Nanopositioners - Piezo Flexure Nanopositioning Stages


 

PI offers the broadest and deepest portfolio of precision motion technologoies, from piezo-driven nanopositioning and scanning stages to motorized 6-axis hexapod positioning systems.

A nanopositioning stage is defined as a positioning device capable of nanometer or sub-nanometer resolution.

There are several types of nanopositioners; devices featuring the highest dynamics and precision are piezo-driven, flexure guided and equipped with direct metrology position feedback, such as capacitive sensors.
Watch video on how piezo flexure-guided nanpositioners work.

Advantages of typical PI piezo stage positioning systems are: very high reliability (100 billion cycle tested PICMA® piezo drives) frictionless flexure designs, parallel kinematics (better multiaxis trajectory control), parallel metrology (keeps motion of all controlled axes inside the servo loop), capacitive feedback (direct measuring, non contact), digital control (wider dynamic range, better linearity, autocalibration…).

PI flexure-guided friction-free positioners, provide excellent responsiveness with step & settle typically in the millisecond range, minimal tilt and out-of-plane motion, zero-wear components.

Applications such as image scanning, overlay, fast autofocus, interferometry and super-resolution microscopy, greatly benefit from these characteristics. Conventional motorized positioners have to many limitations, such as friction, slow-response and position stability.

In addition to classical flexure-guided positioners, PI also provides long travel hybrid nanopositioners (combination of motor drives and piezo drives), several types of piezo-motor-driven stages with long travel ranges and miniature positioners with piezo stepper motors.

Together with our new PI miCos line of motorized precision positioners PI can provide the appropriate technology for any application.

Single Axis Systems Z-Stages/Actuators Multiaxis + Aperture Multiaxis, no Aperture Objective Scanners




Microscope Stages Motors & Long Travel Stages Tip/Tilt Mirrors Motor Stages Piezo Controllers






Single Axis Piezo Stage Nanopositioning Systems





PIHera™ Family of Piezo Flexure Nanopositioning Systems,
Closed-Loop, Direct Metrology: P-620.1 - P-629.1

 
PIHera Miniature Long-Range Piezo Nanopositioning Stages with Direct Metrology
  • XY-Travel to 1800 µm
  • Compact Design
  • Resolution <1 Nanometer
  • Frictionless Precision Flexure Guiding System
  • PICMA® High-Performance Piezo Drives
  • Direct Metrology with Capacitive Sensors for Highest Precision
  • Up to 0.02% Position Accuracy
  • X, XY, Z, XYZ Versions
  • Vacuum-Compatible Versions
Specifications & Drawings, Request Quote | PDF Datasheet




P-546 PInano® Single Axis: (X / Y) and XY Piezo Nanopositioning Stage

 
PInano X and Y and  XY Piezo Scanner
  • X, Y and XY Configurations
  • Choice of Cost-effective Piezoresistive Sensors and High Stability Capacitive Sensors
  • 200µm Tavel / Axis
  • Low Profile for Easy Integration: only 17 mm
  • Clear Aperture for 3×1" Object Slides, Recessed Sample Holders
  • Outstanding Lifetime due to PICMA® Piezo Actuators
  • Sub-nanometer Resolution, Millisecond Response Times
PDF Datasheet | For PInano® XYZ Microscope Stages Click Here




P-611.1 · P-611.2 Low Cost X and XY Piezoelectric Nanopositioning Systems

 
Compact X and XY Piezoelectric Nanopositioning Systems
  • Small Footprint: 44 x 44 mm
  • 100 Micron Travel
  • Range Resolution to 0.2 Nanometer
  • For Cost-Sensitive Applications
  • PICMA® High-Performance Multilayer Piezo Actuators
  • Z-Stage also Available
Specifications & Drawings, Request Quote | PDF Datasheet




P-712 Low-Profile OEM Piezo Stage / Scanner

 
Compact OEM PZT Nanopositioning Stage
  • High Dynamics, 5 ms Settling Time
  • 30 µm Travel Range
  • Resolution to 0.2 nm
  • Compact Design, Low Profile, 40 x 40 x 6 mm
  • Clear Aperture, 25 x 15 mm
  • PICMA® Long Life Piezo Drives
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Specifications & Drawings, Request Quote | PDF Datasheet




