PI-USA: Precision Translation Stage, Linear Actuator, Rotation Stage, Micropositioning, Hexapods, Motorized Actuators, Precision Positioning Stages


Precision Motorized Micro-Positioning Stages & Hexapods


PI offers the broadest and deepest range of precision motion technologies for micro and nano precision applications. As the world leader in parallel kinematics six-axis hexapod precision positioning systems our engineers can find the appropriate technology for almost any complex positioning application.

PI is the global leader in 6-axis parallel-kinematics positioning stages. For single and multi-axis applications, a wide selection of innovative precision positioning actuators and stages are offered both for scientific and industrial applications.

Ultra-High Precision Stage Applications: Air Bearing Stages provide the highest performance with extremely good resolution, repeatability, straightness and flatness. These frictionless positioners are used in metrology and positioning applications with the highest demands on lifetime and accuracy.

Positioners with Mechanical Bearings: Our new line of motorized linear stages with ball bearings and crossed roller bearings is also available for vacuum and UHV environments and can be customized for beam line integration.

Benefits of working with PI: access to the most advanced motion technologies: choice of drives (several types of self-clamping piezo linear motors; magnetic linear motors; electro-magnetic linear motors Hybrid linear drives; DC-servo and steppers.

Ultra-high precision air bearing rotation stages; low profile piezo motor rotation stages; ballscrew or leadscrew linear drives for high stiffness; choice of integration level (from motor components to complete 6-Axis turn key positioning systems with controller and software); piezo flexure stage add-ons.

More Information...
Engineered Vacuum Motion Systems Brochure
Hexapods Brochure
Hexapod FAQ
Precision Miniature Translation Stages Catalog

Mini Stages Linear Stages Vertical Stages Rotary / Tilt Stages Air Bearings

Hexapods Motor Actuators Piezo Motors Motion Controllers Flexure Stages

Linear Translation Stages

M-122 Fast Miniature Linear Translation Stage, Optical Linear Encoder, 25mm

Fast Miniature Linear Translation Stage with Integrated Optical Linear Encoder
  • Travel Range 25 mm
  • 0.1 µm Optical Linear Encoder for Highest Accuracy & Repeatability
  • Min. Incremental Motion to 0.2 µm
  • Max. Velocity 20 mm/s
  • Cross-Roll Bearings
  • Recirculating Ball Screw Drives Provide High Speeds & Long Lifetimes

Specifications & Drawings, Request Quote | PDF Datasheet

M-110 /11/12 Miniature Translation Stages, High-Resolution, Lead & Ballscrew, 5-25mm

High-Resolution Micro-Translation Stages with Ballscrew Drive
  • Travel Ranges 5, 15 and 25 mm
  • Very high resolution to 0.05 µm, and Cost Effective
  • MTBF 5000 h
  • Max. Velocity 2 mm/s
  • Closed-Loop DC Motors and Stepper Motors
  • Non-Contact Limit and Reference Switches
  • Choice of Leadscrew and Ball Screw for Higher Speeds & Longer Life
  • Vacuum-Compatible Versions Available to 10-6 hPa
Specifications & Drawings, Request Quote | PDF Datasheet
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New: Additional Miniature Linear & Rotary Stages, Piezo Motor-Driven

M-663 PILine® High-Speed Miniature Translation Stages, Closed-Loop Piezo Motor, 18mm

Miniature Translation Stage
  • Two Versions: Higher Resolution / Lower Cost
  • Closed-Loop Linear Motor Drive and Linear Encoder
  • 18 mm Travel Range
  • Velocity up to 250 mm/sec
  • Very Fast Step & Settle
  • Resolution to 0.1 Micron
  • Integrated Direct-Metrology Linear Encoder
  • Self Locking, No Dither, Excellent Long Term Stability
  • XY Combinations Available
  • 20,000 h MTBF
  • Vacuum Versions Available
Specifications & Drawings, Request Quote | PDF Datasheet

M-664 PILine® High-Speed Mini Translation Stages, Closed-Loop Piezo Motor, 25mm

 PILine Miniature Translation Stages, Closed-Loop Ultrasonic Piezo Motors
  • Travel Range 25 mm
  • Max. Velocity 400 mm/s
  • Ultra-Low Profile, 15 mm
  • Direct Metrology Linear Encoder with 0.1 µm Resolution
  • High Guiding Accuracy with Crossed Roller Bearings
  • Compact XY Combinations
  • Piezo Linear Motor with 6 N Drive Force
  • Self Locking at Rest
Specifications & Drawings, Request Quote | PDF Datasheet
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M-683 Fast Translation Stage, Closed-Loop Piezomotor, Linear Encoder, 50mm

PILine Low-Profile Translation Stages with Closed-Loop Ultrasonic Piezo Linear Motors
  • Max. Velocity 350 mm/s
  • Low Profile: Only 21 mm Height
  • Compact XY Combination Possible
  • Up to 6 N Force Generation
  • Direct Metrology Linear Encoder, 0.1 µm Resolution
  • Travel Ranges 50 mm
  • Excellent Guiding Accuracy Through Crossed Roller Bearings
  • PILine®: Non-Magnetic and Vacuum-Compatible Working Principle
  • Self-Locking at Rest
Specifications & Drawings, Request Quote | PDF Datasheet

Q-545 Compact Piezo Motor Linear Stage, 13mm and 26mm Travel

    This compact closed-loop, linear stage is driven by a stick-slip piezo motor. A linear encoder is integrated for nanometer-scale precision. Vacuum versions, and non-magnetic versions are also offered. The piezo inertia drive runs at inaudible frequencies and is self-clamping at rest with position holding forces around 2 lbs.

