Image Stabilization / Resolution Enhancement with Fast Piezo Scanners
Reliability: Dynamic test series with PICMA® piezo actuators. Total number of cycles 4.0 x 109 cycles; 116Hz sinusoidal control (1.0×107 cycles per day), 100V unipolar operating voltage, 15MPa preloading. Control [...] custom designs are available for easy integration. Settling behavior of a PILine® ultrasonic-motor M-663 linear stage, 100μm step. A stable position to within 0.1μm can be reached in only 10msec. Learn