N-765 Precision Z stage

NEXACT® Piezo Stepping Drive with Subnanometer Encoder Resolution

N-765 Precision Z stage
Product Description Specifications Downloads Quote / Order
  • Direct measurement with PIOne incremental encoder, 0.5 nm resolution
  • Min. incremental motion 1 nm
  • Travel range 6.5 mm
  • Load capacity to 25 N
  • Can be mounted directly onto an N-565 linear positioner

NEXACT® reference-class linear stage

Linear stage with NEXACT® PiezoWalk® drives allow high-precision positioning in the nanometer range over long travel ranges. They are equipped with direct-measuring linear encoders and crossed roller bearings for the highest accuracy.

PiezoWalk® technology: High resolution and low wear

The PiezoWalk® technology combines the technological advantages of piezo actuators with those of piezomotors. PiezoWalk® walking drives offer not only subnanometer resolution, high forces, and high stiffness but allow theoretically unlimited travel ranges. In contrast to other piezo-motorized drive principles, PiezoWalk® walking drives are not subject to sliding friction effects. They are based on stiction contacts of several piezo actuators that step along a runner. At rest, PiezoWalk® walking drives are self-locking, consume no energy, and do not generate heat.

Direct position measuring with PIOne linear encoder

The high-resolution PIOne encoder was developed by PI and, with corresponding processing of the measured value, allows a position resolution of much less than one nanometer. In addition, due to the short signal period and the high quality of the signals, the linearity error of PIOne encoders is less than 1 %. PIOne encoders support direction sensing when evaluating a reference signal.

Crossed roller guide

With crossed roller guides, the point contact of the balls in ball guides is replaced by line contact of the hardened rollers. Consequently, they are considerably stiffer and need less preload, which reduces friction and allows smoother running. Crossed roller guides are also distinguished by high guiding accuracy and load capacity. Force-guided rolling element cages prevent cage creep.

Fields of application

Sample manipulation, sample positioning, optics or mechanical components with high precision and stability, precision mechanics in the semiconductor industry, micromanipulation, microscopy, automation, applications in confined spaces

Specifications

Datasheet N-765

Version / Date
2018-11-05
Version / Date
2018-11-05
Version / Date
2018-11-05
Document language
pdf - 737 KB
pdf - 745 KB
pdf - 833 KB

Downloads

Datasheet

Datasheet N-765

Version / Date
2018-11-05
Version / Date
2018-11-05
Version / Date
2018-11-05
Document language
pdf - 737 KB
pdf - 745 KB
pdf - 833 KB

Documentation

Short Instructions MP137EK

N-524, N-565, N-765 NEXACT® Stages
Version / Date
2015-10-09
pdf - 803 KB

User Manual MP130

N-765 NEXACT® Stage
Version / Date
2016-08-10
Version / Date
2016-08-10
Document language
pdf - 1 MB
pdf - 2 MB

3-D Models

N-765.060 3-D model

Quote / Order

Ask for a free quote on quantities required, prices, and lead times or describe your desired modification. All products available online can be ordered directly.

N-765.060
Precision Z stage, 6.5 mm travel range, PIOne linear encoder, 0.5 nm resolution, 25 N push/pull force, dimensions 65 × 110 × 56 mm (W × L × H), NEXACT® piezoelectric walking drive

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