 32mm Travel



Q-521 mini stage The Q-521 miniature piezo positioner is an even smaller version of the Q-522 series, with dimensions from 21×30×10mm. It comes in open and closed-loop versions with two linear encoder options for 1 and 4 namometer resolution, respectively. Vacuum compatible versions are also offered for pressures as low as 10-9 hP. Applications include optics and photonics, metrology, microscopy, micromanipulation, biotechnology and automation.

  • 21 mm wide and 10 mm high with integrated encoder
  • 1nm and 4nm resolution encoder options
  • XY configurations w/o adapter plate
  • Travel range 12, 22 or 32 mm
  • Velocity 10 mm/sec
  • UHV versions


Specifications & Drawings, Request Quote




Q-632 Miniature Rotation Stages, 14 - 32 mm diameter



Mini Rotation Stage
    Q-632 miniature piezo driven rotary stages come in diameters from 14 to 32 mm. They provide microradian resolution and velocity to 45°/sec. Q-632 stages can be combined with the Q-522 series of linear positioners.

  • Piezo Inertial Drive (Stick-slip)
  • Self Locking with no Current Draw
  • 14 mm, 22 mm and 32 mm Diameter
  • Vacuum Option
  • Velocity to 45°/sec

Q-Motion Miniature Stages
Watch Video Animation



Specifications & Drawings, Request Quote | PDF Datasheet




Q-545 Linear Piezo Nanopositioning Stage, 1/2" and 1 Inch Travel



Piezo Positioner
    This low profile linear translation stage is driven by a PIshift inertia-type piezo motor. The closed-loop stage is equipped with a high precision optical linear encoder providing for nanometer-level repeatability. An open-loop version and vacuum compatible and non-magnetic versions are also offered. The PIShift piezo inertia drive is very quiet, due to its high operating frequency of 20 kHz. It provides high holding forces of 10 N. The drive principle works similar to the classic tablecloth trick, a cyclical alternation of static und sliding friction between a moving runner and the drive element.

  • Vacuum Version
  • Optical Encoder, 2nm Resolution
  • Piezo Inertial Drive (Stick-slip)
  • 1/2" and 1" Travel
  • Velocity of 10 mm/sec
  • Load capacity up to 1 kg

Specifications & Drawings, Request Quote | PDF Datasheet
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Nanometer Precision Linear Translation Stages (PiezoWalk)





LPS-24 PiezoWalk Motor-Driven Nanopositioning Stage; 15mm Travel, 0.5 nm Encoder



Miniature Linear Stage, Piezo Motor
    PiezoWalk is a more powerful and complex drive principle than stick-slip. It provides better volocity control and also allows for a highly dynamic direct-piezo mode actuation range of several microns, with picometer class sensitivity.

  • 15mm Travel Range
  • Very Compact Design
  • High Resolution Linear encoder, 0.5 nanometer / 150 nm versions
  • 1 lb Holding Force
  • Integrated Miniature Piezo Linear Motor

Specifications & Drawings, Request Quote | PDF Datasheet




LPS-65 PiezoWalk Linear Motor-Driven Nanopositioning Stage; up to 2” Travel, 0.5 Nanometer Encoder



High-Resolution Translation Stage The LPS-65 is a unique precision translation stage driven by a PiezoWalk linear motor and controlled by a high precision linear encoder with 0.5 nanometer resolution. The unique PiezoWalk motor allows long travel, with sub-nanometer resolution and two modes: step mode and a high-dynamics analog mode within each stepwidth of a few microns. See animation below for operating principle.

  • 0.5 Nanometer Encoder Resolution
  • Two Operating Modes: Continuous Stepping Mode and Continuously Variable, High-Dynamics Analog Mode
  • Travel ranges 1/2”, 1” and 2”
  • Low Profile, Small Footprint
  • Maximum Speed 10 mm/second

PiezoMike Actuators
Watch Video Animation


Specifications & Drawings, Request Quote
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High-Speed Linear Translation / Rotation Stages (Ultrasonic Motor)





M-663 Miniature Linear Stage, Closed-Loop Ultrasonic Motor


Closed Loop Ultrasonic Piezo  Motors
  • Smallest Translation Stage with High-Speed Ultrasonic Linear Motor and Closed-Loop Linear Encoder
  • 18 mm Travel Range
  • Velocity up to 250 mm/s
  • Accelerations up to 20 g
  • Resolution to 0.1 Micron
  • Integrated Direct-Metrology Linear Encoder
  • AutoLock Feature
  • XY Combinations Available
  • 20000 h MTBF
  • Vacuum Versions Available

Specifications & Drawings, Request Quote | PDF Datasheet





U-624 Miniature Rotation Stage, Closed-Loop Ultrasonic Motor


Closed Loop Ultrasonic Piezo  Motors
  • Smallest Direct Drive Rotation Stage with Direct Metrology
    Encoder & Closed-Loop High-Speed Piezo Motor
  • 30x30x12 mm Small
  • Velocity up to 720 deg/sec
  • Resolution to 0.1 Micron
  • Integrated Direct-Metrology Encoder
  • Auto Locking with no Current Draw
  • Vacuum Versions Available

