Pumping Tiniest Fluid Volumes Quickly and Precisely
Disk-shaped piezo actuators can be mounted directly onto the diaphragm to deflect it. Larger strokes or forces can be achieved if a diaphragm or a piston is coupled directly to a piezoelectric actuator [...] necessary to achieve high flow rates. A microdiaphragm pump comprises a valve unit and the pump diaphragm, which in conjunction with the piezoelectric actuator forms the pump drive. The dispensing quantities [...] closing valves. Here, the piezo product range is from simple piezo elements or bending actuators for diaphragm valves, to preloaded piezo stack actuators for large dynamics and forces, to piezo levers, which