P-772 Ultra-Compact Piezo Stage NanoAutomation® System with Direct Metrology

 
Ultra-Compact Open-Loop PZT Nanopositioning Stage
  • Smallest Flexure-Guided Stage with Capacitive Feedback
  • Ideal for Head/Media Test & Fiber Optics
  • Resolution <0.1 nm
  • Ultra-Fast Response (1.7 kHz Resonant Frequency)
  • ID-Chip for Auto Calibrate Function
  • Frictionless Precision Flexure Guiding System
  • PICMA® High-Performance Multilayer Piezo Drives
| PDF Datasheet




P-752 Piezo NanoAutomation® Stages with Direct Metrology

 
PZT Nanopositioning Stage
  • Ultra-Fast Response
  • Ultra-Precise Trajectory Control
  • Digital Controllers with Fast FiberLink Interface Available
  • ID-Chip for AutoCalibrate Function
  • Direct-Metrology Capacitive Sensors for Highest Precision
  • 0.1 nm Resolution
  • PICMA® High-Performance Multilayer Piezo Drives
Specifications & Drawings, Request Quote | PDF Datasheet




P-750 High-Load Piezo-Driven Nanopositioning Stages with Direct Metrology

 
High-Load Piezo-Driven Stage
  • 10 kg Load Capacity
  • 1 Nanometer Lateral Guiding Precision
  • Resolution <1 Nanometer
  • PICMA® High-Performance Multilayer Piezo Drives
  • Fast Response
  • 75 Micron Travel Range
  • Direct Metrology with Capacitive Sensors for Highest Precision
  • Frictionless Precision Flexure Guiding System
Specifications & Drawings, Request Quote | PDF Datasheet




P-753 LISA Piezo Stages / Actuators for X and Z-Motion with Direct Metrology for NanoAutomation®

 
Ultra-Compact PZT Nanopositioning Actuator
  • Unique Design: Both Piezo-Stage and Piezo Actuator
  • Frictionless Precision Flexure Guiding System
  • 0.05 nm Resolution
  • Direct Metrology with Capacitive Sensors for Highest Precision
  • Ultra-Fast Response, Very Compact
  • PICMA® High-Performance Multilayer Piezo Drives
  • ID-Chip for Auto Calibrate Function
  • Vacuum Versions Available
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Specifications & Drawings, Request Quote | PDF Datasheet




New: Additional Mini Piezo NanoPositioners , Travel to 2 Inches




P-601 Motion-Amplified Piezo Flexure Z-Actuator

 
High-Precision Amplified Z-Actuator, Flexure Guiding
  • Flexure Guidance for Frictionless, Ultra-Straight Motion
  • Travel Ranges to 480 Micron
  • Resolution to 0.2 Nanometer
  • High Dynamics and Stiffness
  • PICMA® High-Performance Piezo Actuators
  • Open and Closed-Loop Versions
  • Ideal for OEM Applications
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Specifications & Drawings, Request Quote | PDF Datasheet




For Additional Low Cost Piezo Flexure Actuators Click Here





PIHera™ Family of Piezo-Z Nanopositioning Stages,
Closed-Loop, Direct Metrology, P-620.Z · P-621.Z · P-622.Z

Vertical Piezo Nanopositioning Stage, Direct Metrology
  • Z-Axis Travel to 400 Micron
  • Low Profile
  • Resolution <1 Nanometer
  • Frictionless Precision Flexure Guiding System
  • PICMA® High-Performance Multilayer Piezo Drives
  • Direct Metrology with Capacitive Sensors for Highest Precision
  • 0.02% Position Accuracy
  • X, XY, Z, XYZ Versions
  • Vacuum-Compatible Versions
Specifications & Drawings, Request Quote | PDF Datasheet





Z and Tip-Tilt (Pitch-Roll) Stages, with Aperture






P-736 PInano® Z, Low Profile, Low Cost, High-Speed Piezo-Z Slide Scanner

 
Low Profile, Low Cost, High-Speed Piezo-Z Scanner
  • Extremely Fast Step & Settle, From 5 msec
  • Low Profile for Easy Integration: 20 mm (0.8")
  • 100 and 200 µm Travel Ranges
  • Longest Lifetime with Proprietary PICMA® Piezo Technology
  • Cost Effective due to Low-Cost Piezoresistive Sensors
  • Compatible w/ Leading Image Acquisition Software Packages
  • Closed-Loop Control for High Repeatability and Accuracy
  • 24 Bit USB Controller & Software Included
Specifications & Drawings, Request Quote | PDF Datasheet | Large Aperture Version for Well Plates




