Linear Stage, Precision Positioning Systems / Motorized Positioners by PI USA
precision stage overview

Linear Stage - Precision Positioners Overview


PI offers a great variety of linear stage positioning systems for micro and nano precsion requirements.

Nanopositioning linear stages can be based on three different principles: piezo drives with frictionless flexure linear guides; magnetic linear motors with air bearings; and "bearing free" - guided by magnetic levitation. PI offers all three solutions.

Micropositioning motorized linear stages are based on rotary stepper and servo motors or linear motors, guided by cross roller and linear bearings.

Several types of drives are available: Rotary stepper motors, rotary servo motors (brushless and brushed), servo motors with gearhead for higher torque/resolution, magnetic linear motors and piezo linear motors. With piezo linear motors, drive screws, gears and coupling elements are not required, reducing size and complexity while increasing reliability at the same time. Piezo motors are self-locking at rest providing excellent long term stability.

Position feedback is provided by linear encoders or motor mounted rotary encoders.

Benefits of working with PI: Access to the broadest and deepest portfolio of precision motion technologies in the world; engineers who understand your applications and match it to the appropriate motion technology, be it a stepper motor driven lead screw system or a compact piezo linear motor drive.

PI's selection of Compact Linear Stages and rotary positioners provides high precision motion in a very small package.


  
Motorized Stage Selection

Low Cost Compact High Precision Linear Motor

Air Bearing XY Vertical Rotary




Piezo-Flexure Linear Stages
(Short Travel, High Dynamics)
Motorized Linear Stages
(Long Travel, Lower Dynamics)


P-752 Piezo Linear Stage M-122 Compact Motorized Stage
Ultra Compact Open Loop PZT Nano-Positioning Stage Miniature Linear Translation Stage with Integrated Optical  Encoder
  • High Performance Nano-Positioning Stage
  • 30 Ám Travel, Millisecond Response
  • 0.1 nm Resolution
  • Nanometer Precise Trajectory Control
  • High-Performance Multilayer Piezo Linear Drives

Specifications/Order Info | PDF
  • 25mm Linear Positioning Range, 0.1 Ám Resolution
  • Linear Encoder for Higher Accuracy & Repeatability
  • 20 mm/sec Speed
  • Precision Cross-Roller Bearings & Low-Friction Ball Screw Drives for Long Lifetimes

| PDF




P-712 Linear Scanner M-110 Compact Motorized Linear Positioner
Compact OEM PZT Positioner High Res Translation Stage Ballscrew Drive
  • 40 Ám Travel
  • 0.2 Nanometers Resolution
  • Fast: 5 Milliseconds Settling Time
  • 30Ám Travel
  • Compact Design 40x40x6 mm
  • Long Life Piezo Actuator Drives

Specifications/Order Info | PDF
  • Affordable Precision
  • Resolution from 50 Nanometers
  • Choice of Travel: 5mm, 15mm & 25 mm
  • Choice of Servo & Stepper Motors
  • Choice of Leadscrew and Ball Screw Drives
  • Vacuum-Option

Specifications/Order Info | PDF




PIHera Linear Vertical Positioner M-126 Motorized Positioning Stage for Micropositioning
PIHera  Z Stage  Stages with cross roller Bearings
  • Up to 400 Ám Z-Travel
  • Compact & Low Profile
  • Better than 1 nm Resolution
  • Vacuum-Option
  • Zero-Friction Guiding System
  • X, XY, Z & XYZ Combinations

Specifications/Order Info | PDF
  • Choice of Stepper & Servo-Motor
  • Precision Cross Roller Bearings
  • Motorized Positioning Range: 25mm, Resolution better than 0.1 Micrometer
  • Multiaxis Combinations

Specifications/Order Info | PDF




PInano® Z-Nano-Positioner for Slide Scanning M-501 Motorized Micro-Positioning Elevator-Stage
PInanoZ Slide Scanner Micro-Positioning Stage
  • 200 Ám Travel, 5 Millisec Response
  • Precision Nanopositioning Z-Scanner for Microscope Slides
  • 1 Nanometer Resolution
  • Frictionless Guiding System

Specifications/Order Info | PDF
  • Sub-Micron Precision Elevator Stage
  • 1/2" Vertical Travel
  • High Power DC Motor & Zero-Backlash Ballscrews
  • High-Resolution Optical Encoder

