Tag: X-Ray Optics

Surface Slope Metrology: High Precision Tilt Stage Achieves 30nrad Absolute Accuracy

A recent paper shows significant advances in the accuracy of long trace profilers, auto-collimator based deflectometers, and other surface metrology instrumentation. Scientists at the ALS X-Ray Optics Laboratory, HZB/BESSY-II and PTB devised a new universal calibration method for deflectometers.  One key component in the system is a high accuracy, piezo-motor-driven flexure tilt stage developed in […]

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About PI

PI (Physik Instrumente) is a leading manufacturer of precision motion control equipment, piezo motors, air bearing stages and hexapod parallel-kinematics for semiconductor applications, photonics, bio-nano-technology and medical engineering. PI has been developing and manufacturing standard & custom precision products with piezoceramic and electromagnetic drives for 4 decades. The company has been ISO 9001 certified since 1994 and provides innovative, high-quality solutions for OEM and research. PI is present worldwide with fifteen subsidiaries, R&D / engineering on 3 continents and total staff of more than 1,000.

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