  • 13 mm and 26 mm Travel
  • Closed-Loop, with Stick-Slip Piezo Motor
  • Vacuum Versions and Non-Magnetic Versions available
  • Optical Encoder, 2nm Resolution
  • Velocity of 10 mm/sec
  • Load capacity up to 1 kg
Specifications & Drawings, Request Quote | PDF Brochure
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N-664 Ultra-High Precision Stage, Closed-Loop Piezo Motor, Self-Locking, 0.5 Nanometer Encoder, 30mm

High-Resolution Nano-Translation Stage
  • Integrated Miniature PiezoWalk Motor
  • Travel range 30 mm
  • Ultra-High Precision Encoder: 0.5 Nanometers Resolution
  • Minimal incremental motion 2 Nanometers
  • Excellent guiding accuracy
  • Max. velocity 10 mm/second
Specifications & Drawings, Request Quote | PDF Datasheet
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Classical Linear Motor Stages:
Air Bearings and Crossed Roller Bearings

Linear Motor Stages Air Bearing Stages
  • Travel Range: from 25 to 800 mm
  • Air Bearings and Crossed Roller Bearings
  • Low Cost and High Performance Models
  • Integrated Linear Encoders
  • Resolution from 0.1 micron to 5 nanometers
  • Non-Contact Limit Switches
  • More Linear Motor Stages ...
Linear Motor Stages Overview

Ballscrew & Leadscrew-Driven Linear Translation Stages

M-403 - M-414 Cost-Effective Linear Stages, Stepper & Servo Motor, 25-300mm

High-Resolution Translation Stage, Stepper Motor
  • Travel Ranges from 25 to 300 mm
  • Cost-Effective Design
  • Modular System with 4 Series: M-403, M-404, M-413, M-414
  • Preloaded Leadscrews or Recirculating Ball Screws
  • Stress-Relieved Aluminum Base 80 and 120 mm Width
  • Minimum Incremental Motion to 0.1 Micron
  • Resolution to 0.017 Micron

Specifications & Drawings, Request Quote for M-403/4 Model (80 mm Base Width)
Specifications & Drawings, Request Quote for M-4013/14 Model (120 mm Base Width)

M-406 High-Precision Translation Stages, Crossed Roller Bearings, 50-150mm

High-Precision Crossed Roller Stage
  • Travel Ranges to 150 mm
  • Stress-Relieved Aluminum Stage Base for Highest Stability
  • Crossed Roller Bearings
  • Manual, DC-Servo and Stepper-Motor Drives, ActiveDrive™ Option
  • Choice of Motion Controllers
  • Non-Contact Direction-Sensing Origin Switch
  • Non-Contact Limit Switches
Specifications & Drawings, Request Quote
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M-605 Ultra-Compact, High-Accuracy Translation Stage, Dust Protection, Linear Encoder, 25-50mm

Ultra-Compact, High-Accuracy Translation Stage
  • Integrated Linear-Scale Encoders for Highest Accuracy
  • Travel Ranges 25 mm (1") and 50 mm (2")
  • Velocity up to 50 mm/sec.
  • Active Drive™ Motors
  • Choice of Motion Controllers
  • Stress-Relieved Aluminum Stage Base for Highest Stability
  • Zero-Backlash Recirculating Ballscrews
  • Non-Contact, Direction-Sensing Origin Switch
  • Non-Contact Limit Switches
  • Load Capacity 20 kg
  • >20,000 Hours MTBF
Specifications & Drawings, Request Quote | PDF Datasheet

M-511/21/31 Low-Profile, High-Load Translation Stages, Ballscrew, Linear Scale Option, 100-306mm

Low-Profile, High-Load Translation Stages Ballscrew
  • Travel Ranges to 306 mm (12")
  • Velocity up to 125 mm/sec.
  • ActiveDrive™ Motors
  • Choice of Motion Controllers
  • Linear-Scale Encoders for Highest Accuracy
  • Stress-Relieved Aluminum Stage Base for Highest Stability
  • Zero-Backlash Recirculating Ballscrews
  • Non-Contacting Origin and Limit Switches
  • PIIntelliStage™ Version with Integrated Controller
  • Load Capacity 100 kg
  • >20000 Hours MTBF
Specifications & Drawings, Request Quote | | PDF Datasheet

