Micropositioning Stages & Hexapods

Linear Translation Stages

• Travel Ranges 5, 15 and 25 mm
• MTBF 5000 h
• Very Cost Effective
• Min. Incremental Motion to 50 nm
• Max. Velocity 2 mm/s
• Closed-Loop DC Motors and Stepper Motors
• Non-Contact Limit and Reference Switches
• Optional Recirculating Ball Screw Drives Provide High Speeds & Long Lifetimes
• Vacuum-Compatible Versions Available to 10-6 hPa

• Smallest Translation Stage with Closed-Loop Linear Motor Drive and Linear Encoder
• 20 mm Travel Range
• Velocity up to 500 mm/s
• Accelerations up to 20 g
• Resolution to 0.1 Micron
• Integrated Direct-Metrology Linear Encoder
• AutoLock Feature
• XY Combinations Available
• 20,000 h MTBF
• Vacuum Versions Available

• Travel Range 25 mm
• Max. Velocity 400 mm/s
• Ultra-Low Profile, 15 mm
• Direct Metrology Linear Encoder with 0.1 µm Resolution
• High Guiding Accuracy with Crossed Roller Bearings
• Compact XY Combinations
• Piezo Linear Motor with 6 N Drive Force
• Self Locking at Rest

• Smallest Translation Stage with High-Speed Linear Motor Drive
• 20 mm Travel Range
• Velocity to 500 mm/s
• Acceleration to 20 g
• Resolution to 50 Nanometer
• Self-Locking
• XY-Combinations Available
• 20000 h MTBF
• Vacuum Versions to 10^-7hPa

• Max. Velocity 350 mm/s
• Low Profile: Only 21 mm Height
• Compact XY Combination Possible
• Up to 6 N Force Generation
• Direct Metrology Linear Encoder, 0.1 µm Resolution
• Travel Ranges 25 and 50 mm
• Excellent Guiding Accuracy Through Crossed Roller Bearings
• PILine®: Non-Magnetic and Vacuum-Compatible Working Principle
• Self-Locking at Rest

• Travel Range 20 mm
• Self Locking at Rest, no Heat Generation, no Servo Dither
• Compact Design: 70 x 50 x 20 mm
• Zero-Wear Piezo Stepping Drive, Ideal for Micro- and Nano-Manipulation
• Integrated Linear Encoder Option for Highest Accuracy with 20 nm Resolution
• Two Operating Modes: Continuous Stepping Mode and Continuously Variable, High-Dynamics Analog Mode for 30 pm Resolution**
• Up to 10 N Force Generation

• Integrated Miniature PiezoWalk Motor
• Travel range 30 mm
• Ultra-High Precision Encoder: 0.5 Nanometers Resolution
• Minimal incremental motion 2 Nanometers
• Excellent guiding accuracy
• Max. velocity 10 mm/second

• Integrated Closed-Loop Piezomotor Drives Provide High Speed to 100 mm/s
• 25 x 25 mm Travel Ranges
• Integrated Linear Encoders with 0.1 µm Resolution
• Compact Design; 27 mm Profile Height, 150 x 150 mm Footprint
• Large Clear Aperture 78 x 78 mm, 66 x 66 mm in Extreme Position
• Self-Locking at Rest
• Compatible with PI Piezo Nanopositioning / Scanning Stages

• Extremely Compact
• All-Stainless-Steel Construction
• X, XY and XYZ Versions
• Optional PiezoMike for Nanometer Resolution
• 4 mm Clear Aperture
• Linear Ball Bearings

• Travel Range to 15 mm
• Compact Side Drive
• Straightness/Flatness ≤ 0.2 Micron
• PZT Drive for Scanning and Tracking Applications
• 0.1 Micron Resolution with Closed-Loop DC Motor
• 5 Nanometer Resolution with Closed-Loop PZT Drive

• Travel Range 25 mm
• Compact Side Drive
• Straightness/Flatness ≤0.3 Micron
• PZT Drive for Scanning and Tracking Applications
• 0.1 Micron Resolution with Closed-Loop DC Motor
• 5 Nanometer Resolution with Closed-Loop PZT Drive
• 30 mm Ř Clear Aperture

• To 25 mm Travel Range
• Manual, DC-Servo and Stepper-Motor Drives
• ActiveDrive™ Option
• Compatible with Leading Industrial Motion Controllers
• Crossed Roller Bearings
• <0.1 Micron Resolution
• XY and XYZ Combinations
• Direction-Sensing Origin Switch
• Non-Contact Limit Switches

