Precision Actuators & Pushers

Precision Linear Actuators / Motorized Pushers


A precision linear actuator is a positioning device, that provides motion in 1 degree of freedom. PI manufactures a variety of precision linear actuator pushers from economical stepper-motor driven actuators to high-speed magnetic linear motor versions for automation to high-end piezo-motor actuators.

Classical motorized linear actuators with servo and stepper motors are typically combinations of a rotation-type motor and a screw-type actuator.

Lead-screws provide high forces and self locking capabilities while ball screws are used for higher speed applications with longer service life. Position feedback is available with linear encoders and motor shaft mounted rotary encoders.
Smaller motors are often equipped with gear heads to provide higher torque and resolution, however at the cost of speed.

Voice-Coil Linear Motor Actuators
Servo & Stepper Actuators
Ultrasonic  Actuators
Stick-Slip Intertia Actuators
Flexure-Guided  Actuators
Fast Voice Coil Servo & Stepper Piezo Ultrasonic Stick-Slip Piezo / Flexure

While there are many different types of precision actuators, piezoelectric actuators are the first choice when accuracy, speed, responsiveness and resolution are essential.
However, all piezo actuators and motors are not created equal.

PI currently offers 3 types of long travel piezo linear motors and several types of short travel actuators such as flexure actuators, stack actuators and bender actuators. The drive principle in piezo ceramic motors / actuators is intrinsically nonmagnetic and vacuum-compatible.

Piezo Motor Actuators
Ultrasonic Piezo Motors are characterized by very high speed of 100's of mm/sec and a very compact design.

PiezoWalk® Linear Motors achieve forces to 800 N and picometer range resolution; however they move slower and are more complex.

Stick-Slip Piezo Motors (Inertia Drives) are low cost and compact motors with forces to 10N and speed to 10 mm/sec.

For more information on the differences between piezo motors and actuators and their applications refer to the piezo motion tutorial.

Vacuum compatible motorized actuators are described this brochure.





Linear Motor / Voice Coil Actuators for Automation




V-273 High Speed Automation Actuator with Force Sensor Option

 
High-Speed Automation Actuator This OEM actuator was designed for automation applications. Its friction-free, low inertia voice coil linear motor provides high dynamics with velocities to 250mm/sec. The position is controlled precisely via an integrated linear encoder. An optional high-resolution force sensor further helps with integration into sensitive automation applications. Force and position are controlled by PI's C-413 PIMag™ Motion Controller.

  • High Speed to 250 mm/sec
  • High precision with 0.1 µm linear encoder
  • High Sensitivity with optional force sensor, 5mN
  • 20 mm Travel
  • 8 N Pushing Force
  • Resolution 0.002 µm (open-loop)
  • More than 10 million cycles lifetime
  • C-413 Motion controller for simultaneous position and force control
 
Specifications & Drawings, Request Quote | PDF Datasheet





V-900k Concept: Miniature OEM Actuator for Automation / High Speed Motion

 
Small Automation Actuator This miniaturized PIMag™ OEM actuator is equipped a magnetic voice-coil linear motor drive for excellent start /stop dynamics and high scanning rates. With a lifetime of more than 100 million cycles it can be used in high-speed automation applications. Closed and open-loop operation is possible, and the integrated 100 nanometer linear encoder provides reliable position control and repeatable accuracy. PI's C-413 motion controller features 10 kHz servo update rate.

  • 1.5mm Positioning and Scanning Range
  • Fast step-and-settle
  • Integrated linear encoder, 0.1 µm resolution
  • Wear-free flexure guiding for long lifetime
  • Maximum velocity, 250/45mm/sec (open/closed loop)
  • Very Long Life, >100 million cycles
  • C-413 Motion controller with 10 kHz Servo Udate Rate
 
Specifications & Drawings, Request Quote | PDF Datasheet






DC- Servo & Stepper-Driven Actuators & Micrometers




M-228 - M-229 Low Cost Stepper-Mike Actuators

 
Low Cost Stepper Mike Precision Actuator
  • High Precision at low Cost
  • Travel to 1"
  • Resolution to 0.05 microns
  • 10 lb Pushing Force
  • Non-Rotating Tip
  • Speed to 1.5 mm/sec
  • Integrated Limit & Reference Switches
 
Specifications & Drawings, Request Quote | PDF Datasheet




M-230 High-Precision Actuator, Closed-Loop Servo & Stepper

 
High-Resolution Closed-Loop DC-Mike Actuators
  • To 1" Travel
  • 0.05 Microns Minimum Incremental Motion
  • Non-Rotating Tip
  • Velocity to 2 mm/sec.
  • Closed-Loop DC Motors
  • Optional Stepper Motors
  • Integrated Origin & Limit Switches
  • Front Mount or Clamp Mount
  • >5,000 Hours MTB
Back to Top       Specifications & Drawings, Request Quote | PDF Datasheet




