- Low profile for easy integration: 16.5 mm
- Aperture 80 mm × 80 mm
- Travel range to 200 µm × 200 µm
- Parallel kinematics for faster response times and higher multi-axis accuracy
- High dynamics direct-drive version
- Sensor technology: Inexpensive strain gauge sensors or capacitive sensors for higher performance
- Outstanding lifetime due to PICMA® piezo actuators
- Combination possible with microscope stages for longer travel ranges
- Scanning microscopy
- High-throughput microscopy
- Super-resolution microscopy
- Mask/wafer positioning
- Measuring technology
Outstanding lifetime thanks to PICMA® piezo actuators
The patented PICMA® piezo actuators are all-ceramic insulated. This protects them against humidity and failure resulting from an increase in leakage current. PICMA® actuators offer an up to ten times longer lifetime than conventional polymer-insulated actuators. 100 billion cycles without a single failure are proven.
Subnanometer resolution with capacitive sensors
Capacitive sensors measure with subnanometer resolution without contacting. They guarantee excellent linearity of motion, long-term stability, and a bandwidth in the kHz range.
High guiding accuracy due to zero-play flexure guides
Flexure guides are free of maintenance, friction, and wear, and do not require lubrication. Their stiffness allows high load capacity and they are insensitive to shock and vibration. They are 100 % vacuum compatible and work in a wide temperature range.
Automatic configuration and fast component exchange
Mechanics and controllers can be combined as required and exchanged quickly. All servo and linearization parameters are stored in the ID chip of the D-sub connector of the mechanics. The autocalibration function of the digital controllers uses this data each time the controller is switched on.
Maximum accuracy due to direct position measuring
Motion is measured directly at the motion platform without any influence from the drive or guide elements. This allows optimum repeatability, outstanding stability, and stiff, fast-responding control.
High dynamics multi-axis operation due to parallel kinematics
In a parallel-kinematic multi-axis system, all actuators act on a common platform. The minimum mass inertia and the identical design of all axes allow fast, dynamic, and nevertheless precision motion.
Datasheet P-541.2 • P-542.2
Product Change Notification Piezo Actuator Driven Products
Datasheet P-541.2 • P-542.2
Short Instructions PZ240
Piezo Positioning Systems: P-5xx / P-6xx / P-7xx
User Manual PZ244
P-541.2 3-D model
P-542.2 3-D model
Microscope Stage Configurator
Sample Stages and Holders for Inverted Microscopes
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