• To 25 mm Travel Range
• Cost-Effective Design
• Modular System with 4 Series: M-403, M-404, M-413, M-414
• Preloaded Leadscrews or Recirculating Ball Screws
• Travel Ranges from 25 to 300 mm
• Stress-Relieved Aluminum Base 80 and 120 mm Width
• Minimum Incremental Motion to 0.1 Micron
• Resolution to 0.017 Micron

• Travel Ranges to 150 mm
• Stress-Relieved Aluminum Stage Base for Highest Stability
• Crossed Roller Bearings
• Manual, DC-Servo and Stepper-Motor Drives, ActiveDrive™ Option
• Compatible with Leading Industrial Motion Controllers
• Manual Knob for Convenient Position Adjustment
• Non-Contact Direction-Sensing Origin Switch
• Non-Contact Limit Switches

• Integrated Linear-Scale Encoders for Highest Accuracy
• Travel Ranges 25 mm (1") and 50 mm (2")
• Velocity up to 50 mm/sec.
• Active Drive™ Motors
• Compatible with Leading Industrial Motion Controllers
• Stress-Relieved Aluminum Stage Base for Highest Stability
• Zero-Backlash Recirculating Ballscrews
• Non-Contact, Direction-Sensing Origin Switch
• Non-Contact Limit Switches
• Load Capacity 20 kg
• >20,000 Hours MTBF

• Travel Ranges to 150 mm (6 inches)
• Velocity up to 50 mm/sec.
• ActiveDrive™ Motors
• Compatible with Leading Industrial Motion Controllers
• Stress-Relieved Aluminum Stage Base for Highest Stability
• Zero-Backlash Recirculating Ballscrews
• Non-Contact Direction-Sensing Origin Switch
• Non-Contact Limit Switches
• Load Capacity 100 kg
• > 20,000 Hours MTBF

• Travel Ranges to 306 mm (12")
• Velocity up to 125 mm/sec.
• ActiveDrive™ Motors
• Compatible with Leading Industrial Motion Controllers
• Linear-Scale Encoders for Highest Accuracy
• Stress-Relieved Aluminum Stage Base for Highest Stability
• Zero-Backlash Recirculating Ballscrews
• Non-Contacting Origin and Limit Switches
• PIIntelliStage™ Version with Integrated Controller
• Load Capacity 100 kg
• >20000 Hours MTBF

• Hybrid System Combines Advantages of Piezoelectrics and Electromagnetic Drives
• 4 Nanometer Linear Encoder Resolution
• 100 mm Travel
• Velocities to 125 mm/sec
• Active Compensation of Stick/Slip During Startup and Settling
• Active Backlash Compensation
• Excellent Velocity Control
• Millisecond Settling to Nanometer Accuracy
• Reliable Execution of Minimal Increments
• High Drive and Holding Forces with Minimal Power

Voice Coil Scanning Stages

• Fast Scanning and Positioning
• Scanning Frequency 10s of Hz
• Travel Ranges of 20 mm and 6 mm
• Velocity up to 240 mm/s
• Linear Encoder Allows 0.2 Micron Repeatability
• Available PCI-Card Controller with On-Board Amplifiers

Actuators & Micrometers

• 10, 25 & 50 mm Travel Ranges
• 0.05 Micron Minimum Incremental Motion
• Non-Rotating Tip
• Closed-Loop DC Motor
• Compatible with Leading Industrial Motion Controllers
• Sub-Nanometer Resolution with Optional PZT Drive
• >5,000 Hours MTBF

• Cost-Efficient Design
• To 10 mm or to 25 mm Travel Range
• 46 nm Resolution (with C-663 Controller)
• 50 N Load Capacity
• Non-Rotating Tip
• Max. Velocity 1.5 mm/s
• Non-Contact Limit and Reference Switches Compact Design

• 10 & 25 mm Travel Range
• 0.05 Micron Minimum Incremental Motion
• Non-Rotating Tip
• Velocity to 2 mm/sec.
• Closed-Loop DC Motors and Stepper Motors
• Compatible with Leading Industrial Motion Controllers
• Integrated Hall-Effect Origin and Limit Switches
• Front Mount or Clamp Mount
• >5,000 Hours MTB

• 17 mm Travel Range
• 0.1 Micron Minimum Incremental Motion
• Velocity up to 2.5 mm/sec.
• Closed-Loop DC Motor
• Compatible with Leading Industrial Motion Controllers
• Integrated Hall-Effect Origin and Limit Switches
• Fits M-105 & F-110 Fiber Aligners
• >5,000 Hours MTBF

