Terminology for Accuracy Tests of High-Performance Rotary Stages
for Accuracy Tests of High-Performance Rotary Stages Motivation In this post, we present terminology related to the test and metrology of highly accurate rotary stages (spindles) commonly used in the precision [...] is less than 1um on average. In general, the performance of a rotary stage depends on the bearing type and diameter. Larger diameter stages provide better performance than smaller units, air bearings provide [...] regarding the repeatability of eccentricity, it is essential to provide contextual information about rotary stage tests. By doing so, we can gain a deeper understanding of the value associated with eccentricity