PI miCos launches Precision XY Linear Translation Stage for Metrology Applications

Precision XY Linear Translation Stage for Metrology
by PI miCos



PI micos precision positioning

Back to News Overview
PI miCos Precision Positioners Product Line
PI miCos High Vacuum Positioners


Auburn, MA, March 2013 - the PI miCos MCS XY precision linear translation stage was designed for industrial metrology applications such as surface metrology, materials research, topographical measurements in semiconductor test & inspection, flat-panel manufacturing as well as optical inspection of precision machined parts.

For use in the above mentioned fields, extreme straightness of motion and high dynamics are essential. During the development PI miCos focused on combining industrial robustness with very high accuracy and precision as well as a high load bearing capacity. The positioning system can handle loads to 45 lbs and still provide resolution as high as 5 nanometers and repeatability of 0.2 µm thanks to its novel PIOne interferometric linear encoder. Even 1 nm resolution is feasible with reduced maximum speed.

The XY stage provides 4" travel range in two orthogonal axes and achieves ± 2 µm straightness and flatness of motion and yaw of only ± 20 µrad and pitch of ± 40 µrad.

Several motor options are available. For applications where closed-loop operation is not required, open-loop stepper motors are offered. Several closed-loop versions are available for higher demands: stepper motors, DC servo motors and linear motors.

With the compact SMC Hydra motion controller from PI miCos, MCS stages achieve velocity ranges from 1 µm/second to 200 mm/second.

The MCS XY precision positioning stage can be combined with rotational axes and goniometric axes as well.

Drawings and Specifications

Back to News Overview



US Head Office


PI USA complies with the US laws
for export controlled technologies.

PI (Physik Instrumente) LP
16 Albert St.
Auburn, MA 01501
Phone 508-832-3456
Fax 508-832-0506
E-Mail Info Request

US West Coast Offices
San Francisco Area
1 Harbor Drive, Suite 108
Sausalito, CA 94965
Phone 408-533-0973
Fax 949-679-9292
E-Mail Info Request

Los Angeles Area
5420 Trabuco Road, Suite 100
Irvine, CA 92620-5743
Phone 949-679-9191
Fax 949-679-9292
E-Mail Info Request

Direct Offices


Distributors


 Social Media






Sign up for PI newsletters Sign up for PI
newsletters

International HQ


Physik Instrumente (PI)
GmbH & Co. KG

Auf der Römerstrasse 1
76228 Karlsruhe/Palmbach, Germany
Phone +49 721 4846-0
E-Mail  info(at)pi.ws


Ask a PI Engineer     PI - MOTION | POSITIONING.   ISO 9001-2008 certified.
© 1996-2017 PI (Physik Instrumente) LP All rights reserved.  Specifications subject to change without notice.