P-737 PIFOC® Z-Axis Microscopy Piezo Stage for High-Resolution Sample Positioning and Scanning

 
P-737 Z-Axis Microscope Stage for Well-Plate Positioning and Scanning
  • High-Speed Piezo Z-Motion with Travel Ranges to 250 µm
  • Nanometer Resolution
  • Large Clear Aperture to Accommodate Specimen Holders
  • Perfect Mechanical Fit to XY OEM Manual or Motorized Stages
  • Sub-Millisecond Response Times
Specifications & Drawings, Request Quote | PDF Datasheet




P-612 Compact Piezo-Z Elevation Stage with Aperture

 
Piezo Elevation Stage with Aperture
  • Small Footprint: 60 x 60 mm
  • For Cost-Sensitive Applications
  • 100 Micron Travel
  • Range Resolution to 0.2 Nanometer
  • Clear Aperture : 20 x 20 mm
  • PICMA® High-Performance Multilayer Piezo Actuators
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Specifications & Drawings, Request Quote | PDF Datasheet




P-541.ZCD Low-Profile Z-Tip-Tilt (Pitch/Roll) Piezo Flexure Stage with Parallel Metrology

 
Z/Tip/Tilt Piezo Nanopositioning Stages for Microscopy, Parallel Metrology
  • Lower Profile for Easy Integration: 16.5 mm
  • Z and Tip/Tilt Versions
  • Choice of Strain Gauge (Lower Cost) or Capacitive Sensors (Higher Performance)
  • 100 Micron Linear Travel Range, 1 milliradian Tilt
  • 80 x 80 mm Clear Aperture
  • PICMA® High-Performance Multilayer Piezo Actuators for Superior Lifetime
  • Ideal for fast Z-Stack Acquisition and 3D Deconvolution Imaging
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Specifications & Drawings, Request Quote | PDF Datasheet




P-528 Piezo Z/Tip/Tilt ((Pitch/Roll) Flexure Nanopositioning / Scanning Stage with Parallel Metrology

 
Piezo Z/Tip/Tilt  Flexure Stages Parallel Metrology
  • Precision Trajectory Control
  • Parallel-Kinematics/Metrology for Enhanced Responsiveness / Multi-Axis Precision
  • Travel Ranges to 200 Micron / 4 milliradian
  • Clear Aperture 66 x 66 mm
  • Direct Metrology with Capacitive Sensors for Highest Precision
  • PICMA® High-Performance Multilayer Piezo Drives
Specifications & Drawings, Request Quote | PDF Datasheet




PIFOC® Objective Scanners / Nanofocus Devices







P-721 PIFOC® High-Speed Nanofocusing/Scanning Drive

 
PIFOC High-Speed Nanofocusing / Scanning Z-Drives, Direct Metrology
  • Scans and Positions Objectives with Sub-Nanometer Resolution
  • High Linearity and Stability with Direct-Measuring Sensors
  • Travel to 100 Micron, fast Settling Time
  • Very Straight Motion for Enhanced Focus Stability
  • Ask about DIC Prism Holder Option
  • Compatible with MetamorphTM Imaging Software
  • Quick Lock Adapter for Easy Attachment


Piezo Motor Actuator
Watch Video Animation


 
 
Specifications & Drawings, Request Quote | PDF Datasheet




P-725 PIFOC® Nanofocusing Z-Drives, up to 460 µm, Direct Metrology

 
Long-Range, High-Speed Nanofocusing Z-Drives with Direct Metrology
  • Scans and Positions Objectives with Sub-Nanometer Resolution
  • High Linearity and Stability with Direct-Measuring Capacitive Sensors
  • Travel to 460 Micron, Fast Response & Settling Time
  • Frictionless Precision Flexure Guiding System
  • Enhanced Guiding Precision for Better Focus Stability
  • Ask about DIC Prism Holder Option
  • Controller Compatible with MetamorphTM Imaging Software
  • Quick Lock Adapter for Easy Attachment
Specifications & Drawings, Request Quote | PDF Datasheet