Specifications & Drawings, Request Quote | PDF Datasheet





M-660 Piezo Motor Rotation Stage: High Speed, Ultra-Low Profile


Micro Rotation Stages with PILine® Motor

  • Continous Rotation Range
  • Direct Drive: Maximum Speed 720 degrees/second
  • Very low Profile Height of only 15mm Allows for Compact Multi-Axis Combinations
  • Self-Locking Ceramic Direct Drive: Energy Saving & High Position Stability
  • Direct Metrology Encoder: to 4 µrad Resolution
  • PILine® Ultrasonic Direct Drive Motor: Non-Magnetic and Vacuum-Compatible Working Principle

Micro Rotation Stages with PILine® Motor
Watch Video Animation

Specifications & Drawings, Request Quote | PDF Datasheet
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M-664 PILine® Linear Motor Stage, Closed-Loop Ultrasonic Drive


Miniature Translation Stages
  • Travel Range 25 mm
  • Max. Velocity 400 mm/s
  • Ultra-Low Profile, 15 mm
  • Direct Metrology Linear Encoder with 0.1 µm Resolution
  • High Guiding Accuracy with Crossed Roller Bearings
  • Compact XY Combinations
  • Piezo Linear Motor with 6 N Drive Force
  • Self Locking at Rest

Specifications & Drawings, Request Quote | PDF Datasheet


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M-683 Linear Translation Stage: Low-Profile & High-Speed, Ultrasonic Motor, Direct Position Metrology


Precision Micro Translation Stage
  • Max. Velocity 350 mm/sLow Profile: Only 21 mm Height
  • Compact XY Combination Possible
  • Up to 6 N Force Generation
  • Direct Metrology Encoder, 0.1 µm Resolution
  • Travel Range 50 mm
  • Excellent Guiding Accuracy Through Crossed Roller Bearings
  • PILine®: Non-Magnetic and Vacuum-Compatible Working Principle
  • Self-Locking at Rest

Specifications & Drawings, Request Quote | PDF Datasheet
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Direct Metrology  Encoder

M-686 Low-Profile XY Linear-Motor Stage with Integrated Encoders


Linear Motor Stage with Encoders
  • Integrated Closed-Loop Piezomotor Drives Provide High Speed to 100 mm/s
  • 25 x 25 mm Travel Ranges
  • Integrated Linear Encoders with 0.1 µm Resolution
  • Compact Design; 27 mm Profile Height, 150 x 150 mm Footprint
  • Large Clear Aperture 78 x 78 mm, 66 x 66 mm in Extreme Position
  • Self-Locking at Rest
  • Compatible with PI Piezo Nanopositioning / Scanning Stages
Specifications & Drawings, Request Quote | PDF Datasheet




M-687 XY Microscope Stage with Ultrasonic Linear Motor

Open Frame Piezomotor Stage
  • Integrated Closed-Loop Piezomotor Drives Provide Smooth Motion and High Speed to 120 mm/sec
  • Travel Ranges 135mmx85 mm
  • Integrated Linear Encoders with 0.1 µm Resolution
  • Compact Design: Low Profile Height, for Inverted Microscopes
  • Self-Locking at Rest, with no Servo Dither
  • Compatible with PI Piezo Nanopositioning / Scanning Stages


Specifications & Drawings, Request Quote
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PILine® Ultrasonic Piezo Motor / Actuators




U-264KSPA PILine® Ultrasonic Motor Actuator for OEMs (Closed-Loop, Unguided)


  Shaft Motor with Ultrasonic Motor and  Encoder
  • OEM Actuator for Integration into Micropositioning Systems
  • Compact, Low Profile
  • High Speed to 150 mm/second
  • Positioning ranges to 200mm (optional 100 to 300 mm)
  • LinearEncoder provides 0.6 µm resolution
  • Holding force 6N
  • Self-Clamping Principle


Specifications & Drawings, Request Quote | PDF Datasheet
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PiezoWalk Linear Nanopositioning Drives / High Force Motors



PiezoWalk Linear Motors are based on the coordinated motion of several piezo elements. They provide a very responsive short travel mode (no stepping required) with sub-nanometer resolution and several long travel modes, optimized for maximum force, speed or constant velocity. PI makes two basic types of PiezoWalk motors: the smaller and faster 300-series and the higher-force 100-series. Both provide very high stability and sub-nanometer resolution.



