Why Use Piezo Flexure Stages and Piezo Motion Technologies?

  • Several Decades of Experience in Designing Flexure NanoPositioners
  • Hundreds of different Standard and Custom Models
  • High Quality Piezo Ceramics from PI's own Piezo Ceramics Factory
  • Largest Variety of Controllers (Digital, Analog, High Speed, High Power, OEM....)
  • State-of-the-Art Metrology Lab: Thermical, Acoustical, Seismical Isolation
  • Own Capacitance Sensor Design & Manufacturing
  • Active Trajectory Control
  • Advanced Control Algorithms for Highest Throughput

PI provides the broadest and deepest portfolio of precision motion technologies and offers the widest selection of single and multi-axis Piezo Flexure NanoPositioners & Scanners world-wide. We started our first line of NanoPositiong stages with nanometer precision trajectory control in the 1980's and have designed hundreds of different standard and custom models since then. 

PI Piezo Flexure Stages and NanoPositioners offer the highest precision of all nanopositioning systems on the market. Key features are active and passive precision trajectory control (sub-nanometer, sub-µrad straightness & flatness), sub-nanometer resolution and stability, 1 to 6 degrees of freedom, ultra-responsive mechanics and control electronics for enhanced throughput.

PI Flexure NanoPositioners are superior to traditional positioners (ball bearings, crossed roller bearings, etc.) in terms of resolution, accuracy, straightness and flatness. Due to the inherent friction, traditional positioners are limited to applications requiring repeatability on the order of 0.5 to 0.1 µm, while PI Flexure NanoPositioners can easily achieve resolution and repeatability in the nano- meter realm and below.

Application examples of PI Piezo Flexure NanoPositioners are:

  • Metrology
  • Disk Drive Testing
  • Nanopositioning
  • Semiconductor Test Equipment
  • Lithography
  • Wafer Steppers
  • Mask Alignment
  • Precision Machining
    (Out-Of-Roundness Turning, Boring, Grinding)
  • Scanning Interferometry
  • Surface Structure Analysis
  • Scanning Microscopy
  • Autofocus Systems
  • Bio-Technology