Piezo Flexure Nanopositioners (Piezostages)

Single Axis Piezo Stage Nanopositioning Systems

• XY-Travel to 1800 µm
• Compact Design
• Resolution <1 Nanometer
• Frictionless Precision Flexure Guiding System
• PICMA^® High-Performance Piezo Drives
• Direct Metrology with Capacitive Sensors for Highest Precision
• Up to 0.02% Position Accuracy
• X, XY, Z, XYZ Versions
• Vacuum-Compatible Versions

• Travel Range 20 mm
• Self Locking at Rest, no Heat Generation, no Servo Dither
• Compact Design: 70 x 50 x 20 mm
• Zero-Wear Piezo Stepping Drive, Ideal for Micro- and Nano-Manipulation
• Integrated Linear Encoder Option for Highest Accuracy with 20 nm Resolution
• Two Operating Modes: Continuous Stepping Mode and Continuously Variable, High-Dynamics Analog Mode for 30 pm Resolution**
• Up to 10 N Force Generation

• Integrated Miniature PiezoWalk Motor
• Travel range 30 mm
• Ultra-High Precision Encoder: 0.5 Nanometers Resolution
• Minimal incremental motion 2 Nanometers
• Excellent guiding accuracy
• Max. velocity 10 mm/second

• Fast Response (1 kHz Resonant Frequency)
• Stainless Steel Construction
• Frictionless Precision Flexure Guiding System
• 80 Micron Travel Range
• Direct Metrology with LVDT Sensor
• Resolution <5 Nanometer
• PICMA^® High-Performance Multilayer Piezo Drives

• 10 kg Load Capacity
• 1 Nanometer Lateral Guiding Precision
• Resolution <1 Nanometer
• PICMA^® High-Performance Multilayer Piezo Drives
• Fast Response
• 75 Micron Travel Range
• Direct Metrology with Capacitive Sensors for Highest Precision
• Frictionless Precision Flexure Guiding System

• High Dynamics, 5 ms Settling Time
• 30 µm Travel Range
• Resolution to 0.2 nm
• Compact Design, Low Profile, 40 x 40 x 6 mm
• Clear Aperture, 25 x 15 mm
• PICMA® Long Life Piezo Drives

• Smallest Flexure-Guided Stage with Capacitive Feedback
• Ideal for Head/Media Test & Fiber Optics
• Resolution <0.1 nm
• Ultra-Fast Response (1.7 kHz Resonant Frequency)
• ID-Chip for Auto Calibrate Function
• Frictionless Precision Flexure Guiding System
• PICMA^® High-Performance Multilayer Piezo Drives

• Ultra-Fast Response
• Ultra-Precise Trajectory Control
• Digital Controllers with Fast FiberLink Interface Available
• ID-Chip for AutoCalibrate Function
• Direct-Metrology Capacitive Sensors for Highest Precision
• 0.1 nm Resolution
• PICMA^® High-Performance Multilayer Piezo Drives

• Unique Design: Both Piezo-Stage and Piezo Actuator
• Frictionless Precision Flexure Guiding System
• 0.05 nm Resolution
• Direct Metrology with Capacitive Sensors for Highest Precision
• Ultra-Fast Response, Very Compact
• PICMA^® High-Performance Multilayer Piezo Drives
• ID-Chip for Auto Calibrate Function
• Vacuum Versions Available

• Flexure Guidance for Frictionless, Ultra-Straight Motion
• Travel Ranges to 480 Micron
• Resolution to 0.2 Nanometer
• High Dynamics and Stiffness
• PICMA^® High-Performance Piezo Actuators
• Open and Closed-Loop Versions
• Ideal for OEM Applications

• Frictionless Flexure Guiding System for Straight Motion Integrated Motion
• Amplifier for Travel Ranges to 1 mm
• High Dynamics and Stiffness, Forces to 400 N, Backlash-Free Construction
• Outstanding Lifetime Due to PICMA® Piezo Actuators
• Available with Integrated Position Sensor
• Custom Designs with Larger Travel or Faster Response and Non-Magnetic Versions Feasible
• Ideal for OEM-Applications in Adaptronics, Biotechnology or Microfluidics