N-310 PiezoWalk® Compact OEM Piezo Stepping Linear Motor


Nanopositioning Drive

  • Up to 125 mm Positioning Range
  • Compact Design
  • 0.03 nm Resolution
  • To 10 N Push/Pull Force
  • Low Operating Voltage
  • Self Locking, with no Heat Dissipation, Nanometer Stability
  • Non-Magnetic and Vacuum-Compatible Working Principle


Piezo Motor Actuator
Watch Video Animation


Specifications & Drawings, Request Quote | PDF Datasheet




N-381 PiezoWalk® Actuator, Piezo Stepper


Piezo Stepper
  • Travel Range 30 mm
  • Novel, Zero-Wear Piezo Stepping Drive, Ideal for Micro- and Nano-Manipulation
  • Optional Linear Encoder: Highest Accuracy, 20 nm Resolution
  • Very High Acceleration, e.g. for Cell Penetration
  • Two Operating Modes: Stepping and Dither Mode for 30 pm Resolution**
  • Up to 10 N Force Generation
  • Self Locking, no Heat Generation
  • Smooth Motion, no Closed-Loop Jitter
  • Vacuum-Compatible and Non-Magnetic Versions

Specifications & Drawings, Request Quote | PDF Datasheet




N-111 NEXLINE® High-Force PiezoWalk® Linear Motor Actuator


Piezo Nanopositioning Drive
  • Travel Range 10 mm
  • Resolution to 0.025 nm Open-Loop,5 nm Closed-Loop
  • Up To 50 N Force Generation and 70 N Holding Force
  • Self-Locking at Rest, No Heat Generation
  • Non-Magnetic and Vacuum-Compatible Working Principle
  • Cleanroom Compatible
Specifications & Drawings, Request Quote | PDF Datasheet
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Linear Motor Long Travel

N-216 NEXLINE® High Force PiezoWalk® Linear Motor Actuator


High Load Linear Motor
  • Travel Range 20 mm
  • Resolutionto 0.03 nm Open-Loop, 5 nm Closed-Loop
  • Up to 800 N Holding Force
  • Self-Locking at Rest
  • Non-Magnetic and Vacuum-Compatible Working Principle
  • Cleanroom Compatible


Piezo Motor Actuator
Watch Video Animation


Specifications & Drawings, Request Quote | PDF Datasheet




N-510K High Stiffness PiezoWalk Elevation Stage


  • Self Locking at Rest, No Heat Generation
  • Hybrid Drive: PiezoWalk® plus PICMA®
  • Travel Range: 400 µm Coarse + 40 µm Fine
  • 2 nm Closed-Loop Resolution
  • Direct Metrology: One Single Control Loop with Capacitive Sensors
  • High Push and Holding Force to 25 N
  • Piezo Walking Drive w/o Wear and Tear & Outstanding Lifetime due to PICMA® Piezo Actuators

Specifications & Drawings, Request Quote | PDF Datasheet
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Stick-Slip Motors (Inertia Drive)

 

Linear Motor Long Travel

N-470 / N-472 PiezoMike Miniature Micrometer, Piezo Motor-Driven with Position Sensor Option


Piezo-Motor Actuator
  • Very Compact Inertial Piezo Motor-Drive
  • Closed-Loop Version with Position Encoder Available
  • Vacuum Versions
  • Self-Clamping: Holding force >100 N
  • Pushing force 4 lbs
  • 30 nanometer step size
  • Positioning range to 13mm
  • Self-clamping, no heat generation at rest
  • Non-magnetic and vacuum-compatible operating principle

PiezoMike Actuators
Watch Video Animation




Specifications: N-472 Closed-Loop Version | Specifications: N-470 Basic Version
Specifications: Vacuum Version | PDF Datasheet


N-412 Miniature Piezo Motor Actuator with Piezo Inertia Linear Motor


Piezo-Motor  Actuator
  • Velocity > 5 mm/sec
  • Very Compact
  • Easy front mount
  • 300 nm resolution
  • 7 N Push/Pull Force
  • Self-locking, no heat generation at rest
Specifications & Drawings, Request Quote | PDF Datasheet


Linear Motor Long Travel

N-422 Stick-Slip Piezo Linear Motor


Piezo-Motor Linear Actuator
  • Compact Stick-Slip Drive
  • AutoLock at Rest, 10N Holding Force
  • 5 mm/Second Max. Speed
  • Low-Noise, Patented Design
Specifications & Drawings, Request Quote | PDF Datasheet
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Linear Motor Long Travel


Higher Resolution Stages


High Resolution Translation Stages

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Higher Speed Stages


High Speed Translation Stages


linear motor actuator
Translation Stages


Higher Speed Pushers


High Speed Pushers

Higher Resolution Pushers


Miniature Translation Stages

Product Technology Description | PDF Datasheet
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High Speed Piezo Motor Pushers PiezoWalk Motors (High Precision) Translation Stages (High Speed / Res) XY Motor Slide
Rotation Stages
Rod Drives High Res / High Force Translation Stages XY Slide
Piezo Motors Flexure Actuators Traditional Actuators Stepper Actuators
Motor Controllers Flexure Actuators Stack Actuators Stepper Actuators






Download These Catalogs and Brochures for More Information...

Linear Actuators Catalog Miniature Linear Stages Brochure Piezo Motors Catalog


Linear Actuators
    Catalog
Miniature Linear Stages Brochure Piezo Motors Catalog


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