Specifications/Order Info | PDF




P-737 Z-Nanopositioner for Sample Positioning / Scanning M-451 High-Load Motorized Elevator Z-Stage
Z-Axis Microscopy Piezo Stage for High-Resolution Sample Positioning and Scanning Vertical Positioner for Micropositioning
  • Fast Z-Motion (Milliseconds), Travel to 500 Microns
  • Nanometer Resolution
  • Large Aperture

Specifications/Order Info | PDF
  • 1/2" Motorized Positioning Range
  • High Stiffness, Self Locking Elevator Design for up to 12 kg Load
  • Design Resolution 0.003 Microns
  • Minimum Incremental Motion better than 0.1 Micron
  • Compatible with P-500 Series and PIMars™ Nanopositioners

Specifications/Order Info | PDF




PIHera XY Nano-Positioner M-714 Linear Stage with Hybrid Piezo & Servo Motor Drive
PIHera XY  Stage M-714 Hybrid  Stage
  • To 1.8 mm XY Travel
  • Nanometer Resolution
  • Zero-Friction Guiding System
  • High-Performance Piezo Actuator Drives
  • Multiaxis Combinations
  • Vacuum-Option

Specifications/Order Info | PDF
  • Hybrid Stage Offers Best of Both Worlds: Piezo & Motor
  • Reliable Execution of Extremely Small Steps
  • Linear Encoder with 2 Nanometers Resolution
  • Quick Settling to Nanometer Stability
  • Very Smooth Velocity Control
  • Active Backlash Compensation
  • Active Stick/Slip Compensation
  • High Holding Force

Specifications/Order Info | PDF




NanoCube® XYZ Nano-Positioning Stage M-403/M-414 Cost Efficient Motorized Stage
NanoCube XYZ Piezo Nanopositioner High Resolution  Stepper Stage and DC Motor Drives
  • Compact Multiaxis Motion: 100 Microns in XYZ
  • 1 Nanometer Resolution
  • High Speed: Ideal for Photonics Alignment & Packaging
  • Choice of Closed- & Open-Loop
  • Frictionless Flexure-Type Guides

Specifications/Order Info | PDF
  • High Performance at Low Cost
  • Choice of Motorized Positioning Ranges: 25mm to 300 mm
  • Design Resolution to 0.017Ám
  • Minimum Incremental Linear Motion to 0.1 Micron
  • Choice of Stepper and Servo Motors
  • Choice of Preloaded Leadscrews or Ball Screws
  • Choice of Base Widths: 80mm / 120mm

Specifications/Order Info | PDF




Six-Axis, Piezo-Stage M-415 High-Precision Motorized Linear Stage
Six-Axis Scanning Stage with Parallel Metrology High Accuracy  Stage
  • For Scanning and Positioning in all Six Degrees of Freedom
  • Linear Range 800x800x200 Microns
  • Rotational Range to 10mrad
  • Zero Friction Guides
  • Capacitive Direct Metrology for Highest Accuracy
  • High - Performance Piezo Drives

Specifications/Order Info | PDF
  • Motorized Positioning Range to 150 mm
  • Cross Roller Bearings
  • Choice of Servo and Stepper Motors
  • Knob for Manual Position Adjustment

Specifications/Order Info | PDF




P-713 Compact XY Piezo Scanner M-605 Compact Motorized Linear Stage for Micropositioning
Low Profile OEM XY Piezo  Positioning Stage Scanners for Imaging Applications Ultra Compact High Accuracy  Stages
  • Ideal Imaging & Pixel Substepping
  • Compact and Low Profile
  • Linear Travel: 15x15Ám

Specifications/Order Info | PDF
  • Zero-Backlash Ballscrew and Linear-Scale for Higher Precision
  • Motorized Positioning Range to 50mm
  • Compact, yet high Speed to 50mm/sec

Specifications/Order Info | PDF




P-733 Direct Drive XY / XYZ Stage M-505 Low-Profile Motorized Linear Stage
Ultra High-Speed XYZ Scanning Microscopy Stages with Parallel Metrology Low Profile  Positioner with Ballscrew Drives
  • Resolution to 0.1 Nanometer
  • Very Fast with Direct Drive
  • Resonant Frequency >2kHz
  • Frictionless Flexure-Type Guides
  • Long Life Piezo Actuataors
  • Capacitive Feedback for Higheer Linearity
  • Vacuum Option

Specifications/Order Info | PDF
  • Choice of Motorized Positioning Ranges 2, 4 and 6 inches
  • Zero-Backlash Ballscrew
  • Up to 50 mm/sec
  • High Load to 100 kg