N-725 PIFOC® Objective Scanner with 2 mm Travel, for Two Photon Microscopy

 
Long Range Nanofocusing/Scanning Z-Drives with Direct Metrology
  • High Force & High-Dynamics for Positioning and Scanning of Large Objectives up to 29 mm Ř
  • 2 mm Travel for Applications with Large Penetration Depth
  • Ideal for e. g. Two-Photon Microscopy
  • Very Fast Response: 20 ms Step and Settle Time
  • Self-Locking at Rest, no Heat Generation, no Servojitter
  • Drive Resolution < 1 nm, 20 nm Encoder Resolution
  • Two Motion Modes: Continuous Nanostepping and High-Dynamics Analog Mode
  • Compact Design: Ř 48 mm, 40.5 mm Height
  • Frictionless, High-Precision Flexure Guiding System for Better Focus Stability
  • QuickLock Thread Adapter for Simple Installation
Specifications & Drawings, Request Quote | PDF Datasheet




P-726 High-Load, High Stiffness PIFOC® Nanofocusing Z-Drives for Heavy Objectives

 
High-Power Nanofocusing/Scanning Z-Drives with Direct Metrology
  • For heavy, high NA objectives
  • Resonant frequency: 430 Hz (with 300 g), 1100 Hz without objective
  • Closed-loop position noise: <0.4 nm
  • Position stability over 100 s: 4 nm
  • Maximum operating frequency (amplitude <10 µm): 150 Hz*
  • Maximum operating frequency with full travel (100 µm): 60 Hz*
  • Settling time (10 µm steps): 6 ms**
  • Settling time (full travel): 15 ms**
Back to Top Specifications & Drawings, Request Quote | PDF Datasheet




P-720 PIFOC® Nanofocusing Drive for Small Objectives

 
PIFOC Compact Microscope Objective Drive
  • Scans and Positions Objectives with Sub-Nanometer Resolution
  • Low Inertia for Fast Settling
  • Frictionless Precision Flexure Guiding System
  • Travel to 100 Micron
  • Straightness of Travel ≤13 microradian
  • PICMA® High-Performance Multilayer Piezo Drives
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Specifications & Drawings, Request Quote | PDF Datasheet




P-737 PIFOC® Piezo Z-Scanner Microscope Stage for High-Resolution Sample Positioning

 
P-737 PIFOC® Z-Axis Microscopy Piezo Stage for High-Resolution Sample Positioning and Scanning
  • High-Speed Piezo Z-Motion with Travel Ranges to 250 µm
  • Nanometer Resolution
  • Large Clear Aperture to Accommodate Specimen Holders
  • Perfect Mechanical Fit to XY OEM Manual or Motorized Stages
  • Sub-Millisecond Response Times
Specifications & Drawings, Request Quote | PDF Datasheet





Multi-Axis Stages without Aperture







P-611.ZS · P-611.XZS Compact Z and XZ Piezoelectric Nanopositioning Stages

 
Compact Z and XZ Piezoelectric Nanopositioning Systems
  • Small Footprint: 44 x 44 mm
  • 100 Micron Travel
  • Range Resolution to 0.2 Nanometer
  • For Cost-Sensitive Applications
  • PICMA® High-Performance Multilayer Piezo Actuators
  • Open- and Closed-Loop Models
Specifications & Drawings, Request Quote | PDF Datasheet




PIHera™ Family of Long Travel XY Piezo Nanopositioning Stages,
Direct Metrology, P-620.2 - P-629.2

 
PIHera Long-Range XY Piezo Nanopositioning Stages with Direct Metrology
  • XY-Travel to 1800 µm
  • Compact Design
  • Resolution <1 Nanometer
  • Frictionless Precision Flexure Guiding System
  • PICMA® High-Performance Multilayer Piezo Drives
  • Direct Metrology with Capacitive Sensors for Highest Precision
  • Up to 0.02% Position Accuracy
  • X, XY, Z, XYZ Versions
  • Vacuum-Compatible Versions
Specifications & Drawings, Request Quote | PDF Datasheet




