Precision Linear Stage, Motorized Stages, Linear Motion, by PI USA
Precision Linear Stage,  Motorized Stages, Linear Motion

Motorized Linear Stages for Precision Motion Control


Motorized Linear Stages, Minimized Angular Errors
A motorized linear stage is a positioning device providing high precision linear motion with minimized runout. This behavior is critical to the success of industrial and scientific applications from beamline systems to semiconductor manufacturing and photonics instrumentation.

From Cost-Effective to Ultra High Performance
Stage designs vary from cost-effective open-loop stepper-motor systems to closed-loop, direct-metrology equipped positioners with linear electromagnetic motor drives.

Air Bearing Linear Stages for the Highest Performance Requirements
When the highest precision is required, Air Bearing Linear Stages are recommended. PI USA provides air bearing linear and rotary stages based on on over 200 man-years of in-house air bearing experience.
More information on Linear Air Bearings

Vertical and Multi-Axis Motion
In addition to the linear translation stages shown on this page, vertical (lift) positioners as well as XY-systems and multi-axis stages, for high-precision motion applications are also available.

Vacuum, too
As a specialist for vacuum motion systems, PI miCos also offers HV and UHV vacuum compatible linear positioning stages.





Low Cost Compact High Precision Voice Coil & Linear Motor
Hybrid Air Bearing High Load Ultra Compact




Low-Cost Motorized Linear Stages




Low-Cost Precision Linear Stage: L-406

 
Low-Cost Precision Linear Stage: L-406
  • Travel Range from 26 to 102 mm (1” to 4”)
  • Position Repeatability to 0.2 microns
  • Velocity Up to 20mm/sec
  • Load Capacity to 10kg (22lbs)
  • Integrated Optical Limit Switch



Specifications & Drawings, Request Quote l PDF Datasheet


Low-Cost Linear Translation Stage: VT-80 Series

 
Low-Cost Linear Translation Stage: VT-80 Series
  • Motorized Positioning Range: 25 to 300 millimeters
  • Maximum Load: 5 kg
  • Maximum Velocity: 20 mm/second
  • Maximum Positioning Resolution: 0.2 micrometers
  • Position Reproducibility: 0.4 micrometers unidirectional +/ 10 micrometers bidirectional



Specifications & Drawings, Request Quote l PDF Datasheet


Low Cost Precision Motorized Linear Translation Stage, Long Travel: VT-75 Series

 
Low Cost Precision Motorized Linear Translation Stage, Long Travel: VT-75 Series
  • Motorized Positioning Range: 50 to 600millimeters
  • Maximum Load: 5 kg
  • Maximum Velocity: 100 mm/second
  • Maximum Positioning Resolution: 0.4 micrometers
  • Position Reproducibility: 0.4 micrometers unidirectional +/- 0.6 micrometers bidirectional




Specifications & Drawings, Request Quote l PDF Datasheet


Compact Motorized Positioning Stages




M-122 Fast Miniature Linear Translation Stage, Optical Linear Encoder, 25mm

 
M-122 Fast Miniature Linear Translation Stage, Optical Linear Encoder, 25mm
  • Travel Range 25 mm
  • 0.1 µm Optical Linear Encoder for Highest Accuracy & Repeatability
  • Min. Incremental Motion to 0.2 µm
  • Max. Velocity 20 mm/s
  • Cross-Roll Bearings
  • Recirculating Ball Screw Drives Provide High Speeds & Long Lifetimes



Specifications & Drawings, Request Quote l PDF Datasheet


M-110/11/12 Miniature Translation Stages, High-Resolution, Lead & Ballscrew, 5-25mm

 
M-110 /11/12 Miniature Translation Stages, High-Resolution, Lead & Ballscrew, 5-25mm
  • Travel Ranges 5, 15 and 25 mm
  • Very high resolution to 0.05 µm, and Cost Effective
  • MTBF 5000 h
  • Max. Velocity 2 mm/s
  • Closed-Loop DC Motors and Stepper Motors
  • Non-Contact Limit and Reference Switches
  • Choice of Leadscrew and Ball Screw for Higher Speeds & Longer Life
  • Vacuum-Compatible Versions Available to 10-6 hPa