• Frictionless, High-Precision Flexure Guiding System
• Travel Ranges to 500 µm
• Cost-Effective Design Outstanding Lifetime Due to PICMA® Piezo Actuators
• Available with Integrated Position Sensor
• Ideal OEM Actuators for Precision Motion Control in Optics, Medical, Biotech and Microfluidics Applications
• Custom Designs with Larger Travel or Faster Response and Non-Magnetic Versions Feasible

• Z-Axis Travel to 400 Micron
• Low Profile
• Resolution <1 Nanometer
• Frictionless Precision Flexure Guiding System
• PICMA^® High-Performance Multilayer Piezo Drives
• Direct Metrology with Capacitive Sensors for Highest Precision
• 0.02% Position Accuracy
• X, XY, Z, XYZ Versions
• Vacuum-Compatible Versions

• Self Locking at Rest, No Heat Generation
• Hybrid Drive: PiezoWalk® plus PICMA®
• Travel Range: 400 µm Coarse + 40 µm Fine
• 2 nm Closed-Loop Resolution
• Direct Metrology: One Single Control Loop with Capacitive Sensors
• High Push and Holding Force to 25 N
• Piezo Walking Drive w/o Wear and Tear & Outstanding Lifetime due to PICMA® Piezo Actuators

• Hybrid Sytem Combines Advantages of Piezoelectrics and Electromagnetic Drives
• 2 Nanometer Linear Encoder Resolution
• High Holding Forces with Minimum Power Consumption, without Counterbalancing the Load
• Active Compensation of Stick/Slip During Startup and Settling
• Active Backlash Compensation
• Excellent Velocity Control
• Millisecond Settling to Nanometer Accuracy
• Reliable Execution of Minimal Increments

Z-/Tip/Tilt Stages (with Aperture)

• Extremely Fast Step & Settle, From 5 msec
• Low Profile for Easy Integration: 20 mm (0.8")
• 100 and 200 µm Travel Ranges
• Longest Lifetime with Proprietary PICMA® Piezo Technology
• Cost Effective due to Low-Cost Piezoresistive Sensors
• Compatible w/ Leading Image Acquisition Software Packages
• Closed-Loop Control for High Repeatability and Accuracy
• 24 Bit USB Controller & Software Included

• High-Speed Piezo Z-Motion with Travel Ranges to 250 µm
• Nanometer Resolution
• Large Clear Aperture to Accommodate Specimen Holders
• Perfect Mechanical Fit to XY OEM Manual or Motorized Stages
• Sub-Millisecond Response Times

• Small Footprint: 60 x 60 mm
• For Cost-Sensitive Applications
• 100 Micron Travel
• Range Resolution to 0.2 Nanometer
• Clear Aperture : 20 x 20 mm
• PICMA® High-Performance Multilayer Piezo Actuators

• Lower Profile for Easy Integration: 16.5 mm
• Z and Tip/Tilt Versions
• Fast Response
• 100 Micron Linear Travel Range
• 80 x 80 mm Clear Aperture
• PICMA^® High-Performance Multilayer Piezo Actuators for Superior Lifetime
• Combination with Long Travel Microscopy Stages

• Lower Profile for Easy Integration: 16.5 mm
• Z and Tip/Tilt Versions
• Choice of Strain Gauge (Lower Cost) or Capacitive Sensors (Higher Performance)
• 100 Micron Linear Travel Range, 1 milliradian Tilt
• 80 x 80 mm Clear Aperture
• PICMA^® High-Performance Multilayer Piezo Actuators for Superior Lifetime
• Ideal for fast Z-Stack Acquisition and 3D Deconvolution Imaging