M-231 High-Resolution Servo Motor Linear Actuator

 
High Resolution Precision Actuator
  • 17 mm Travel Range
  • 0.1 Micron Minimum Incremental Motion
  • Velocity up to 2.5 mm/sec.
  • Closed-Loop DC Motor
  • Compatible with Leading Industrial Motion Controllers
  • Integrated Hall-Effect Origin and Limit Switches
  • Fits M-105 & F-110 Fiber Aligners
  • >5,000 Hours MTBF
order nowSpecifications & Drawings, Request Quote | PDF Datasheet




M-232 Compact High-Resolution, Servo Motor Actuator

 
DC-Mike Actuator
  • Folded Drive, Very Compact
  • 17 mm Travel Range
  • 100 nanometers Resolution
  • To 2.5 mm/sec Velocity
  • Closed-Loop DC Servo Motor
  • Compatible with Leading Industrial Motion Controllers
  • Integrated Limit / Origin Switches
  • Fits M-105 & F-110 Fiber Aligners
  • >5,000 Hours MTBF
online orderSpecifications & Drawings, Request Quote | PDF Datasheet




M-235 High Precision Motorized Actuator with Ballscrew / Servo and Stepper Motors

 
High Force Motorized Actuator
  • Up to 2" Travel Range
  • 100 Nanometers Minimum Incremental Motion
  • High-Speed Direct Drive Option
  • 120 N Push/Pull Force
  • 100 N Lateral Load Limit
  • Preloaded Ultra-Low-Friction Ball Screw with Non-Rotating Tip
  • Closed-Loop DC Motors and Stepper Motors
  • Compatible with Leading Industrial Motion Controllers
  • Integrated Hall-Effect Limit & Origin Switches
  • >20,000 Hours MTBF
  • Vacuum Versions
Back to Top
order       Specifications & Drawings, Request Quote | PDF Datasheet




M-238 High Force Precision Actuator, Linear Scale Option

 
Heavy Duty Motorized Actuator
  • High Load Capacity to 400 N
  • Optional 0.1 Micron Direct Metrology Linearencoder for Exceptional Precision
  • Travel Range to 50 mm
  • Minimum Incremental Motion to 0.3 Micron
  • Max. Velocity: 30 mm/s
  • Preloaded Frictionless Ball Screw
  • MTBF > 20.000 h
  • Vacuum-Compatible Versions Available for 10-6 hPa
Specifications & Drawings, Request Quote | PDF Datasheet




 

M-227 High-Resolution DC-Mike Actuators

 
DC Mike Actuators
  • 10, 25 & 50 mm Travel Ranges
  • 0.05 Micron Minimum Incremental Motion
  • Non-Rotating Tip
  • Closed-Loop DC Motor
  • Compatible with Leading Industrial Motion Controllers
  • Sub-Nanometer Resolution with Optional PZT Drive
  • >5,000 Hours
  • MTBF
Specifications & Drawings, Request Quote | PDF Datasheet




Linear Positioners / Stages / Slides

 

M-122 Miniature Linear Stage

 
Fast Translation  Stage
  • 25mm (1") Positioning Range
  • LinearEncoder provides 100nm Resolution
  • Velocity to 20 mm/sec
  • Precision Cross-Roller Bearings
  • Recirculating BallScrew Drive
Miniature Translation  StageSpecifications & Drawings, Request Quote | PDF Datasheet


 



Additional Motorized Precision Pushers / Actuators (PI miCos Line)


PI miCos specializes in high-quaity servo and stepper-motor driven
linear actuators for ambient and vacuum environments.
More information on PI miCos actuators ...






Ultrasonic Linear Piezo Motor / Actuators (Highest Speed)




 

U-264 PILine® Ultrasonic Motor Actuator for OEMs (Open-Loop, Unguided)

 
Ultrasonic Motor Precision Actuator
  • OEM Actuator for Integration into Micropositioning Systems
  • Compact, Low Profile
  • High Speed to 250 mm/second
  • Positioning ranges to 150mm
  • Self-Clamping Principle
  • Specifications & Drawings, Request Quote | PDF Datasheet




    M-272 Fast Pusher for OEM Automation Applications, Closed Loop, with Guiding System

     
  • Closed-Loop with Linear Encoder
  • Ultrasonic Ceramic Motor Drive Principle
  • Stable: Self Locking at Rest
  • Fast: 200 mm/sec
  • Force Generation up to 8 N
  • Integrated Guiding System

