linear positioners
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Linear Stages for Precision Motion Control

     
     
Linear Stages, Minimized Angular Errors
Precision linear motion with minimized runout is critical for many applications from beamline systems to semiconductor manufacturing and photonics instrumentation.

From Cost-Effective to Ultra High Performance
Stage designs vary from cost-effective open-loop stepper-motor systems to closed-loop, direct-metrology equipped positioners with linear electromagnetic motor drives.

Vertical and Multi-Axis Motion

In addition to the linear translation stages shown on this page, vertical (lift) positioners as well as XY-systems and multi-axis stages, for high-precision motion applications are also available.

Vacuum, too
As a specialist for vacuum motion systems, PI miCos also offers HV and UHV vacuum compatible linear positioning stages.

 

Low-Cost Linear Translation Stages

 

High Resolution Translation Positioing Stage VT-80

Low-Cost Linear Translation Stage: VT80 Series

  • Motorized Positioning Range: 25 to 300 millimeters
  • Maximum Load: 5 kg
  • Maximum Velocity: 20 mm/second
  • Maximum Positioning Resolution: 0.2 micrometers
  • Position Reproducibility: 0.4 micrometers unidirectional
    +/ 10 micrometers bidirectional

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Precision High Resolution Motorized Stage VT-75

Low Cost Precision Motorized Linear Translation Stage, Long Travel: VT75 Series

  • Motorized Positioning Range: 50 to 600millimeters
  • Maximum Load: 5 kg
  • Maximum Velocity: 100 mm/second
  • Maximum Positioning Resolution: 0.4 micrometers
  • Position Reproducibility: 0.4 micrometers unidirectional
    +/- 0.6 micrometers bidirectional

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Compact Positioning Stages

 

Miniature High Resolution Stage MTS-70

Miniature Precision Linear Stage: MTS70 Series

  • Motorized Positioning Range: 10 millimeters
  • Maximum Load: 2 kg
  • Maximum Velocity: 8 mm/second
  • Maximum Positioning Resolution: 0.05 micrometers
  • Position Reproducibility: 0.1 micrometers unidirectional
    +/- 0.2 micrometers bidirectional
  • Linear Position Feedback Encoder: Optional

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Miniature High Resolution Stage MTS-65

Precision Miniature Translation Stage: MTS65 Series

  • Motorized Positioning Range: 13 to 52 millimeters
  • Maximum Load: 2 kg
  • Maximum Velocity: 10 mm/second
  • Maximum Positioning Resolution: 0.05 micrometers
  • Position Reproducibility: 0.1 micrometers unidirectional
    0.2 micrometers bidirectional
  • Linear Position Feedback Encoder: Optional

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High Resolution Precision Motorized Stage LS-40

Compact Precision Linear Translation Stage: LS40 Series

  • Motorized Positioning Range: 13 to 52 millimeters
  • Maximum Load: 2 kg
  • Maximum Velocity: 5 mm/second
  • Maximum Positioning Resolution: 0.1 micrometers
  • Position Reproducibility: 0.1 micrometers unidirectional
    3 micrometers bidirectional

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Precision High Resolution Motorized Stage LS-65

Precision Linear Translation Stage: LS65 Series

  • Motorized Positioning Range: 26 to 102 millimeters
  • Maximum Load: 6 kg
  • Maximum Velocity: 10 mm/second
  • Maximum Positioning Resolution: 0.2 micrometers
  • Position Reproducibility: 0.3 micrometers unidirectional
    5 micrometers bidirectional

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Additional Miniature Positioning Stages with
Stepper, Servo and Piezo Motor Drives





 

High Precision Stages

 

Precision High Resolution Motorized Stage LS-120

Compact High Precision Linear Translation Stage: LS120 Series

  • Motorized Positioning Range: 40 millimeters
  • Maximum Load: 10 kg
  • Maximum Velocity: 90mm/second
  • Maximum Positioning Resolution: 0.05 micrometers
  • Position Reproducibility: 0.1 micrometers unidirectional
    +/- 0.1 micrometers bidirectionally
  • Linear Position Feedback Encoder: Optional

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High Resolution Precision Linear Positioning Stage PLS-85

Precision Linear Positioning Stage: PLS85 Series

  • Motorized Positioning Range: 26 to 102 millimeters
  • Maximum Load: 10 kg
  • Maximum Velocity: 100 mm/second
  • Maximum Positioning Resolution: 0.05 micrometers
  • Position Reproducibility: 0.05 micrometers unidirectional
    +/- 0.1 micrometers bidirectional
  • Linear Position Feedback Encoder: Optional

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Precision High Resolution Motorized Stage LS-110

High Precision Linear Translation Stage: LS110 Series

  • Motorized Positioning Range: 26 to 305 millimeters
  • Maximum Load: 10 kg
  • Maximum Velocity: 90 mm/second
  • Maximum Positioning Resolution: 0.05 micrometers
  • Position Reproducibility: 0.1 micrometers unidirectional
    0.1 micrometers bidirectional
  • Linear Position Feedback Encoder: Optional

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Ultra Precision Linear Positioning Stage UPM-160

