Piezo Drivers & Piezo Motion Controllers, High-Voltage Amplifiers

High-Performance Digital Piezo Motion Controllers

• Flexibility of Digital Signal Processing and Control for the Cost of Analog
• Digital Motion Control Algorithms with 10 kHz Sampling Rate
• For Capacitive Sensors and Piezo Resistive Strain Gauge Sensors
• Linearity to 0.02%
• USB and RS-232 Interfaces
• Fast 25 Mbit/s Serial Interface
• Additional High-Bandwidth Analog Control Input / Sensor Input
• Analog Output, e.g. for External Amplifiers
• Low-Cost OEM-Versions Available
• Fast Digital Controller, Software-Configurable Servo Parameters
• Parameter Input Using Software

• Next Generation Digital Motion Controller for Nano Positionning Provides Higher Flexibility, Accuracy and Speed
• 100 kHz Sensor Sampling; 32-bit Floating Point DSP; 24-bit Low-Noise D/A Converters
• Ethernet (TCP/IP) Interface for Remote Control Capability, RS-232
• Auto-Loading of Calibration Data from Stage ID-Chip for Interchangeability of Controller and Mechanics
• Additional High-Bandwidth Analog Control Input / Sensor Input
• Digital I/O Lines for Task Triggering
• Extensive Software Support
• For Nanopositioning Systems with Capacitive Sensors

• For Closed-Loop Piezoelectric Nanopositioning Systems with Capacitive Sensors
• High-Speed PCI Interface
• Additional High-Bandwidth Analog Interface
• 32-Bit Digital Filters
• 24-Bit DAC Resolution
• 2 Linearization Systems
• Coordinate Transformation for Parallel Kinematics / Parallel Metrology Systems
• ID-Chip Support for Automatic Calibration
• Integrated Linear Amplifiers
• Extensive Software Package

• Precision Motion Control for Nano Positioning Systems with Capacitive Sensors
• 3-Channel Version
• Powerful Digital Controller: DSP 32-bit Floating Point, 225 MHz; 20 kHz Sampling Rate; 24-bit DAC
• Communication via Ethernet, USB, RS-232
• 4th Order Polynomial Linearization for Mechanics & Electronics
• Dynamic Digital Linearization (DDL) Option for Improved Path Accuracy
• Auto-Loading of Calibration Data from Stage ID-Chip for Interchangeability of Controller and Mechanics
• Additional High-Bandwidth Analog Control Input / Sensor Input
• Optional High-Speed Parallel I/O Interface
• Flexible Wave Generators
• Digital I/O Lines for Task Triggering
• Extensive Software Support

• Precision Motion Control for Piezo Nano Positioning Systems with Capacitive Feedback Sensors
• 3-, 4- & 6-Channel Versions
• 32-Bit Digital Filters
• Hardware and Firmware Linearization
• Coordinate Transformation for Parallel Kinematics / Parallel Metrology Systems
• Optional Dynamic Digital Linearization (Firmware Option) Improves Scanning Linearity
• ID Chip Support for Automatic Calibration
• Optional High-Speed Parallel I/O or DSP Interface
• Optional Analog Input
• Integrated Linear Amplifiers
• GCS (General Command Set) Compatible

• Digital Motion Controller of the Latest Generation: 600 MHz Processor; up to 50 kHz Sensor Update Rate;
• Highly Stable 20-bit D/A Converters
• Real-Time Operating System for Excellent Trajectory Control
• Modular Design for Greatest Flexibility in Meeting Custom Requirements
• Auto-Calibrating from Stage ID-Chip for Interchangeability of Controller and Mechanics w/o Recalibration
• Flexible Interfacing: USB, RS-232 & Ethernet
• Optional High-Bandwidth Analog Inputs and Outputs

Motion Controller for Fast Steering Mirrors

• Precision Motion Control for Piezo Nano Positioning Systems
• Bench-Top and OEM Versions
• Three Integrated Amplifiers Provide up to 10 W Peak Power
• Closed-Loop and Open-Loop Versions
• Internal Coordinate Transformation Simplifies Control
  of Parallel Kinematics Designs (Tripod & Differential Drive)
• Compact and Cost-Effective Design for OEMs or Bench-Top

3-Channel Nanocube Piezo Controller

• 3 x 14 W Peak Power
• Closed-Loop Precision Motion Control
• For P-611 NanoCube^® Nano Positioning XYZ Stages

• Specially Designed for P-611 NanoCube^®and F-206 HexAlign^™ 6D Alignment System
• Built-in Optical Metrology for Automatic Alignment
• Integrated Linear Amplifiers with 3 x 9 W Peak Power
• Closed-Loop Precision Motion Control

High-Power High-Voltage Amplifier, 500 to 2000 W

• High-Voltage Amplifier with 2000 W Peak Power
• Energy Recovery
• Output Voltage 0 to ±1000 V and bipolar
• Optional Position Servo-Motion Controller Module
• Optional Computer Interface and Display Module
• Differential Output