P-363 PicoCube™ High-Speed, XY(Z) Piezo Stages for Nanotechnology, SPM, AFM

 
PicoCube High-Speed, XY(Z) Piezo Stages for Nanotechnology, SPM, AFM
  • Ultra-High-Performance Closed-Loop Scanner for AFM/SPM
  • Compact Manipulation Tool for Nanotechnology
  • Resonant Frequency 9.8 kHz
  • Ultra-High-Precision Capacitive Feedback
  • Parallel-Motion Metrology for Highest Linearity and Stability
  • 50 Picometers Resolution
  • 5 x 5 x 5 Micron Travel Range
  • Very Small Package
  • Rugged Design
Specifications & Drawings, Request Quote | PDF Datasheet




P-611.3S · P-611.3O NanoCube® XYZ Nanopositioning Piezo System

 
NanoCube XYZ Piezo Nanopositioning Systems
  • 100 x 100 x 100 Micron Travel Range
  • Very Compact: 44 x 44 x 44 mm
  • 1 Nanometer Resolution
  • Ideal for Fiber-Alignment and Photonics Packaging Applications
  • Optional E-760 Controller Card Features Built-In Optical Metrology
  • Closed- and Open-Loop Versions
  • Flexure-Guided Precision Trajectory Control
  • Fast Scanning and Settling
  • Large Variety of Controllers
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Specifications & Drawings, Request Quote | PDF Datasheet




P-587 Six-Axis, Long-Travel Nanopositioning / ScanningPiezo-Stage with Parallel Metrology

 
Six-Axis, Long-Travel Piezo Nanopositioning / Scanning Stage with Parallel Metrology
  • For Scanning and Positioning in all Six Degrees of Freedom
  • 800 x 800 x 200 Micron Linear Range
  • Up to 10 mad Rotational Range
  • Precision Trajectory Control
  • Parallel - Kinematics / Metrology for Enhanced Responsiveness / Multi-Axis Precision
  • Direct Metrology with Capacitive Sensors for Highest Precision
  • ID-Chip for Auto Calibration Function
  • PICMA® High - Performance Multilayer Piezo Drives

    SpaceFAB Video
    6-D Nanopositioning Stage Video


 
Specifications & Drawings, Request Quote | PDF Datasheet





Multi-Axis Piezo-Stages with Aperture







P-713 Low-Profile OEM XY Piezo-Scanners for Imaging Stabilization and Resolution Enhancement

 
Low-Profile OEM XY Piezo-Scanners for Imaging Applications
  • Ideal for Interlacing, CCD Resolution Enhancement
  • Compact Size of only 45 x 45 x 6 mm
  • Clear Aperture
  • Low Cost - Efficient Design
  • 15 x 15 Micron Travel Range
  • Parallel - Kinematics Design for Higher Dynamics


SpaceFAB Video
Watch Piezo in Image Stabilization Video


Specifications & Drawings, Request Quote | PDF Datasheet




P-612.2 Compact XY Piezo-Nanopositioner with Aperture

 
Compact XY Piezo-Nanopositioner with Aperture
  • Small Footprint : 60 x 60 mm
  • 100 x 100 Micron Travel Range
  • Resolution to 0.8 Nanometer
  • For Cost-Sensitive Applications
  • Clear Aperture: 20 x 20 mm
  • PICMA ® High-Performance Multilayer Piezo Actuators
  • Z-Stage also Available
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Specifications & Drawings, Request Quote | PDF Datasheet




P-542.2CD Low-Profile, Scanning Microscopy XY Piezo Stages with Parallel Metrology

 
XY Piezo Scanning Microscope Stage with Parallel Metrology
  • Low Profile for Easy Integration: 16.5 mm
  • Parallel Kinematics and Optional Parallel Metrology for Fast Response and Superior Multi-Axis Precision, Decoupling of X-Y-Z Motion
  • Choice of Strain Gauge (Lower Cost) or Capacitive Sensors (Higher Performance)
  • To 200 x 200 Micron Travel Range
  • Direct Drive Version for High-Speed Positioning & Scanning
  • 80 x 80 mm Clear Aperture
  • PICMA® High-Performance Multilayer Piezo Actuators for Superior Lifetime
Specifications & Drawings, Request Quote | PDF Datasheet




P-733 Ultra-High-Speed, XY / XYZ Scanning Microscopy Stages with Parallel Metrology