    Piezo Motor Actuator
    Watch Video Animation




  •  
    Back to Top Specifications & Drawings, Request Quote | PDF Datasheet






    Inertial Drive Actuators (Economical)




    N-422 Stick-Slip Linear Piezo Motor Actuator

     
    Piezo-Motor  Actuator
    • Compact Inertial Motor-Driven Actuator
    • New Patented Design, Very Quiet
    • Fast, to 5 mm/Second
    • Self-Clamping, with 2 lb Holding Force
    Back to Top PDF Datasheet | Specifications & Drawings, Request Quote |




    N-470 PiezoMike Rotary Piezo Motor Micrometer Actuator

     
    Precision Actuator Piezo Mike
    • Very Compact Inertial Piezo Motor-Drive
    • Vacuum Versions
    • Self-Clamping: Holding force >100 N
    • Pushing force 4 lbs
    • 30 nanometer step size
    • Travel range 7mm
    • No heat generation at rest
    • Non-magnetic and vacuum-compatible operating principle
    Back to Top PDF Datasheet | Specifications & Drawings, Request Quote | Vacuum Version |


    New: Additional Stick Slip Motors








    PiezoWalk Actuators (Highest Precision)




    N-381 PiezoWalk® Actuator, Manipulator, Piezo Stepper

     
    Manipulator Piezo Stepper
    • Travel Range 30 mm
    • Novel, Robust Piezo Stepping Drive, Ideal for Micro- and Nano-Manipulation
    • Integrated LinearEncoder Option for Highest Accuracy with 20 nm Resolution
    • Very High Acceleration, e.g. for Cell Penetration
    • Two Operating Modes: Continuous Stepping Mode and Continuously Variable, High-Dynamics Analog Mode for 30 pm Resolution**
    • Up to 10 N Force Generation
    • Self Locking at Rest, no Heat Generation
    • Smooth Motion, no Closed-Loop Jitter
    • Vacuum-Compatible and Non-Magnetic Versions
    Back to Top Specifications & Drawings, Request Quote PDF Datasheet




    N-310 PiezoWalk® Miniature OEM Piezo Stepping Actuator

     
    Nanopositioning Drive
    • 20 mm Standard Travel Range
    • Compact and Cost-Effective Design
    • 0.03 nm Resolution
    • To 10 N Push/Pull Force
    • Low Operating Voltage
    • Self Locking, with no Heat Dissipation, Nanometer Stability
    • Non-Magnetic and Vacuum-Compatible Working Principle
    Specifications & Drawings, Request Quote | PDF




    N-111 NEXLINE® High-End High-Force Piezo Motor Actuator, Sub-nm-Resolution

     
    NEXLINE HIgh-Resolution Actuator
    • Travel Range 10 mm
    • Resolutionto 0.025 nm Open-Loop,5 nm Closed-Loop
    • Up To 50 N Force Generation and 70 N Holding Force
    • Self-Locking at Rest, No Heat Generation
    • Non-Magnetic and Vacuum-Compatible Working Principle
    • Cleanroom Compatible
    Back to Top Specifications & Drawings, Request Quote | PDF Datasheet




    N-216 NEXLINE® High-End, Ultra-High Force Motor Actuator, Self Locking

     
    High Force Piezo Motor  Actuator
    • 20 mm Travel Range
    • Extremely High Resolution
    • High Force to 800 N Holding Force
    • Self-Locking at Rest
    • Non-Magnetic and Vacuum-Compatible Working Principle
    • Cleanroom Compatible


    Piezo Motor Actuator
    Watch Video Animation




     
    Specifications & Drawings, Request Quote | PDF Datasheet






    Flexure-Guided Actuators (Zero Friction, Zero Wear)




    P-853 PiezoMike: Piezo / Flexure Guided Micrometer Actuator

     
    Piezo Mike Micrometer
    • Combines Piezo-Flexure-Class Fine Travel
      with Manual Micrometer Long-Travel
    • Sub-Nanometer Resolution
    • Dynamic Operation to 10 Hz
    • Manual Travel to 18 mm
    • 25 Micron Piezoelectric Travel
    Micrometer ActuatorSpecifications & Drawings, Request Quote | PDF Datasheet




    P-601 High-Precision Piezo Flexure Guided /Amplified Z-Actuator to 400 Microns

     
    Piezo Move High Precision Lever Amplified Z-Actuator
    • Flexure Guidance for Frictionless, Ultra-Straight Motion
    • Open and Closed-Loop Versions
    • Travel Ranges to 400 Micron
    • Resolution to 0.2 Nanometer
    • High Dynamics and Stiffness
    • PICMA® High-Performance Piezo Actuators
    • Custom Designs: Longer Travel, Faster Response, Non-Magnetic
    • Ideal for OEM Applications
    Back to Top
    order        Specifications & Drawings, Request Quote PDF Datasheet




