Of particular interest is the introduction of the driving force. Forces with a single degree of freedom that are absolutely parallel to the plane of motion are crucial as just tiny errors in angle lead to trajectory tilting.
PI’s phenomenal experience in constructing nanomechanical parts was mobilized to meet this difficult challenge. We have developed over a hundred different nanopositioning systems down the past 20 years. Our performance-proven expertise and resources were pooled together to design and develop the device depicted in Fig. 12, i.e., the P-731K022 nanopositioning stage. By using capacitive sensors, the unit provides sub-nanometric resolved travel, stability through a 100 x 100 µm travel range and flatness in the nanometric region (Fig. 13).