• Precision Trajectory Control
• Parallel-Kinematics/Metrology for Enhanced Responsiveness / Multi-Axis Precision
• Travel Ranges to 200 Micron / 4 milliradian
• Clear Aperture 66 x 66 mm
• Direct Metrology with Capacitive Sensors for Highest Precision
• PICMA^® High-Performance Multilayer Piezo Drives

PIFOC^® Objective Scanners

• Scans and Positions Objectives with Sub-Nanometer Resolution
• Low Inertia for Fast Settling
• Frictionless Precision Flexure Guiding System
• Travel to 100 Micron
• Straightness of Travel ≤13 microradian
• PICMA^® High-Performance Multilayer Piezo Drives

• Scans and Positions Objectives with Sub-Nanometer Resolution
• High Linearity and Stability with Direct-Measuring Sensors
• Travel to 100 Micron, fast Settling Time
• Very Straight Motion for Enhanced Focus Stability
• Ask about DIC Prism Holder Option
• Compatible with Metamorph^TM Imaging Software
• Quick Lock Adapter for Easy Attachment

• Scans and Positions Objectives with Sub-Nanometer Resolution
• High Linearity and Stability with Direct-Measuring Capacitive Sensors
• Travel to 460 Micron, Fast Response & Settling Time
• Frictionless Precision Flexure Guiding System
• Enhanced Guiding Precision for Better Focus Stability
• Ask about DIC Prism Holder Option
• Controller Compatible with Metamorph^TM Imaging Software
• Quick Lock Adapter for Easy Attachment

• High Force & High-Dynamics for Positioning and Scanning of Large Objectives up to 29 mm Ř
• 1 mm Travel for Applications with Large Penetration Depth
• Ideal for e. g. Two-Photon Microscopy
• Very Fast Response: 20 ms Step and Settle Time
• Self-Locking at Rest, no Heat Generation, no Servojitter
• Drive Resolution < 1 nm, 20 nm Encoder Resolution
• Two Motion Modes: Continuous Nanostepping and High-Dynamics Analog Mode
• Compact Design: Ř 48 mm, 40.5 mm Height
• Frictionless, High-Precision Flexure Guiding System for Better Focus Stability
• QuickLock Thread Adapter for Simple Installation

• Resonant frequency: 430 Hz (with 300 g), 1100 Hz without objective
• Closed-loop position noise: <0.4 nm
• Position stability over 100 s: 4 nm
• Maximum operating frequency (amplitude <10 µm): 150 Hz*
• Maximum operating frequency with full travel (100 µm): 60 Hz*
• Settling time (10 µm steps): 6 ms**
• Settling time (full travel): 15 ms**

• High-Speed Piezo Z-Motion with Travel Ranges to 250 µm
• Nanometer Resolution
• Large Clear Aperture to Accommodate Specimen Holders
• Perfect Mechanical Fit to XY OEM Manual or Motorized Stages
• Sub-Millisecond Response Times

Multi-Axis Stages without Aperture

• Small Footprint: 44 x 44 mm
• 100 Micron Travel
• Range Resolution to 0.2 Nanometer
• For Cost-Sensitive Applications
• PICMA^® High-Performance Multilayer Piezo Actuators
• Open- and Closed-Loop Models

• Small Footprint: 44 x 44 mm
• 100 Micron Travel
• Range Resolution to 0.2 Nanometer
• For Cost-Sensitive Applications
• PICMA^® High-Performance Multilayer Piezo Actuators
• Z-Stage also Available

• XY-Travel to 1800 µm
• Compact Design
• Resolution <1 Nanometer
• Frictionless Precision Flexure Guiding System
• PICMA^® High-Performance Multilayer Piezo Drives
• Direct Metrology with Capacitive Sensors for Highest Precision
• Up to 0.02% Position Accuracy
• X, XY, Z, XYZ Versions
• Vacuum-Compatible Versions

