6-Axis Parallel Kinematics for UHV Alignment and Active Vibration Cancellation for Semiconductor Applications
ns in 6D precision positioning applications in medium and ultrahigh vacuum, among them Stewart Gough motion platforms and a combination of planar and tripod systems. In addition to positioning and alignment [...] kinematics positioning systems are available for high vacuum and high accuracy applications. Use of vacuum compatible material, drives, and sensors was discussed. With linear guided hexapod systems, the im [...] well proven for high-vacuum applications. Four 4-finger actuator-double-modules are combined in one drive section. In order to prevent any unwanted deformation, the actuators are placed in a pre-loaded