Specifications & Drawings, Request Quote l PDF Datasheet


Miniature Piezo Motor Linear Stage: Q-545 Series

 
Miniature Piezo Motor Linear Stage, Q-545 Series
  • 13 mm and 26 mm Travel
  • Closed-Loop, with Stick-Slip Piezo Motor
  • Vacuum Versions and Non-Magnetic Versions available
  • Optical Encoder, 2nm Resolution
  • Velocity of 10 mm/sec
  • Load capacity up to 1 kg


  • Different Piezo Motor Technologies Explained




Specifications & Drawings, Request Quote l PDF Datasheet


N-565 Nanometer-Precision Compact Linear Stage with PiezoWalk Linear Motor

 
N-565 Nanometer-Precision Compact Linear Stage with PiezoWalk Linear Motor
Driven by PiezoWalk® technology, which combines piezo class resolution with long travel ranges, subnanometer resolution, high forces and stiffness, these stepping drives are not subject to sliding friction or wear as motion is achieved when the “legs” lift off for each step. Designed for high-end applications in bio-nanotechnology, fiber-optics, microscopy, semiconductor testing, and metrology and scientific research in beamlines and laser labs.

  • Ultra-High Precision Design: 0.5nm Encoder Resolution
  • Patented PiezoWalk® Technology combines piezo-class resolution with long travel and extreme reliability.
  • Self-Locking at power off. No drift, no heat generation at position hold.
  • 3 Travel Ranges: ˝”, 1” and 2”
  • Compact Design: 65mm Width, 20mm Height


  • Different Operating Modes of PiezoWalk Motors Explained




Specifications & Drawings, Request Quote l PDF Datasheet


Precision Miniature Translation Stage: MTS-65 Series

 
Precision Miniature Translation Stage: MTS-65 Series
  • Motorized Positioning Range: 13 to 52 millimeters
  • Maximum Load: 2 kg
  • Maximum Velocity: 10 mm/second
  • Maximum Positioning Resolution: 0.05 micrometers
  • Position Reproducibility: 0.1 micrometers unidirectional 0.2 micrometers bidirectional
  • Linear Position Feedback Encoder: Optional



Specifications & Drawings, Request Quote l PDF Datasheet


Compact Precision Linear Translation Stage: LS-40 Series

 
Compact Precision Linear Translation Stage: LS-40 Series
  • Motorized Positioning Range: 13 to 52 millimeters
  • Maximum Load: 2 kg
  • Maximum Velocity: 5 mm/second
  • Maximum Positioning Resolution: 0.1 micrometers
  • Position Reproducibility: 0.1 micrometers unidirectional 3 micrometers bidirectional



Specifications & Drawings, Request Quote l PDF Datasheet




Additional Miniature Motorized Positioning Stages
with Stepper, Servo and Piezo Motor Drives







High Precision Motorized Linear Stages




Precision Linear Positioning Stage: L-509 Series

 
Precision Linear Positioning Stage: L-509 Series
  • Compact, High Precision Stage
  • Stepper Motor and DC Motor Options
  • 1, 2 and 4” Travel (26mm, 52mm and 102mm
  • Repeatability to 0.05 µm
  • Linear Encoder Option
  • Direction-Sensing Home Switch
  • Optical Limit Switches





Specifications & Drawings, Request Quote l PDF Datasheet


High Precision Linear Translation Stage: L-511 Series

 
High Precision Linear Translation Stage: LS-110 Series
  • Motorized Positioning Range: 52 mm (2“), 102 mm (4“), 155 mm (6“)
  • Maximum Load: 10 kg (22 lbs)
  • Maximum Velocity: 45 mm/second
  • Maximum Linear Encoder Resolution: 1 nanometer
  • Minimum Incremental Motion: 0.02 µm
  • Vacuum Compatible Version Available

High Precision Linear Translation Stage: LS-110 Series
Highly repeatable 20 nm steps performed by L-511 with linear encoder driven by SMC Hydra controller.