Ultra High Precision Linear Stage: UPM160 Series

  • Motorized Positioning Range: 205 millimeters
  • Maximum Load: 15 kg
  • Maximum Velocity: 100 mm/second
  • Maximum Positioning Resolution: 0.001 micrometers
  • Position Reproducibility: 0.035 micrometers unidirectional
    0.035 micrometers bidirectional
  • Linear Position Feedback Encoder: Optional

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High Accuracy Positioning Stage

High Accuracy Linear Positioning Stage: HPS170 Series

  • Motorized Positioning Range: 52 to 305 millimeters
  • Maximum Load: 35 kg
  • Maximum Velocity: 90 mm/second
  • Maximum Positioning Resolution: 0.05 micrometers
  • Position Reproducibility: 0.05 micrometers unidirectional
    +/- 0.05 micrometers bidirectional
  • Linear Position Feedback Encoder: Optional

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Affordable Linear Motor Stages / High Speed

 

High Resolution Linear Motorized Stage LMS-60

High Speed, High Precision Linear Motor Positioner: LMS60 Series

  • Motorized Positioning Range: 25 to 65 millimeters
  • Maximum Load: 3 kg
  • Maximum Velocity: 500 mm/second
  • Maximum Positioning Resolution: 0.015 micrometers
  • Position Reproducibility: 0.1 micrometers unidirectional
    +/- 0.1 micrometers bidirectional
  • Linear Position Feedback Encoder: Included

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High Resolution Linear Motorized Stage LMS-80

High Speed, High Precision Linear Motor Positioner: LMS80 Series

  • Motorized Positioning Range: 120 millimeters
  • Maximum Load: 5 kg
  • Maximum Velocity: 500 mm/second
  • Maximum Positioning Resolution: 0.015 micrometers
  • Position Reproducibility: 0.1 micrometers unidirectional
    +/- 0.1 micrometers bidirectional
  • Linear Position Feedback Encoder: Included

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High Accuracy Linear Motor Stages: Speed & Precision

 

High Resolution Positioning Stage

Ultra High Accuracy Linear Motor Positioning Stage, High Speed & High Accuracy: UPS150 Series

  • Motorized Positioning Range: 52 to305 millimeters
  • High Speed Linear Motor
  • Maximum Load: 15 kg
  • Maximum Velocity: 600 mm/second
  • Maximum Positioning Resolution: 0.001 micrometers
  • Position Reproducibility: 0.015 micrometers unidirectional
    +/- 0.025 micrometers bidirectional
  • Center Mounted Linear Position Feedback Encoder

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High Resolution  Motorized Stage LMS-230

High Speed, High Precision Linear Stage, Linear-Motor-Driven: LMS230 Series

  • Motorized Positioning Range: 52 millimeters
  • Maximum Load: 15 kg
  • Maximum Velocity: 400 mm/second
  • Maximum Positioning Resolution: 0.001 micrometers
  • Position Reproducibility: 0.01 micrometers unidirectional
    +/- 0.02 micrometers bidirectional
  • Center Mounted Linear Position Feedback Encoder/li>

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Linear High Resolution Motorized Stage LMS-180

High Speed, High Precision Linear Stage, Linear-Motor-Driven: LMS180 Series

  • Motorized Positioning Range: 155 to 508 millimeters
  • Linear Electromagnetic Motor
  • Maximum Load: 45 kg
  • Maximum Velocity: 500 mm/second
  • Maximum Positioning Resolution: 0.015 micrometers
  • Position Reproducibility: 0.05 micrometers unidirectional
    +/- 0.1 micrometers bidirectional
  • Linear Position Feedback Encoder: Included

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High Resolution Linear Motorized Stage LMS-300

High Speed, High Precision Linear Stage, Linear-Motor-Driven: LMS300 Series

  • Motorized Positioning Range: 415 to 815 millimeters
  • Maximum Load: 100 kg
  • Maximum Velocity: 800 mm/second
  • Maximum Positioning Resolution: 0.005 micrometers
  • Position Reproducibility: 0.05 micrometers unidirectional
    +/- 0.05 micrometers bidirectional
  • Linear Position Feedback Encoder: Included

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High Load, Long Travel Stages

 

Precision High Resolution Motorized Stage LS-180

High Precision Linear Translation Stage: LS180 Series

  • Motorized Positioning Range: 155 to 508 millimeters
  • Maximum Load: 100 kg
  • Maximum Velocity: 200 mm/second
  • Maximum Positioning Resolution: 0.05 micrometers
  • Position Reproducibility: 0.05 micrometers unidirectional
    0.1 micrometers bidirectional
  • Linear Position Feedback Encoder: Optional

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High Resolution Motorized Stage LS-270

Precision Linear Translation Stage: LS270 Series

  • Motorized Positioning Range: 155 to 1016mm
  • Maximum Load: 150 kg
  • Maximum Velocity: 150 mm/second
  • Maximum Positioning Resolution: 0.05 micrometers
  • Position Reproducibility: 0.05 micrometers unidirectional
    +/- 0.04 micrometers bidirectional
  • Linear Position Feedback Encoder: Optional

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Linear Stages XY Stages Z-Stages Rotary Stages Pushers / Actuators

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