Specifications/Order Info | PDF




P-733 XY Piezo Nano-Positioning Stage M-5x1 High-Load Linear Micro-Positioning Stage
XY Piezo Nanopositioning  Stages High Load  Stage for Micropositioning
  • Positioning Range 100x100 Microns in XY
  • Frictionless Flexure-Type Guides
  • Resolution <0.3 Nanometer
  • Capacitive Feedback
  • UHV Vacuum Option
  • High-Performance Piezo Drives

Specifications/Order Info | PDF
  • Motorized Positioning Range 4", 8" and 12"
  • Fast: Speed to 125 mm/sec
  • Optical Linear Encoder
  • Zero-Backlash Ballscrew
  • High Load Capacity 100 kg

Specifications/Order Info | PDF




P-527 Multi-Axis, Piezo Linear Stage Hybrid Nanopositioning Stage
Multi-Axis Piezo  Stage Voice Coil Scanning  Stage
  • Choice of XY , XYZ and XY-Rotation
  • Frictionless Flexure Guides
  • Choice of 100Ám and 200Ám Positioning Range
  • High-Performance Piezo Actuators

Specifications/Order Info | PDF
  • Hybrid Positioning Drive Combines Best of Piezo & Servomotor Worlds
  • Reliable Execution of Nanometer Size Steps
  • Encoder with 2 Nanometer Resolution
  • Long Travel Range: 100 mm, 125 mm/sec Speed
  • Quick Settling to Nanometer Stability
  • Very Smooth Velocity Control
  • Active Backlash Compensation
  • Active Stick/Slip Compensation

Specifications/Order Info | PDF




P-615 NanoCube® XYZ Piezo Stage M-663 Mini Piezo Motor Translation Stage
NanoCube XYZ Piezo  Stage NanoCube XYZ Piezo  Stage
  • XYZ Positioning Range to 350Ám
  • Precision Flexure Guides
  • High-Performance Piezo Actuators

Specifications/Order Info | PDF
  • Smallest Translation Stage with Closed-Loop Motor Drive and Encoder
  • 20 mm Travel Range
  • Velocity up to 500 mm/s
  • Accelerations up to 20 g
  • Resolution to 0.1 Micron
  • Integrated Direct-Metrology Encoder
  • AutoLock Feature
  • XY Combinations Available
  • 20,000 h MTBF
  • Vacuum Versions Available s with Closed-Loop Ultrasonic Piezo Motors

Specifications/Order Info | PDF




P-562 PIMars™ XYZ Piezo Linear Stage M-664 Mini Piezo Motor Linear Stage
PIMars XYZ Piezo  Positioning Stage Family PIMars XYZ Piezo  Positioning Stage Family
  • To 300Ám XYZ- Positioning Range and 6 Axis Version Available
  • Capacitive Feedback for Highest Precision
  • UHV Option for 10-9 hPa
  • Long Life Piezo Actuators

Specifications/Order Info | PDF
  • Travel Range 25 mm
  • Max. Velocity 400 mm/s
  • Ultra-Low Profile, 15 mm
  • Direct Metrology Encoder with 0.1 Ám Resolution
  • High Guiding Accuracy with Crossed Roller Bearings
  • Compact XY Combinations
  • Piezo Motor with 6 N Drive Force
  • Self Locking at Rest

Specifications/Order Info | PDF




PInano® XYZ Piezo Positioning Stage for Microscopes M-683 Precision Piezo Motor Translation Stage
Scanning Microscope  Stage Scanning Microscopy  Stages with Parallel Metrology
  • 200Ám XYZ Positioning Range, High Speed Direct Drive Version Available
  • Choice of Position Feedback Sensors (cost / performance)
  • Long Life Piezo Actuators
  • Low Cost & High Performance

Description & Specs
| Microscope Stage Catalog | PDF
  • Max. Velocity 350 mm/s
  • Low Profile: Only 21 mm Height
  • Compact XY Combination Possible
  • Piezo Motor with 6 N Force Generation
  • Direct Metrology Encoder, 0.1 Ám Resolution
  • 50 mm Travel Ranges
  • Excellent Guiding Accuracy Through Crossed Roller Bearings
  • Self-Locking at Rest

Specifications/Order Info | PDF




New Motorized Stage Product line

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Air Bearing Linear & Rotary Stage Product Line





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