 
Ultra-High-Speed, XY / XYZ Scanning Microscopy Stages with Parallel Metrology

Vacuum compatible stage
  • Higher Speed Through Direct Drive
  • Up to 2.2 kHz Resonant Frequency in X and Y
  • 30 x 30 or 30 x 30 x 10 Micron Travel Range
  • 100 Picometers Resolution
  • Capacitive Sensors for Highest Linearity
  • Parallel - Kinematics / Metrology for Enhanced Responsiveness / Multi-Axis Precision, Decoupling of X-Y-Z Motion
  • Active Runout Compensation
  • 50 x 50 mm Clear Aperture
  • Frictionless Precision Flexure Guiding System
  • PICMA® High-Performance Multilayer Piezo Drives
  • Vacuum Compatible Option
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Specifications & Drawings, Request Quote | PDF Datasheet




P-733 XY Piezo Nanopositioning / Scanning Stages With Parallel Metrology

 
XY Piezo Nanopositioning / Scanning Stages with Parallel Metrology
  • 100 x 100 Micron Travel Range
  • For XY Scanning & Positioning
  • Parallel-Kinematics/Metrology for Enhanced Responsiveness / Multi-Axis Precision, Decoupling of X-Y-Z Motion
  • Precision Flexure-Guiding System
  • Integrated Capacitive Sensors for Resolution <0.3 Nanometer
  • 50 x 50 mm Clear Aperture
  • Ultra-High Vacuum Version Available
  • Ultra-Fast XY and XYZ Versions Available
  • PICMA® High-Performance Multilayer Piezo Drives
Specifications & Drawings, Request Quote | PDF Datasheet




P-734 Ultra-Precision Trajectory, XY Nanopositioning Stages with Parallel Metrology

 
Ultra-Precision Trajectory, XY Nanopositioning Stages with Parallel Metrology
  • Ultra-Precision Trajectory Control, Ideal for Surface Analysis and Scanning Microscopy
  • Low Bow: Flatness in the Low Nanometer Range
  • Parallel-Kinematics/Metrology for Enhanced Responsiveness, Decoupling of X-Y-Z Motion
  • 100 x 100 Micron Travel Range
  • Direct-Metrology Capacitive Sensors for Higher Precision
  • 56 x 56 mm Clear Aperture
  • PICMA®High-Performance Multilayer Piezo Drives
Specifications & Drawings, Request Quote | PDF Datasheet




P-517 · P-527 Multi-Axis, Piezo Nanopositioning / Scanning Stages with Parallel Metrology

 
Multi-Axis, Piezo Nanopositioning / Scanning Stages with Parallel Metrology
  • XYΘ, XYZ and XY Versions
  • Precision Trajectory Control
  • Parallel-Kinematics/Metrology for Enhanced Responsiveness / Multi-Axis Precision
  • Travel Ranges to 200 Micron
  • Clear Aperture to 66 x 66 mm
  • PICMA® High-Performance Multilayer Piezo Drives


SpaceFAB Video
Watch Parallel-Kinematics Motion Video


 
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Specifications & Drawings, Request Quote | PDF Datasheet




P-615 NanoCube® XYZ Piezo Nano Alignment Systems with Parallel Metrology

 
NanoCube XYZ Piezo NanoAlignment Systems with Parallel Metrology
  • 350 x 350 x 250 Micron Closed-Loop Travel Range
  • Parallel-Kinematics Design & Direct Capacitive Metrology for Higher Multi-Axis Accuracy
  • Compact Design : 80 x 80 x 42 mm (Open & Closed-Loop Versions)
  • 10 mm Clear Aperture
  • PICMA® High-Performance Multilayer Piezo Drives
  • 1 Nanometer Resolution
  • Ideal for Alignment and Photonics Packaging Applications Vacuum Compatible to 10-6 hPa
Specifications & Drawings, Request Quote | PDF Datasheet




P-562 PIMarsTM XYZ Piezo Stages / Scanners with Parallel Metrology

 
PIMars XYZ Piezo Scanning- and Nanopositioning Stages with Parallel Metrology
  • To 300 x 300 x 300 Micron Travel Range
  • Parallel-Kinematics/Metrology for Enhanced Responsiveness / X-Y-Z Decoupling, Low Bow
  • Direct Metrology with Capacitive Sensors for Highest Precision
  • 66 x 66 mm Clear Aperture
  • Six-Axis Custom Versions
  • Ultra-Fast XY and XYZ Versions Available
  • Ultra-High-Vacuum Versions up to 10-9 hPa Available
  • Invar, Super-Invar and Titanium Versions Available
  • PICMA® High-Performance Multilayer Piezo Drives
Specifications & Drawings, Request Quote | PDF Datasheet