    P-602 High Stiffness Piezo Flexure Actuator. Travel to 1000 Microns

     
    Piezo Move High Precision Actuator
    • Frictionless Flexure Guides for Straight Motion
    • Closed-Loop Verion Available
    • Integrated Mechanical Amplifier, up to 1000 Microns Motion Range
    • Forces to 85 Lbs, High Dynamics and Stiffness
    • Very Stiff Design
    • Ceramic Insulated Piezo Actuators for Excellent Lifetime
    • Custom Designs: Longer Travel, Faster Response, Non-Magnetic
    • OEM-Applications in Adaptronics, Biotechnology or Microfluidics


    Piezo Motor Actuator
    Watch Video Animation


    Back to Top
    SearchParametric Search       Specifications & Drawings, Request Quote | PDF Datasheet




    P-603 Piezo Flexure Actuator: Low-Cost, Travel to 500 Microns

     
    Piezo Move High Precision Lever Amplified with Flexure Guiding
    • Frictionless, High-Precision Flexure Guiding System
    • Travel Ranges to 500 µm
    • Cost-Effective Design
    • Outstanding Lifetime Due to PICMA® Piezo Actuators
    • Available with Integrated Position Sensor
    • Ideal OEM Actuators for Precision Motion Control in Optics, Medical, Biotech and Microfluidics Applications
    • Custom Designs: Longer Travel, Faster Response, Non-Magnetic
    Back to Top
    order        Specifications & Drawings, Request Quote | PDF Datasheet




    Piezo Stack Actuators with Casing, Closed-Loop Actuators


     

    P-840 · P-841 Preloaded Closed-Loop Piezo Actuators (LVPZT)

     
    Preloaded Open & Closed Loop Piezo Translators
    • Displacement to 90 Micron
    • Pushing Forces to 1000 N
    • Preloaded for Pulling Forces to 50 N
    • Sub-Millisecond Response
    • Sub-Nanometer Resolution
    • Options: Ball Tip, Vacuum Versions
    Linear Piezo StackSpecifications & Drawings, Request Quote | PDF Datasheet




    Piezo Stack Actuators without Casing


     

    P-882, P-885, P-888 PICMA® High-Performance Monolithic Multilayer Piezo Actuators (LVPZT)

     
    PICMA High-Performance Monolithic Multilayer Piezo Actuators
    • Award-Winning Ceramic-Encapsulation PZT Technology
    • Up to 100 Billion Cycles Life Tested by NASA / JPL for Space Missions
    • Low Operating Voltage
    • Superior Lifetime Even Under Extreme Conditions
    • Very Large Operating-Temperature Range
    • High Humidity Resistance
    • Excellent Temperature Stability
    • High Stiffness
    • UHV Compatible to 10-9 hPa
    • Sub-Millisecond Response & Sub-Nanometer Resolution
    Back to Top
    Place order       Specifications & Drawings, Request Quote | PDF Datasheet




    Additional Piezo Stack Actuator Models: Click here





    M-653 Differential Micrometer Drives

     
    Differential Micrometer Drives
    • 0.1 Micron Sensitivity
    • 1 Micron Graduations
    • Travel to 20 mm
    dc motor actuatorSpecifications & Drawings, Request Quote PDF Datasheet






    Catalogs and Brochures for More Information...
    CatalogsMini Linear Stages CatalogPiezo Motor Drives
    More Data...

    Piezo Linear Motor IntroductionPiezo Motor Introduction
    PILine® Ultrasonic Piezomotor
        Working Principle

    NEXLINE Piezo WalkNEXLINE® Piezo-Walk®
        Working Principle


    US Head Office


    PI USA complies with the US laws
    for export controlled technologies.

    PI (Physik Instrumente) LP
    16 Albert St.
    Auburn, MA 01501
    Phone 508-832-3456
    Fax 508-832-0506
    E-Mail Info Request

    US West Coast Office
    PI (Physik Instrumente) L.P.
    5420 Trabuco Road Suite 100
    Irvine, CA 92620-5743
    Phone 949-679-9191
    Fax 949-679-9292
    E-Mail Info Request

    Direct Offices


    Distributors


     Social Media





    International HQ


    Physik Instrumente (PI)
    GmbH & Co. KG

    Auf der Römerstrasse 1
    76228 Karlsruhe/Palmbach, Germany
    Phone +49 721 4846-0
    E-Mail  info(at)pi.ws


    Ask a PI Engineer     PI - Moving the NanoWorld.   ISO 9001-2008 certified.
    © 1996-2014 PI (Physik Instrumente) LP All rights reserved.    Specifications subject to change without notice.