Vaccum / UHV Stages - Linear & Rotary Motorized Positioners for Vacuum, Wide Temperature, Optomech, by PI USA
vacuum compatible Linear rotary positioners

Vacuum Precision Positioning Stages & Actuators

Learn more about Standard Optomech Stages (atmospheric)

Vacuum Optomechanical Positioning Systems:
Things to Consider

View the 2015 Beamline Instrumentation Catalog
View the Vacuum / UHV Compatible Motorized Optomech Positioners Catalog (180 pages)

PI miCos has extensive experience in the design and manufacturing of vacuum and high vacuum compatible precision optomechanical positioning equipment for low temperature and wide temperature ranges. We provide translation stages, vertical linear stages, rotation stages, XY stages and complex multi-axis positioning systems in vacuum spec.

Vacuum applications are increasingly more important for many fields of research and industrial manufacturing. PI miCos supplies positioning components and systems for vacuum levels from 10-3 mbar to 10-9 mbar (see conversion to Torr below). When we design standard products for ambient, we already plan for vacuum adaptability, which is why we can offer a broad range of vacuum compatible systems. In addition to components, PI miCos also offers complete turnkey system solutions for vacuum.

UHV Nano Tomograhpy

Wide Temperature Range / Low Temperature / Cryogenic Applications


PI miCos not only specializes in vacuum compatible optomech positioning equipment but also stages that can be operated in a wide temperature range such as -40C° to +150C°. On the other end of the scale, stages for low temperature applications down to cryogenic conditions (77K) are also available.

When we look at the required vacuum modifications / preparations we start at the application. For the coating of optics different vacuum levels are necessary as for X-ray crystallography for example. The absolute vacuum pressure is often less critical than the partial pressure of hydrocarbons.

The use of plastics in encoders, cables, limit switches or lubricants with the wrong specifications can result in the excessive contamination of surfaces with hydrocarbons. UV laser light can break down hydrocarbons and destroy optics. Experience in the choosing the right of materials and handling processes is critical for delivering a solution that will satisfy the requirements of the individual application.

Vacuum Compatible Piezo Positioning Systems PDF Datasheet
View the Vacuum / UHV Compatible Motorized Optomech Positioners Catalog (180 pages)

Preparation
Many PI miCos stages can be prepared for FV, HV and ultra high vacuum. For UHV all components are made for 10-9 mbar. Special UHV motors, grease, cables, and coatings are used.

Vacuum Definition / Units
Vacuum is defined as pressure lower than nomal atmospherical air pressure. PI miCos specifies vacuum products in mbar (millibar).
1 mbar ~ 0.75 Torr.
1 mbar = 100 Pa

Considerations for Vacuum Operation
When stages are used in vacuum please consider the follwing:
  • Low speed operation, max. motor speed 10 revolutions/sec
  • For UHV w/o lubrication: max motor speed 2 revolutions/sec
  • Stages can only be run in vacuum or flowbox
  • Stages are delivered with test plugs, not designed for vacuum (see vacuum options)
  • Outbakeing temperature for High Vacuum 80°C
  • Outbakeing temperature for Ultra High Vacuum +125°C ~ 235°C

Prefered materials for vacuum & cryogenic positioning systems by PI miCos
Stainless steel; Titanium; Bronze; Aluminium; Ceramic; Sapphiere; Viton; Teflon; PEEK; Kapton; Macor

Inititial operation / test in atmospheric conditions:
PI miCos supplies vacuum-prepared stages with test connectors for ambient pressure. These cannot be used in vacuum! The connectors have to be removed and replaced by a vacuum compatible connector by the customer. Vacuum feedthroughs, connectors and other accessories are available from PI miCos.



Linear Stages XY Stages Z Stages Rotary Stages Pushers / Actuators


Ultra-High-Vacuum Rotation Stage with High Precision

 
Ultra-High-Vacuum Rotation Stage with High Precision
  • Reproducibility to 0.0002 deg (bidirectional)
  • Rotational Velocity to 200 deg/second
  • Payload to 50 kg
  • Optional High Resolution Encoder
  • Clear Aperture up to 120 millimeters



PDF Datasheet


Vacuum Compatible Motorized Z Stage ES-100

 
Ultra-High-Vacuum Z Stage ES-100
  • Vacuum compatible to 10-6 Torr
  • ½" and 1" travel
  • Repeatability to 0.05 µm
  • Maximum speed 6 mm/sec
  • 5.5 kg Load Capacity
  • Integrated limit switches
  • Center mounted linear scale optional




PDF Datasheet


Ultra-High-Vacuum Positioning Table with Extreme Accuracy UPM-160 UHV

 
Ultra-High-Vacuum Positioning Table with Extreme Accuracy UPM-160 UHV
  • Positioning Range to 205 millimeters (8 inches)
  • Unidirectional Position Reproducibility to ±0.02 microns
  • Maximum Velocity 100 mm/second
  • Payload to 35 kg
  • Linear Scale Encoder (center mounted)




