vacuum compatible Linear rotary positioners
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  Vacuum Precision Positioning Stages & Actuators

        For standard optomech stages (atmospheric) click here

 

 

Vacuum Optomechanical Positioning Systems:
Things to Consider


    180-page Catalog: Vacuum / UHV Compatible Motorized Optomech Positioners

PI miCos has extensive experience in the design and manufacturing of vacuum and high vacuum compatible precision optomechanical positioning equipment for low temperature and wide temperature ranges. We provide translation stages, vertical linear stages, rotation stages, XY stages and complex multi-axis positioning systems in vacuum spec.

Vacuum applications are increasingly more important for many fields of research and industrial manufacturing. PI miCos supplies positioning components and systems for vacuum levels from 10-3 mbar to 10-9 mbar (see conversion to Torr below). When we design standard products for ambient, we already plan for vacuum adaptability, which is why we can offer a broad range of vacuum compatible systems. In addition to components, PI miCos also offers complete turnkey system solutions for vacuum.

UHV Nano Tomograhpy

Wide Temperature Range / Low Temperature / Cryogenic Applications


PI miCos not only specializes in vacuum compatible optomech positioning equipment but also stages that can be operated in a wide temperature range such as -40C° to +150C°. On the other end of the scale, stages for low temperature applications down to cryogenic conditions (77K) are also available.

When we look at the required vacuum modifications / preparations we start at the application. For the coating of optics different vacuum levels are necessary as for X-ray crystallography for example. The absolute vacuum pressure is often less critical than the partial pressure of hydrocarbons.

The use of plastics in encoders, cables, limit switches or lubricants with the wrong specifications can result in the excessive contamination of surfaces with hydrocarbons. UV laser light can break down hydrocarbons and destroy optics. Experience in the choosing the right of materials and handling processes is critical for delivering a solution that will satisfy the requirements of the individual application.

    Brochure: Vacuum Compatible Piezo Positioning Systems
    Complete Vacuum Positioning Stages / Systems Catalog

Preparation
Many PI miCos stages can be prepared for FV, HV and ultra high vacuum. For UHV all components are made for 10-9 mbar. Special UHV motors, grease, cables, and coatings are used.

Vacuum Definition / Units
Vacuum is defined as pressure lower than nomal atmospherical air pressure. PI miCos specifies vacuum products in mbar (millibar).
1 mbar ~ 0.75 Torr.
1 mbar = 100 Pa

Considerations for Vacuum Operation
When stages are used in vacuum please consider the follwing:

  • Low speed operation, max. motor speed 10 revolutions/sec
  • For UHV w/o lubrication: max motor speed 2 revolutions/sec
  • Stages can only be run in vacuum or flowbox
  • Stages are delivered with test plugs, not designed for vacuum (see vacuum options)
  • Outbakeing temperature for High Vacuum 80°C
  • Outbakeing temperature for Ultra High Vacuum +125°C ~ 235°C


Prefered materials for vacuum & cryogenic positioning systems by PI miCos Stainless steel; Titanium; Bronze; Aluminium; Ceramic; Sapphiere; Viton; Teflon; PEEK; Kapton; Macor

Inititial operation / test in atmospheric conditions:
PI miCos supplies vacuum-prepared stages with test connectors for ambient pressure. These cannot be used in vacuum! The connectors have to be removed and replaced by a vacuum compatible connector by the customer. Vacuum feedthroughs, connectors and other accessories are available from PI miCos.

 

  Product Examples of Vacuum Compatible Optomech Equipment
  Click on Headlines for Datasheet

Vacuum Rotation stage UHV
Ultra-High-Vacuum Rotation Stage with High Precision
  • Reproducibility to 0.0002 deg (bidirectional)
  • Rotational Velocity to 200 deg/second
  • Payload to 50 kg
  • Optional High Resolution Encoder
  • Clear aperture up to 120 millimeters
  • Optomech Vacuum compatible high precision positioning stage UPM-160 UHV
    Ultra-High-Vacuum Positioning Table with Extreme Accuracy UPM-160 UHV
  • Positioning Range to 205 millimeters (8 inches)
  • Unidirectional Position Reproducibility to ±0.02 microns
  • Max. Velocity 100 mm/second
  • Payload to 35 kg
  • Linear scale encoder (center mounted)
  • Vacuum  precision Positioning Table LS-180 UHV
    Ultra-High-Vacuum Positioning Table LS-180-UHV
  • Positioning Range to 508 millimeters (20 inches)
  • Unidirectional Position Reproducibility to ±0.05 microns
  • Max. Velocity 200 mm/second
  • Payload to 100 kg
  • Precision Limit Switches
  • Available linear scale encoder (center-mount)
  • UHV  precision Positioner LS-110
    High-Vacuum Positioning Table LS-110-UHV
  • Positioning Range to 305 millimeters (12 inches)
  • Unidirectional Position Reproducibility to ±0.05 microns
  • Max. Velocity 90 mm/second
  • Payload to 10 kg
  • Precision Limit Switches
  • Available linear scale encoder (center-mount)
  • High Vacuum Optomech Precision Positioning Table PLS-85 HV
    High-Vacuum Precision Positioning Table PLS-85-HV
  • Positioning Range to 155 millimeters (6 inches)
  • Unidirectional Position Reproducibility to ±0.05 microns
  • Max. Velocity 100 mm/second
  • Payload to 10 kg
  • Precision Limit Switches
  • Available linear scale encoder
  • Vacuum Positioning Table MT-65 UHV
    Ultra-High-Vacuum Positioning Table MT-65-UHV
  • Positioning Range to 155 millimeters (6 inches)
  • Unidirectional Position Reproducibility to ±0.05 microns
  • Max. Velocity 100 mm/second
  • Payload to 10 kg
  • Precision Limit Switches
  • Available linear scale encoder
  • Micro translation Stage MTS-65 HV
    High-Vacuum Micropositioning Stage MTS-65 HV
  • Positioning Range to 52 millimeters (2 inches)
  • Unidirectional Position Reproducibility to ±0.1 microns
  • Max. Velocity 8 mm/second
  • Payload to 2 kg
  • Precision Limit Switches
  • Available linear scale encoder
  • Vacuum translation Table VT-80 FV HV UHV
    Ultra-High-Vacuum Positioning Table VT-80-FV-HV-UHV
  • Positioning Range to 300 mm
  • Unidirectional Position Reproducibility to ±0.2 microns
  • Max. Velocity 20 mm/second
  • Payload to 5 kg
  • Precision Limit Switches
  • Linear Actuator for UHV MP20L
    Ultra-High-Vacuum Precision Actuator Pusher MP-20-L-UHV
  • Positioning Range to 75 mm
  • Unidirectional Position Reproducibility to ±0.5 microns
  • Max. Velocity 3.5 mm/second
  • Force max. 125 N
  • Precision Limit Switches
  • High resolution
  • With MP-B & MP-F inserts
  • Precision Vacuum Actuator  MP20S UHV
    Ultra-High-Vacuum Precision Linear Actuator MP-20-S-UHV
  • Travel range 12.5 mm
  • Unidirectional Position Reproducibility to ±1 microns
  • Max. Velocity 3 mm/second
  • Force max. 20 N
  • Precision Limit Switches
  • High resolution
  •  

        PDF: 180 page Vacuum Positioning Stages / Systems Catalog

        PDF: "Engineered High Vacuum Motion Control Solutions"

     

     

     

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