• 17 mm Travel Range
• 0.1 Micron Minimum Incremental Motion
• Velocity up to 2.5 mm/sec.
• Closed-Loop DC Motor
• Compatible with Leading Industrial Motion Controllers
• Integrated Hall-Effect Limit and Origin Switches
• Fits M-105 & F-110 Fiber Aligners
• >5,000 Hours MTBF

• 20 mm or 50 mm Travel Range
• 0.1 Micron Minimum Incremental Motion
• High-Speed Direct Drive Option
• 120 N Push/Pull Load
• 100 N Lateral Load Limit
• Preloaded Ultra-Low-Friction Ball Screw with Non-Rotating Tip
• Closed-Loop DC Motors and Stepper Motors
• Compatible with Leading Industrial Motion Controllers
• Integrated Hall-Effect Limit & Origin Switches
• >20,000 Hours MTBF
• Vacuum Versions

• High Load Capacity to 400 N
• Optional 0.1 Micron Direct Metrology Linear Encoder for Exceptional Precision
• Travel Range to 50 mm
• Minimum Incremental Motion to 0.3 Micron
• Max. Velocity: 30 mm/s
• Preloaded Frictionless Ball Screw
• MTBF > 20.000 h
• Vacuum-Compatible Versions Available for 10-⁶ hPa

• Drive-Component for Integration into Micropositioning Systems
• Flexible Choice of Travel Ranges to Several 100 mm
• Flexible Choice of Push/Pull Forces to Several 10 N
• Minimum Incremental Motion to 0.05 Micron
• Velocity to 400 mm/s
• Self-Locking

• Alternative for Standard Micrometer Drives
• Manual Travel to 18 mm
• Piezoelectric High-Resolution Travel to 25 Micron
• Sub-Nanometer Resolution
• Dynamic Operation to 10 Hz

• Travel Range 10 mm
• Resolutionto 0.025 nm Open-Loop,5 nm Closed-Loop
• Up To 50 N Force Generation and 70 N Holding Force
• Self-Locking at Rest, No Heat Generation
• Non-Magnetic and Vacuum-Compatible Working Principle
• Cleanroom Compatible

• Travel Range 20 mm
• Resolutionto 0.03 nm Open-Loop, 5 nm Closed-Loop
• Up to 800 N Holding Force
• Self-Locking at Rest
• Non-Magnetic and Vacuum-Compatible Working Principle
• Cleanroom Compatible

• 10, 25 & 50 mm Travel Ranges
• Resolution <0.1 Micron
• 2- and 5-Phase Stepper Motor
• Manual Positioning Knob
• Sub-Nanometer Resolution with Optional PZT Actuator
• >5,000 Hours MTBF

Vertical Translation Stages

• Travel Range 12.5 mm (1/2")
• Ultra-High-Resolution Encoder
• ActiveDrive™ Motor
• Compatible with Leading Industrial Motion Controllers
• Stress-Relieved Aluminum Stage Base for Highest Stability
• Zero-Backlash Recirculating Ballscrews
• Non-Contact Origin and Limit Switches
• >20,000 Hours MTBF

• 3 Nanometer Design Resolution
• 12 kg Load Capacity, High Stiffness
• <100 Nanometer Minimum Incremental Motion
• 12.5 mm (1/2") Travel Range
• ActiveDrive™ Motor
• Compatible with Leading Industrial Motion Controllers
• Non-Contact Origin and Limit Switches
• Mounting Platform for P-500 and PIMars™ Piezo- Nanopositioning Systems
• Self Locking

• Hybrid Sytem Combines Advantages of Piezoelectrics and Electromagnetic Drives
• 2 Nanometer Linear Encoder Resolution
• High Holding Forces with Minimum Power Consumption, without Counterbalancing the Load
• Active Compensation of Stick/Slip During Startup and Settling
• Active Backlash Compensation
• Excellent Velocity Control
• Millisecond Settling to Nanometer Accuracy
• Reliable Execution of Minimal Increments

• Self Locking at Rest, No Heat Generation
• Hybrid Drive: PiezoWalk® plus PICMA®
• Travel Range: 400 µm Coarse + 40 µm Fine
• 2 nm Closed-Loop Resolution
• Direct Metrology: One Single Control Loop with Capacitive Sensors
• High Push and Holding Force to 25 N
• Piezo Walking Drive w/o Wear and Tear & Outstanding Lifetime due to PICMA® Piezo Actuators