• Ultra-High-Performance Closed-Loop Scanner for AFM/SPM
• Compact Manipulation Tool for Nanotechnology
• Resonant Frequency 9.8 kHz
• Ultra-High-Precision Capacitive Feedback
• Parallel-Motion Metrology for Highest Linearity and Stability
• 50 Picometers Resolution
• 5 x 5 x 5 Micron Travel Range
• Very Small Package
• Rugged Design

• 100 x 100 x 100 Micron Travel Range
• Very Compact: 44 x 44 x 44 mm
• 1 Nanometer Resolution
• Ideal for Fiber-Alignment and Photonics Packaging Applications
• Optional E-760 Controller Card Features Built-In Optical Metrology
• Closed- and Open-Loop Versions
• Flexure-Guided Precision Trajectory Control
• Fast Scanning and Settling
• Large Variety of Controllers

P-587 Six-Axis, Long-Travel Nanopositioning / ScanningPiezo-Stage with Parallel Metrology

• For Scanning and Positioning in all Six Degrees of Freedom
• 800 x 800 x 200 Micron Linear Range
• Up to 10 mad Rotational Range
• Precision Trajectory Control
• Parallel - Kinematics / Metrology for Enhanced Responsiveness / Multi-Axis Precision
• Direct Metrology with Capacitive Sensors for Highest Precision
• ID-Chip for Auto Calibration Function
• PICMA^® High - Performance Multilayer Piezo Drives

Multi-Axis Piezo-Stages with Aperture

• Ideal for Interlacing, CCD Resolution Enhancement
• Compact Size of only 45 x 45 x 6 mm
• Clear Aperture
• Highly Cost - Efficient Design
• 15 x 15 Micron Travel Range
• Parallel - Kinematics Design for Higher Dynamics

• Small Footprint : 60 x 60 mm
• 100 x 100 Micron Travel Range
• Resolution to 0.8 Nanometer
• For Cost-Sensitive Applications
• Clear Aperture: 20 x 20 mm
• PICMA ^® High-Performance Multilayer Piezo Actuators
• Z-Stage also Available

• Low Profile for Easy Integration: 16.5 mm
• Parallel Kinematics for Fast Response
• To 200 x 200 Micron Travel Range
• 80 x 80 mm Clear Aperture
• PICMA^® High-Performance Multilayer Piezo Actuators for Superior Lifetime

• Low Profile for Easy Integration: 16.5 mm
• Parallel Kinematics and Optional Parallel Metrology for Fast Response and Superior Multi-Axis Precision, Decoupling of X-Y-Z Motion
• Choice of Strain Gauge (Lower Cost) or Capacitive Sensors (Higher Performance)
• To 200 x 200 Micron Travel Range
• Direct Drive Version for High-Speed Positioning & Scanning
• 80 x 80 mm Clear Aperture
• PICMA^® High-Performance Multilayer Piezo Actuators for Superior Lifetime

• Higher Speed Through Direct Drive
• Up to 2.2 kHz Resonant Frequency in X and Y
• 30 x 30 or 30 x 30 x 10 Micron Travel Range
• 100 Picometers Resolution
• Capacitive Sensors for Highest Linearity
• Parallel - Kinematics / Metrology for Enhanced Responsiveness / Multi-Axis Precision, Decoupling of X-Y-Z Motion
• Active Runout Compensation
• 50 x 50 mm Clear Aperture
• Frictionless Precision Flexure Guiding System
• PICMA^® High-Performance Multilayer Piezo Drives
• Vacuum Compatible Option

• 100 x 100 Micron Travel Range
• For XY Scanning & Positioning
• Parallel-Kinematics/Metrology for Enhanced Responsiveness / Multi-Axis Precision, Decoupling of X-Y-Z Motion
• Precision Flexure-Guiding System
• Integrated Capacitive Sensors for Resolution <0.3 Nanometer
• 50 x 50 mm Clear Aperture
• Ultra-High Vacuum Version Available
• Ultra-Fast XY and XYZ Versions Available
• PICMA^® High-Performance Multilayer Piezo Drives

