Piezo Actuators

PICMA^® High Performance Actuators

• Award-Winning Ceramic-Encapsulation PZT Technology
• Low Operating Voltage
• Superior Lifetime Even Under Extreme Conditions
• Very Large Operating-Temperature Range
• High Humidity Resistance
• Excellent Temperature Stability
• High Stiffness
• UHV Compatible to 10^-9 hPa
• Sub-Millisecond Response & Sub-Nanometer Resolution

• Award-Winning Ceramic-Encapsulation PZT Technology
• Ceramic Encapsulation for Extended Lifetime
• Ultra-Compact, from 2 x 2 x 2 mm
• High Curie Temperature
• Ideal for Dynamic Operation
• Sub-Millisecond Response / Sub-Nanometer Resolution
• UHV Compatible to 10^-9 hPa
• Superior Lifetime

• Actuator, Sensor or Energy Source
• Highly Formable Ceramics
• Can be Applied to Curved Surfaces
• Customized Solutions on Request
• Cost-Effective

• Ceramic Encapsulation
• Positioning Range up to 2 mm
• Fast Response (<10 Millisecond)
• Nanometer-Range Resolution
• Low Operating Voltage
• Vacuum-Compatible Versions
• Available with Integrated Position Sensor
• Special OEM and Bench-Top Amplifiers/Drivers Available

• Closed - Loop Operation for Superior Accuracy
• Nanometer-Range Resolution
• Deflection up to 1.6 mm
• Ceramic Insulation for Extended Lifetime
• Ideal for Scanning Applications
• Vacuum-Compatible Versions
• Low Operating Voltage
• Mounting Hardware Included
• Special Controllers / Drivers Available

• High Load Capacity to 100 kN
• High Force Generation to 80 kN
• Large Cross Sections to 56 mm Diameter
• Variety of Shapes
• Extreme Reliability >109 Cycles
• Proven and Flexible Design
• Sub-Nanometer-Resolution / Sub-Millisecond-Settling-Time
• Vacuum-Compatible Versions

• Operating Temperature to 150°C
• Temperature Sensor PT1000 Applied
• High Load Capacity to 80 kN
• Large Cross-Sections to 56 mm Diameter
• Extrem Reliability >10⁹Cycles
• Sub-Nanometer Resolution / Sub-Millisecond Settling Time
• Ultra-High-Vacuum-Compatible Versions to 10^-9 hPa
• Non-Magnetic Versions

• Clear Aperture for Transmitted-Light Applications
• Large Cross-Sections Available to 56 mm Diameter
• Variety of Shapes and Options
• Extreme Reliability >10⁹Cycles
• Proven and Flexible Design
• Sub-Nanometer Resolution / Sub-Millisecond Settling-Time
• Vacuum Compatible and Nonmagnetic Versions

• Standard & Custom Sizes
• For OEM Applications
• XYZ-Positioning
• Sub-Nanometer Resolution
• Large Diameters to 80 mm
• Wall Thickness as Small as 0.3 mm

Piezo Shear Actuators, Multi-Axis Actuators

• Compact Multiaxis Actuators
• X, XY, XZ and XYZ Versions
• High Resonant Frequencies
• Extreme Reliability >10⁹ Cycles
• Picometer-Resolution / Sub-Millisecond Settling Time
• Optional Ultra-High-Vacuum-Compatible Versions to 10^-9 hPa
• Non-Magnetic and Clear Aperture Versions

Piezo Actuators with Casing, Closed-Loop Actuators

• Displacement 20 µm
• Mounts Inside Micrometer Tip
• Sub-msec Response
• Sub-nm Resolution

• Displacement to 45 Micron
• Pushing Forces to 50 N
• Pulling Forces to 10 N
• Sub-Millisecond Response
• Sub-Nanometer Resolution
• Options: Ball Tip

• Travel Range to 60 Micron
• Pushing Forces to 1000 N
• Pulling Forces to 5 N
• Sub-ms Response
• Sub-Nanometer Resolution

• Displacement to 90 Micron
• Pushing Forces to 1000 N
• Preloaded for Pulling Forces to 50 N
• Sub-Millisecond Response
• Sub-Nanometer Resolution
• Options: Ball Tip, Vacuum Versions

• Travel Range to 90 Micron
• Pushing Forces to 3000 N
• Preloaded for Pulling Forces to 700 N
• Sub-ms Response
• Sub-Nanometer Resolution
• Options: Vacuum Versions, Water-Resistant Case

• Travel Range to 180 Micron
• Pushing Forces to 4500 N
• Pulling Forces to 500 N
• Sub-ms Response
• Sub-Nanometer Resolution
• Options : Vacuum, High- and Low-Temperature

P-225 · P-235 Preloaded Open- and Closed-Loop High-Load
Piezo Actuators (HVPZT)

• Extremely High Stiffness
• Pushing Forces to 30,000 N
• Pulling Forces to 3500 N
• Travel Range to 180 Micron
• Options: Versions for Vacuum, High- and Low-Temperatures
  and with Water-Resistant Case