Nanopositioning Metrology, Gödel, and Bootstraps
Nanopositioning Metrology, Gödel, and Bootstraps Why External Metrology Matters in Nanopositioning More than 80 years ago, a discovery by Austrian Kurt Gödel put an end to the dream mathematicians had [...] position resolution of a closed-loop positioning system requires an independent sensor (of higher accuracy). In the nanopositioning world, the most credible results come from a standards-traceable instrument [...] and uses its internal sensor to infer its positional resolution (from the frequency spectrum), instead of measuring the actual stage position with an independent external sensor. This method violates the