M-511.HD Ultra-High Resolution Hybrid Piezo-Servo Nanopositioning Stage, 100mm, 2 nm Resolution

long-travel Hybrid Stage, Nanopositioner
  • Hybrid System Combines Advantages of Piezoelectrics and Electromagnetic Drives
  • 2 Nanometer Linear Encoder Resolution
  • 100 mm Travel
  • Velocities to 125 mm/sec
  • Active Compensation of Stick/Slip During Startup and Settling
  • Active Backlash Compensation
  • Excellent Velocity Control
  • Millisecond Settling to Nanometer Accuracy
  • Reliable Execution of Minimal Increments
  • High Drive and Holding Forces with Minimal Power
Specifications & Drawings, Request Quote | PDF Datasheet
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Voice Coil Linear Motor Positioning and Scanning Stages

V-106 High Speed Scanner, Voice Coil, Linear Encoder, 0.1 µm, 6-20mm

Voice-Coil Scanning Drive These closed-loop positioning stages were designed for high-dynamics precision motion applications, like those in biotechnology; laser beam control; optics scanning; lens testing; and fiber optics. V-106 translation stages / scanning systems achieve significantly higher dynamics than conventional positioners; scanning frequencies to 20 Hz and above can be achieved. The drive system is also not subject to wear and tear or particle generation. For high-throughput positioning applications, the rapid settling time of less 75 milliseconds for a 5 mm step is a real benefit.
    Fast Scanning and Positioning
  • Scanning Frequency 10s of Hz
  • Travel Ranges of 20 mm and 6 mm
  • Velocity up to 270 mm/sec
  • Linear Encoder, 0.1 Micron Resolution

Specifications & Drawings, Request Quote | PDF Datasheet

M-686 Low-Profile XY Open-Frame Piezomotor Stage, Linear Encoders, 25x25mm

Low-Profile XY Open-Frame Piezomotor Stage with Linear Encoders
  • Integrated Closed-Loop Piezomotor Drives Provide High Speed to 100 mm/s
  • 25 x 25 mm Travel Ranges
  • Integrated Linear Encoders with 0.1 µm Resolution
  • Compact Design; 27 mm Profile Height, 150 x 150 mm Footprint
  • Large Clear Aperture 78 x 78 mm, 66 x 66 mm in Extreme Position
  • Self-Locking at Rest
  • Compatible with PI Piezo Nanopositioning / Scanning Stages
Specifications & Drawings, Request Quote | PDF Datasheet
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Vertical Linear Translation Stages

PI provides the largest variety of vertical linear stages in the industry, spanning from stepper motor driven stages, to piezo-Z flexure nanopositioners and hybrid ultra-precision vertical positioners. Select a category below.

Closed-loop Stepper Piezo Motor
High Load
Closed Loop Servo Hybrid Piezo Flexure

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Actuators & Micrometers

Due to the very broad range of drive technologies PI offers, PI is in the position to design precision actuators for any application, from OEM to research. Several types of piezo motors are available, from high speed to high force, in addition to conventional open and closed-loop stepper and servo motor drives. Drive concepts comprise ballscrew, leadscrew and linear-motor direct drives; sevaral vacuum compatible versions up to 10-9 Torr are offered.

Fast Voice Coil Servo & Stepper Piezo Ultrasonic Stick-Slip Piezo / Flexure
Voice-Coil Linear Motor Actuators
Servo & Stepper Actuators
Ultrasonic  Actuators
Stick-Slip Intertia Actuators
Flexure-Guided  Actuators

Click here for precision actuators with stepper, servo and piezo motors.

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Rotation Stages & Tilt Stages

PI provides rotation stages for almost any application. From miniature stages with compact piezo motors to high load positioners with torque motor direct drive and optional air bearings for the ultimate positioning accuracy.

Air Bearing Tip/Tilt & Gonio Classical Piezo Motor Linear

Click here for precision rotation stages with stepper, servo and piezo motors.

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Hexapod Six-Axis Micropositioning Systems

PI is the world leader in high precision hexapod positioning systems with more than two decades of experience. We offer servo, stepper and piezo motor designs with loads from 2 kg to several tons. In addition to the multitude of standard products, custom and OEM designs are available.

Miniature / Dynamics High Dynamics Medium Size High-Load Hexapods Extreme Conditions

In Astronomy Weatherproof SpaceFAB 6D Piezo Stages Hexapod Control

Click here for hexapod and SpaceFab precision parallel kinematics 6-axis positioning sytems

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Additional Precision Positioners from our PI miCos Product Line

Linear Stages XY Stages Z-Stages Rotary Stages Linear Actuators
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US Head Office

PI USA complies with the US laws
for export controlled technologies.

PI (Physik Instrumente) LP
16 Albert St.
Auburn, MA 01501
Phone 508-832-3456
Fax 508-832-0506
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San Francisco Area
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Phone 408-533-0973
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Los Angeles Area
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Irvine, CA 92620-5743
Phone 949-679-9191
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