P-545 PI nano™ XY & XYZ 1x3 Piezo Stage Systems

 
Low-Profile, XY Piezo Scanning Microscopy Stages with Parallel Metrology
  • Low Profile for Easy Integration: 20 mm (0.8")
  • Large Aperture for 1x3"Slides. Accessories & Holders Available
  • All Parts Black Anodized for Minimum Reflections
  • 200µm Standard Travel Range, Longer Ranges Available
  • Longest Lifetime with Proprietary PICMA® Piezo Technology
  • Cost Effective due to Low-Cost Piezoresistive Sensors
  • Compatible w/ Leading Image Acquisition Software Packages
  • Closed-Loop Control for High Repeatability and Accuracy
  • Millisecond Step Time, ideal for Super-Resolution Microscopy
  • Recessed Sample Holders for Maximized Utility
Product Description | Download the Tools for Microscopy Catalog | Controller Manual | Request Quote




P-587 Six-Axis, Long-Travel Piezo Stage Nanopositioner with Parallel Metrology

 
Six-Axis, Long-Travel Piezo Nanopositioning / Scanning Stage with Parallel Metrology
  • For Scanning and Positioning in all Six Degrees of Freedom
  • 800 x 800 x 200 Micron Linear Range
  • Up to 10 mad Rotational Range
  • Precision Trajectory Control
  • Parallel - Kinematics / Metrology for Enhanced Responsiveness / Multi-Axis Precision
  • Direct Metrology with Capacitive Sensors for Highest Precision
  • ID-Chip for Auto Calibration Function
  • PICMA® High - Performance Multilayer Piezo Drives
Specifications & Drawings, Request Quote | PDF Datasheet




Video: How Piezo-Driven Flexure Nanopositioning Systems Work





SpaceFAB Video
Nanopositioning with Piezo Video







Special Nanopositioning Stages:
Long Travel, Hybrid, Piezo-Walk Motor-Driven







N-664 PiezoWalk Motor-Driven Nanopositioning Stage; 30mm Travel, 0.5nm Encoder

 
High-Resolution Translation Stage
  • Integrated Miniature PiezoWalk Motor
  • Travel range 30 mm
  • Ultra-High Precision Encoder: 0.5 Nanometers Resolution
  • Minimal incremental motion 2 Nanometers
  • Excellent guiding accuracy
  • Max. velocity 10 mm/second
Specifications & Drawings, Request Quote | PDF Datasheet




N-510K High-Stiffness NEXLINE® Z Stage High-Precision Positioning, with Capacitive Sensors

 
  • Self Locking at Rest, No Heat Generation
  • Hybrid Drive: PiezoWalk® plus PICMA®
  • Travel Range: 400 µm Coarse + 40 µm Fine
  • 2 nm Closed-Loop Resolution
  • Direct Metrology: One Single Control Loop with Capacitive Sensors
  • High Push and Holding Force to 25 N
  • Piezo Walking Drive w/o Wear and Tear & Outstanding Lifetime due to PICMA® Piezo Actuators
Back to Top      Specifications & Drawings, Request Quote | PDF




M-714 Hybrid Piezo/DC-Motor Nanopositioning Z-Stage

 
M-714 Hybrid Piezo Z-Stage
  • Hybrid Sytem Combines Advantages of Piezoelectrics and Electromagnetic Drives
  • 2 Nanometer Linear Encoder Resolution
  • High Holding Forces with Minimum Power Consumption, without Counterbalancing the Load
  • Active Compensation of Stick/Slip During Startup and Settling
  • Active Backlash Compensation
  • Excellent Velocity Control
  • Millisecond Settling to Nanometer Accuracy
  • Reliable Execution of Minimal Increments


SpaceFAB Video
Hybrid Stage Video


 
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Specifications & Drawings, Request Quote | PDF Datasheet




For Nanopositioning Motors Click Here



Piezo-Motor-Driven Stages (Long Travel)


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