Specifications & Drawings, Request Quote l PDF Datasheet


High Precision Linear Ball Screw Stages: M-500 Series

 
High Precision Linear Ball Screw Stages: M-500 Series
  • Travel Ranges to 306 mm (12")
  • Velocity up to 125 mm/sec.
  • ActiveDrive™ Motors
  • Choice of Motion Controllers
  • Linear-Scale Encoders for Highest Accuracy
  • Stress-Relieved Aluminum Stage Base for Highest Stability
  • Zero-Backlash Recirculating Ballscrews
  • Non-Contacting Origin and Limit Switches
  • PIIntelliStage™ Version with Integrated Controller
  • Load Capacity 100 kg
  • >20000 Hours MTBF


Specifications & Drawings, Request Quote l PDF Datasheet


High Accuracy Linear Positioning Stage: HPS-170 Series

 
High Accuracy Linear Positioning Stage: HPS-170 Series
  • Motorized Positioning Range: 52 to 305 millimeters
  • Maximum Load: 35 kg
  • Maximum Velocity: 90 mm/second
  • Maximum Positioning Resolution: 0.05 micrometers
  • Position Reproducibility: 0.05 micrometers unidirectional +/- 0.05 micrometers bidirectional
  • Linear Position Feedback Encoder: Optional



Specifications & Drawings, Request Quote l PDF Datasheet


Affordable Linear Motor Stages / High Speed



V-522, V-524, V-528 Compact High-Speed Linear Motor Stage, 5, 10, 20mm Travel

 
V-522, V-524, V-528  Compact High-Speed Linear Motor Stage, 5, 10, 20mm Travel

These compact, voice-coil linear motor-driven positioning stages were designed for high-dynamics precision motion applications, like those in biotechnology; laser beam control; optics scanning; lens testing; and fiber optics. V-522 translation stages / scanning systems achieve significantly higher dynamics than stepper or servo motor-driven positioners; scanning frequencies of several 10Hz can be achieved, depending on load and scanning range. The drive system is also not subject to wear and tear or particle generation

  • No Moving Cables
  • Fast Voice Coil Linear Motor for Rapid Scanning and Positioning
  • Scanning Frequency 10s of Hz
  • Travel Ranges 5, 10 and 20mm
  • Velocity up to 250 mm/sec
  • Linear Encoder, 0.1 Micrometers Resolution
  • Crossed Roller Bearings


Voice Coil Linear Motor: How Does It Work?



Specifications & Drawings, Request Quote l PDF Datasheet


High Accuracy Linear Motor Stages: Speed & Precision




PIMag® Precision Linear Motor Stage, with Absolute Encoder V-551

 
PIMag<sup>®</sup> Precision Linear Motor Stage, with Absolute Encoder V-551
  • Travel to 230 mm
  • Maximum Velocity: 500 mm/s
  • Integrated absolute-measuring encoder with <2nm resolution
  • 200 N peak force
  • Compact:160 mm width
  • Crossed Roller Bearings with Anti-Creep Cage Assist
  • Straightness/Flatness 1µm/100mm
  • Ironless non-cogging motor


Examples of Different Direct Drive Motor Technologies






Specifications & Drawings, Request Quote l PDF Datasheet


Ultra High Accuracy Linear Motor Positioning Stage, High Speed & High Accuracy: UPS-150 Series

 
Ultra High Accuracy Linear Motor Positioning Stage, High Speed & High Accuracy: UPS-150 Series
  • Motorized Positioning Range: 52 to 305 millimeters
  • High Speed Linear Motor
  • Maximum Load: 15 kg
  • Maximum Velocity: 600 mm/second
  • Maximum Positioning Resolution: 0.001 micrometers
  • Position Reproducibility: 0.015 micrometers unidirectional +/- 0.025 micrometers bidirectional
  • Center Mounted Linear Position Feedback Encoder