LI>Integrated Linear High-Voltage Amplifier w/ 550 W Peak Power
• Output Voltage -3 to -1100 V & Bipolar
• 1- and 2-Channel Versions
• Optional Position Servo-Motion Control Modules
• Optional RS-232 & IEEE 488 Interface Module & Display

Controllers for Bender Piezo Actuators

• Controller for Closed-Loop Multilayer Bimorph Actuators
• 1- and 2-Channel Versions
• Integrated Linear Amplifiers
• Bench-Top & OEM-Board Versions

• Specifically Designed to Drive Multilayer Bimorph Piezo Actuators
• Bench-Top and OEM Versions
• Integrated Linear Amplifier w/ up to 18 W Peak Power
• LCD Voltage Display
• Output Voltage ±30 V or 0 to 60 V and Separate Fixed Voltage

OEM Controller Modules

• Peak Power to 50 W
• OEM Module / Bench-Top for PICA™ Shear Actuators
• OEM Module for DuraAct™ Piezoelectric Patch Transducers

• Open-Loop and Closed-Loop Versions
• Most Cost-Efficient Digital Piezo Motion Controller
• Servo Tuning and Parameter Setting by Software
• Digital Algorithms Improve Linearity
• Analog Control Input for Target Values

• Open-Loop and Closed-Loop Versions
• For Capacitive, Strain Gauge and LVDT Sensors
• Integrated Linear Amplifier w/ 14 W Peak Power
• Runs on Single Stabilized Voltage (12 to 30 VDC

• 24-Bit USB Interface and High-Speed Analog Interface
• Notch Filters for Higher Bandwidth
• Networking for up to 12 Motion Controllers
• Choice of Sensor Strain Gauge (lower cost) or Capacitive Sensor (higher precision)
• Table for User-Defined Curves

• Cost Effective Piezo Driver
• Small Size
• Low Noise, High Stability
• Easy-to-Use
• Full Overcurrent, Short-Circuit and Temperature Protection
• Power-up/down Without Voltage Spikes

• Single Channel High Voltage Piezo Driver
• 12 V Battery or P/S Operation
• Output Voltage Range +10 to +1000 V

• Single-Channel Low Voltage Piezo Driver
• 12 V Battery or P/S Operation
• Output Voltage Range 5 to 100 V

Modular Piezo Controllers

• Modular Piezo Controller System with many Options
• For High Power Amps to 280 Watts
• Up to 6 Channels
• Choice of Linear Amplifier Modules, Low & High Voltage
• Optional Servo-Motion Controller for Cap Sensors, Strain Sensors and Piezo Resistive Sensors
• Optional USB Interface, TCP/IP, RS-232
• Optional Display Module

Modules for E-500 Modular Piezo Motion Controller System

• Position Servo-Control for Piezo-Driven Nano Positioning Systems
• Improves Linearity
• Eliminates Drift & Hysteresis
• For Capacitive Sensors, Strain Gauge Sensors & LVDT Sensors
• Increases Piezo Stiffness
• Notch Filter for Improved Dynamics

• Low-Noise 24-bit D/A Converter
• Sample Rate 25 kHz
• TCP/IP, USB, IEEE 488 and RS-232 Interfaces
• 6-Digit Display for Voltage and Position
• 1- & 3-Channel Versions
• Wave Generator with Programmable Trigger-I/O
• Module for E-500 Piezo Controller Rack

• Integrated Linear Piezo Amplifiers, 3 x 14 W Peak Power
• Output Voltage Range -20 to +120 V
• E-503.00S with 2 amplifier channels and one fixed voltage of +100V

• 200 W Peak Power
• Output Voltage Range -20 to 120 V
• Module for E-500 Piezo Controller Rack
• Prepared for Position Servo-Motion Control Upgrade (optional)
• Prepared for Interfaces / Display Modules (optional)

• Peak Power 280 W
• High Average Output Power 100 W
• Very Energy Efficient Through Energy Recovery
• Output Voltage Range -30 to 130 V
• Module for E-500 Piezo Controller Rack
• Prepared for Position Servo-Control Upgrade (optional)
• Prepared for Interface / Display Modules (optional)

• Highly Linear Amplifier Module
• 280 W Peak Power
• Output Voltage Range -30 to 130 V
• Module for E-500 Piezo Controller Rack
• Prepared for Position Servo-Motion Control Upgrade (optional)
• Prepared for Interfaces / Display Modules (optional)

• Integrated Linear Amplifier, up to 400 W Peak Power
• Output Voltage Range +3 to +1100 V & Bipolar
• ±250 V for Shear Actuators

• Extremely Low Noise: Resolution to 25 Picometers
• For P-363 PicoCube^® Systems
• Peak Power 3 x 100 W
• Ultra-Low Noise
• Output Voltage ±250 V

Single Channel Piezo Drivers / Controllers / Cards

• Flexibility of Digital Signal Processing for the Cost of Analog
• Digital Closed-Loop Precision Motion Control Algorithms with 10 kHz Sampling Rate
• For Nano Positioning Systems with Capacitive Sensors and Piezo Resistive Strain Gauge Sensors
• Linearity to 0.02%
• USB and RS-232 Interfaces
• Fast 25 Mbit/s Serial Interface
• Additional High-Bandwidth Analog Control Input / Sensor Input
• Analog Output, e.g. for External Amplifiers
• Low-Cost OEM-Versions Available
• Fast Digital Controller, Software-Configurable Servo Parameters
• Parameter Input Using Software

