PIOne Interferometric Position Sensors for Reference Class Nanopositioning Stages An In-house Development for Picometer Resolution over Large Travel Ranges In the traditional piezo nanopositioning world, motion ranges are limited to a few 100 microns and

bearing stages, linear motor stages and magnetic levitation stages; devices featuring the highest dynamics and precision are piezo-driven, flexure guided and equipped with direct metrology position feedback, such as capacitive sensors. A miniature nanopositioning

Sensor Influence on the Precision of Piezo Positioning Stages The choice of feedback sensor is one of the key performance factors of a piezo positioning stage. Below is a comparison between the two most commonly used sensors. When the absolute positioning

Sensor Influence on the Precision of Piezo Positioning Stages PIOne Interferometric Position Sensors for Reference Class Nanopositioning Stages

Nanopositioning Metrology, Gödel, and Bootstraps Why External Metrology Matters in Nanopositioning More than 80 years ago, a discovery by Austrian Kurt Gödel put an end to the dream mathematicians had pursued for centuries: a final unifying “Theory of Everything

Advances in Piezo Nanopositioning Controllers – Digital vs. Analog Digital piezo nanopositioning controllers have a reputation for being expensive and only cost efficient in high-end applications. A recent new design approach has changed this situation, making

and in production with applications including materials research, nano/bio-technology life sciences, and semiconductor inspection. High spatial resolution requires extreme precision for positioning both the measuring tip and the sample. Piezo-flexure scanned nanopositioning stages are well suited for

slower performance Structural resonances refer to the recoil and ringing that occur in loads and adjacent componentry when a nanopositioning stage is actuated rapidly. Since these are unobservable by the stage's internal position sensors, no combination of servo parameters can eliminate them without

PIOne Interferometric Position Sensors for Reference Class Nanopositioning Stages Nanopositioning Metrology, Gödel, and Bootstraps

segmented piezo tubes, but higher accuracy and linearity can be achieved when flexure guideds are used to guide the motion and high resolution sensors are integrated for exact position feedback. P-616, closed loop XYZ piezo flexure nanopositioning stage , 100µm travel. The stage