• Ultra-Precision Trajectory Control, Ideal for Surface Analysis and Scanning Microscopy
• Low Bow: Flatness in the Low Nanometer Range
• Parallel-Kinematics/Metrology for Enhanced Responsiveness, Decoupling of X-Y-Z Motion
• 100 x 100 Micron Travel Range
• Direct-Metrology Capacitive Sensors for Higher Precision
• 56 x 56 mm Clear Aperture
• PICMA^®High-Performance Multilayer Piezo Drives

• XYΘ, XYZ and XY Versions
• Precision Trajectory Control
• Parallel-Kinematics/Metrology for Enhanced Responsiveness / Multi-Axis Precision
• Travel Ranges to 200 Micron
• Clear Aperture to 66 x 66 mm
• PICMA^® High-Performance Multilayer Piezo Drives

• 350 x 350 x 250 Micron Closed-Loop Travel Range
• Parallel-Kinematics Design & Direct Capacitive Metrology for Higher Multi-Axis Accuracy
• Compact Design : 80 x 80 x 42 mm (Open & Closed-Loop Versions)
• 10 mm Clear Aperture
• PICMA^® High-Performance Multilayer Piezo Drives
• 1 Nanometer Resolution
• Ideal for Alignment and Photonics Packaging Applications Vacuum Compatible to 10^-6 hPa

• To 300 x 300 x 300 Micron Travel Range
• Parallel-Kinematics/Metrology for Enhanced Responsiveness / X-Y-Z Decoupling, Low Bow
• Direct Metrology with Capacitive Sensors for Highest Precision
• 66 x 66 mm Clear Aperture
• Six-Axis Custom Versions
• Ultra-Fast XY and XYZ Versions Available
• Ultra-High-Vacuum Versions up to 10^-9 hPa Available
• Invar, Super-Invar and Titanium Versions Available
• PICMA^® High-Performance Multilayer Piezo Drives

• Low Profile for Easy Integration: 20 mm (0.8")
• Large Aperture for 1x3"Slides. Accessories & Holders Available
• All Parts Black Anodized for Minimum Reflections
• 200µm Standard Travel Range, Longer Ranges Available
• Longest Lifetime with Proprietary PICMA® Piezo Technology
• Cost Effective due to Low-Cost Piezoresistive Sensors
• Compatible w/ Leading Image Acquisition Software Packages
• Closed-Loop Control for High Repeatability and Accuracy
• Millisecond Step Time, ideal for Super-Resolution Microscopy
• Recessed Sample Holders for Maximized Utility

• For Scanning and Positioning in all Six Degrees of Freedom
• 800 x 800 x 200 Micron Linear Range
• Up to 10 mad Rotational Range
• Precision Trajectory Control
• Parallel - Kinematics / Metrology for Enhanced Responsiveness / Multi-Axis Precision
• Direct Metrology with Capacitive Sensors for Highest Precision
• ID-Chip for Auto Calibration Function
• PICMA^® High - Performance Multilayer Piezo Drives

NEXLINE^® / NEXACT^® Linear Nanopositioning Drives

• 20 mm Standard Travel Range
• Compact and Cost-Effective Design
• 0.03 nm Resolution
• To 10 N Push/Pull Force
• Low Operating Voltage
• Self Locking, with no Heat Dissipation, Nanometer Stability
• Non-Magnetic and Vacuum-Compatible Working Principle

• Travel Range 10 mm
• Resolutionto 0.025 nm Open-Loop,5 nm Closed-Loop
• Up To 50 N Force Generation and 70 N Holding Force
• Self-Locking at Rest, No Heat Generation
• Non-Magnetic and Vacuum-Compatible Working Principle
• Cleanroom Compatible

• Travel Range 20 mm
• Resolutionto 0.03 nm Open-Loop, 5 nm Closed-Loop
• Up to 800 N Holding Force
• Self-Locking at Rest
• Non-Magnetic and Vacuum-Compatible Working Principle
• Cleanroom Compatible