PDF Datasheet


Ultra-High-Vacuum Positioning Table LS-180-UHV

 
Ultra-High-Vacuum Positioning Table LS-180-UHV
  • Positioning Range to 508 millimeters (20 inches)
  • Unidirectional Position Reproducibility to ±0.05 microns
  • Maximum Velocity 200 mm/second
  • Payload to 100 kg
  • Precision Limit Switches
  • Available Linear Scale Encoder (center-mount)



PDF Datasheet


High-Vacuum Positioning Table LS-110-UHV

 
High-Vacuum Positioning Table LS-110-UHV
  • Positioning Range to 305 millimeters (12 inches)
  • Unidirectional Position Reproducibility to ±0.05 microns
  • Maximum Velocity 90 mm/second
  • Payload to 10 kg
  • Precision Limit Switches
  • Available Linear Scale Encoder (center-mount)




PDF Datasheet


High-Vacuum Precision Positioning Table PLS-85-HV

 
High-Vacuum Precision Positioning Table PLS-85-HV
  • Positioning Range to 155 millimeters (6 inches)
  • Unidirectional Position Reproducibility to ±0.05 microns
  • Maximum Velocity 100 mm/second
  • Payload to 10 kg
  • Precision Limit Switches
  • Available Linear Scale Encoder



PDF Datasheet


Ultra-High-Vacuum Positioning Table MT-65-UHV

 
Ultra-High-Vacuum Positioning Table MT-65-UHV
  • Positioning Range to 155 millimeters (6 inches)
  • Unidirectional Position Reproducibility to ±0.05 microns
  • Maximum Velocity 100 mm/second
  • Payload to 10 kg
  • Precision Limit Switches
  • Available Linear Scale Encoder



High-Vacuum Micropositioning Stage MTS-65 HV

 
High-Vacuum Micropositioning Stage MTS-65 HV
  • Positioning Range to 52 millimeters (2 inches)
  • Unidirectional Position Reproducibility to ±0.1 microns
  • Maximum Velocity 8 mm/second
  • Payload to 2 kg
  • Precision Limit Switches
  • Available Linear Scale Encoder



PDF Datasheet


Ultra-High-Vacuum Positioning Table VT-80-FV-HV-UHV

 
Ultra-High-Vacuum Positioning Table VT-80-FV-HV-UHV
  • Positioning Range to 300 mm
  • Unidirectional Position Reproducibility to ±0.2 microns
  • Maximum Velocity 20 mm/second
  • Payload to 5 kg
  • Precision Limit Switches



PDF Datasheet


Ultra-High-Vacuum Precision Actuator Pusher MP-20-L-UHV

 
Ultra-High-Vacuum Precision Actuator Pusher MP-20-L-UHV
  • Positioning Range to 75 mm
  • Unidirectional Position Reproducibility to ±0.5 microns
  • Maximum Velocity 3.5 mm/second
  • Force Maximum 125 N
  • Precision Limit Switches
  • High resolution
  • With MP-B & MP-F inserts



PDF Datasheet


Ultra-High-Vacuum Precision Linear Actuator MP-20-S-UHV

 
Ultra-High-Vacuum Precision Linear Actuator MP-20-S-UHV
  • Travel range 12.5 mm
  • Unidirectional Position Reproducibility to ±1 microns
  • Maximum Velocity 3 mm/second
  • Force Maximum 20 N
  • Precision Limit Switches
  • High resolution



PDF Datasheet
Back to Top

US Head Office


PI USA complies with the US laws
for export controlled technologies.

PI (Physik Instrumente) LP
16 Albert St.
Auburn, MA 01501
Phone 508-832-3456
Fax 508-832-0506
E-Mail Info Request

US West Coast Offices
San Francisco Area
1 Harbor Drive, Suite 108
Sausalito, CA 94965
Phone 408-533-0973
Fax 949-679-9292
E-Mail Info Request

Los Angeles Area
5420 Trabuco Road, Suite 100
Irvine, CA 92620-5743
Phone 949-679-9191
Fax 949-679-9292
E-Mail Info Request

Direct Offices


Distributors


 Social Media





International HQ


Physik Instrumente (PI)
GmbH & Co. KG

Auf der Römerstrasse 1
76228 Karlsruhe/Palmbach, Germany
Phone +49 721 4846-0
E-Mail  info(at)pi.ws


Ask a PI Engineer     PI - Moving the NanoWorld.   ISO 9001-2008 certified.
© 1996-2015 PI (Physik Instrumente) LP All rights reserved.  Specifications subject to change without notice.