• Closed-Loop Precision Motion Controller for Nano Positioning Systems
• 24-Bit USB Interface and High-Speed Analog Interface
• Notch Filters for Higher Bandwidth
• Networking for up to 12 Controllers
• Choice of Sensor Strain Gauge (lower cost) or Capacitive Sensor (higher precision)
• Table for User-Defined Curves

• Closed-Loop Precision Motion Controller for Nano Positioning Systems
• Open-Loop Version Available (lower Cost)
• For Piezo Nano Positioners with Capacitive & Strain Gauge Sensors
• Integrated Linear Amplifier, 14 W Peak Power
• Runs on Single Stabilized Voltage (12 to 30 VDC)

• Closed-Loop Precision Motion Controller for Nano Positioning Systems
• Integrated 24-Bit High-Speed USB & RS-232 Interfaces
• Network Capability with up to 12 Channels
• Integrated Linear Piezo Driver with 36 W Peak Power
• For Piezo Sytems with SGS and Capacitive Sensor Feedback
• Table for User-Defined Curves
• GCS (General Command Set) Compatible
• UL and CSA certified

• Closed-Loop Precision Motion Controller for Nano Positioning Systems
• Integrated 24-Bit High-Speed USB & RS-232 Interfaces
• Integrated Linear Piezo Driver, 14 W Peak Power
• Network Capability with up to 4 Channels
• For Piezo Systems with Capacitive and Strain Gauge Position Feedback Sensors
• Wave Table for User-Defined Curves
• GCS (General Command Set) Compatible

E-753 High-Speed Digital Piezo NanoAutomation^® Controller

• Next Generation Digital Piezo Motion Controller Provides Higher Flexibility, Accuracy and Speed
• 100 kHz Sensor Sampling; 32-bit Floating Point DSP; 24-bit Low-Noise D/A Converters
• Ethernet (TCP/IP) Interface for Remote Control Capability, RS-232
• Automatic Calibration Data Coaching from Stage ID-Chip
• Additional High-Bandwidth Analog Control Input / Sensor Input
• Digital I/O Lines for Triggering Tasks
• Extensive Software Support
• For Nanopositioning Systems with Capacitive Sensors

E-861 High-Speed Digital Piezo PiezoWalk® NEXACT® Motion Controller/Driver

• For NEXACT® Piezo Motor Drives and Nano Positioning Systems
• Complete System with Controller, Integrated Power Amplifiers and Software
• Open-Loop Operation, or Closed-Loop with Linear Encoder
• High Performance at Low Cost
• Daisy-Chain Networking for Multi-Axis Operation
• Non-Volatile Macro Storage for Stand-Alone Functionality with Autostart Macro
• I/O for Automation, Joystick for Manual Operation
• Parameter Changes On-the-Fly

E-862 Low-Cost NEXACT® Drive Electronics

• For NEXACT® Piezo Motor Drives & Nano Positioning Stages
• Combined Step Generator and Power Amplifier
• Cost-Effective Design
• Interface for Automation, Joystick for Manual Operation

C-867 Controller for PILine® Piezo Linear Drives

• Optimized for PILine® Ultrasonic Piezo Linear Motors
• High-Bandwidth Encoder Inputs Allow High Speed and Resolution
• PID Servo-Control with Dynamic Parameter Switching
• Integrated Piezo Motor Power Driver
• USB, RS-232 and Analog Interfaces (e.g. for Joystick)
• 4 + 4 Programmable TTL-I/Os for Flexible Automation
• Data Recorder
• Daisy-Chain Networking for up to 16 Axes
• Powerful Macro Programming Language, e.g. for Stand-Alone Operation
• Extensive Software Support, LabVIEW, DLL ...

C-184 · C-185 PILine® Drive Electronics OEM Boards and Stand-Alone Units for Ultrasonic Piezomotors

• For PILine® Ultrasonic OEM Piezo Motors and Positioners
• Accepts Analog Drive Signal from Standard Controller
• Available as Cost-Effective OEM board and Plug-and-Play Desktop Unit

• For PILine^® Ultrasonic OEM Motors and Stages
• Pulsed or Analog Drive
• OEM Board or Interface Box
• Ideal also with Third Party Controllers

Open-Loop Piezo Drivers

• 3 Independent Output Channels
• Integrated Linear Amplifiers, 3 x 14 W Peak Power
• 3 LED Voltage Displays
• Output Voltage Range - 20 to 120V

• 3 Independent Channels
• Integrated Linear Amplifiers, 3 x 25 W Peak Power
• 3 LED Voltage Displays
• Output Voltage Range 0 to + 1000 V

Accessories

• Included in E-500 Chassis
• Provides Power for all E-500-Installable Modules
• 90-264 VAC Operating Range