Piezo Flexure Stages and Piezo Shear Actuators in Ion Conductance Microscopy
control with nanometer precision. P-621.2CL compact piezo nanopositioning and scanning stage And yet another recently reported use of P-621.2C piezo stages and high-speed P-753.21C actuators for positioning [...] square area of 80 micrometers. The system consists of a compact P-611 NanoCube XYZ piezo nanopositioning stage and an additional fast P-111.05, high-speed piezo shear actuator, providing 5µm lateral motion [...] Japan. Here, precise XY / Z position control of the probe was achieved with a combination of the P-621.2CL and P-621.ZCL piezoelectric translation stages. The motion range of the stages is 100µm / axis and