Rotation Stages & Tilt Stages

• Unlimited Travel Range
• Max. Velocity 720 °/s
• Low Profile: Only 15 mm in Height
• Self-Locking Ceramic Direct Drive: Energy Saving & High Position Stability
• Direct Metrology Linear Encoder, 40 µrad Resolution
• PILine® Direct Drive: Non-Magnetic and Vacuum-Compatible Working Principle
• Compact Combinations with Linear Stages

• Ultra-Compact Design
• Continuous Rotation
• 2.5 microradian Design Resolution
• Clear Aperture
• Velocity up to 20 degrees/second
• Preloaded Anti-Backlash Worm Drive
• Fits Directly on M-110 Micro Translation Stages
• Compatible with Leading Industrial Motion Controllers
• Non-Contact Reference Switch
• Up to 10 microradian Repeatability

• Continuous Rotation
• Ultra - High Resolution
• Velocity up to 90 deg/sec.
• Preloaded Worm Drive for Zero Backlash
• ActiveDrives™ DC-Motor, Stepper-Motor and Manual Versions
• Compatible with Leading Industrial Motion Controllers
• Direction - Sensing Origin Switch

• One- & Two-Axis Tilt Stages
• Zero Backlash
• Sub-microradian Resolution
• Manual and DC-Motor Drives
• Compatible with Leading Industrial Motion Controllers
• Optional Piezo Drives for Tracking and Scanning

Hexapod Six-Axis Micropositioning Systems

• Low Cost, Ultra-Precision Hexapod Alignment System
• Parallel Kinematics with 6 Degrees of Freedom
• 0.033 Micron Actuator Resolution
• Repeatability 0.3 Micron in Space
• No Moving Cables for Improved Reliability, Reduced Friction
• Better Dynamics, More Compact than Serial Kinematics Systems
• For Scanning and Alignment
• Cartesian Coordinate Control with Virtualized Pivot Point.
• Powerful Digital Controller with Open Source LabView™ Drivers, DLL Libraries...
• Integrated Fiber Alignment Routines

• Most-Compact Hexapod in the PI Portfolio
• Travel Ranges 40 x 40 x 13 mm, Rotation to 60 Degrees
• Load Capacity to 5 kg
• Resolution of a Single Strut 40 Nm
• Min. Incremental Motion to 200 Nm
• Repeatability up to ±0.5 µm
• Velocity to 10 mm/s

• Six Degrees of Freedom
• Vacuum Compatible Versions
• Load Capacity 10 kg
• Travel Ranges to 45 mm (linear), 25° (rotation)
• 7 Nanometer Resolution
• 300 Nanometer Min. Incremental Motion
• Repeatability ±0.5 Micron
• Very Compact Design
• Self Locking to 10 kg

• Six Degrees of Freedom
• Rapid Response
• No Moving Cables for Improved Reliability and Precision
• 10 kg Load Capacity
• Repeatability to ±2 Micron
• Actuator Resolution to 0.016 Micron
• Significantly Smaller and Stiffer than Serial-Kinematics Systems, Better Dynamics
• Vacuum-Compatible Versions
• Virtualized Pivot Point
• Sophisticated Controller Using Vector Algorithms
• 20000 h MTBF

• Six Degrees of Freedom
• Works in Any Orientation
• No Moving Cables for Improved Reliability and Precision
• 200 kg Load Capacity (Vertical)
• Heavy-Duty, Ultra-High-Resolution Bearings for 24/7 Applications
• Repeatability to ±1 Micron
• Actuator Resolution to 0.005 Micron
• Significantly Smaller and Stiffer Package than Conventional Multi-Axis Positioners
• Vacuum-Compatible Versions
• Linear and Rotary Multi-Axis Scans
• Virtualized Center of Rotation (Pivot Point)
• Sophisticated Controller Using Vector Algorithms
• 20000 h MTBF

• For Scanning and Positioning in all Six Degrees of Freedom
• 800 x 800 x 200 Micron Linear Range
• Up to 10 mad Rotational Range
• Precision Trajectory Control
• Parallel - Kinematics / Metrology for Enhanced Responsiveness / Multi-Axis Precision
• Direct Metrology with Capacitive Sensors for Highest Precision
• ID-Chip for Auto Calibration Function
• PICMA^® High - Performance Multilayer Piezo Drives

• 1 Micron Sensitivity
• 10 Micron Graduations
• Travel up to 25 mm
• Model M-626.05 with Lockable Spindle

• 10, 25 and 50 mm Travel
• Pitch 0.5 mm/Rev.
• Low-Friction Construction
• 1 Micron Manual Sensitivity
• Sub-Nanometer Resolution with Optional PZT Actuator

• 0.1 Micron Sensitivity
• 1 Micron Graduations
• Travel to 20 mm