Examples of Different Direct Drive Motor Technologies



Specifications & Drawings, Request Quote l PDF Datasheet


High Speed, High Precision Linear Stage, Linear-Motor-Driven: LMS-230 Series

 
High Speed, High Precision Linear Stage, Linear-Motor-Driven: LMS-230 Series
  • Motorized Positioning Range: 52 millimeters
  • Maximum Load: 15 kg
  • Maximum Velocity: 400 mm/second
  • Maximum Positioning Resolution: 0.001 micrometers
  • Position Reproducibility: 0.01 micrometers unidirectional +/- 0.02 micrometers bidirectional
  • Center Mounted Linear Position Feedback Encoder


Examples of Different Direct Drive Motor Technologies



Specifications & Drawings, Request Quote l PDF Datasheet


High Speed, High Precision Linear Stage, Linear-Motor-Driven: LMS-180 Series

 
High Speed, High Precision Linear Stage, Linear-Motor-Driven: LMS-180 Series
  • Motorized Positioning Range: 155 to 508 millimeters
  • Linear Electromagnetic Motor
  • Maximum Load: 45 kg
  • Maximum Velocity: 500 mm/second
  • Maximum Positioning Resolution: 0.015 micrometers
  • Position Reproducibility: 0.05 micrometers unidirectional +/- 0.1 micrometers bidirectional
  • Linear Position Feedback Encoder: Included


Examples of Different Direct Drive Motor Technologies



Specifications & Drawings, Request Quote l PDF Datasheet




Three Phase Linear Motor Working Principle




Watch Video Animation



Back to High Accuracy Linear Motors
Back to Affordable Linear Motor Stages / High Speed




Ultra High Precision Motorized Air Bearing Stages




A-110 PIglide LC Low Cost Air Bearing Stage Series

 
PIglide A110

Specifications & Drawings, Request Quote


A-201 PIglide AT3 Linear Air Bearing Stage Series to 750mm

 
Atlas 201
  • Motorized Positioning Range: 500mm
  • Maximum Load: 35kg
  • Maximum Velocity: 2 m/s
  • Maximum Acceleration: 2 G's
  • Maximum Positioning Resolution: 0.25µm, straightness/flatness
  • Table Size to 210mm x 210mm


  • Air Bearing Technology Explained



Specifications & Drawings, Request Quote




Hybrid High Accuracy Motorized Stages (Servo + Piezo)




M-511.HD1 Ultra-High Precision Hybrid Piezo+Servo Nanopositioning Stage, 0.5nm, 100mm

 
High Speed, High Precision Linear Motor Positioner: LMS-80 Series


Ultra-Smooth Hybrid Technology
Hybrid Actuation
Watch Video Animation
  • Hybrid System Combines Advantages of Electromagnetic and Piezo Drives
  • 0.5nm Linear Encoder Resolution
  • 100mm Travel
  • Velocities to 50mm/sec
  • Active Compensation of Stick/Slip During Startup and Settling
  • Active Backlash Compensation
  • Excellent Velocity Control
  • Millisecond Settling to Nanometer Accuracy
  • Reliable Execution of Minimal Increments
  • High Drive and Holding Forces with Minimal Power





Specifications & Drawings, Request Quote l PDF Datasheet



M-714 Ultra-High Precision Hybrid Piezo+Servo Motor Nanopositioning Stage, for Vertical Use, 2nm, 7mm

 
High Speed, High Precision Linear Motor Positioner: LMS-80 Series
  • Hybrid Sytem Combines Advantages of Piezoelectrics and Electromagnetic Drives
  • 2 Nanometer Linear Encoder Resolution
  • High Holding Forces with Minimum Power Consumption, without Counterbalancing the Load
  • Active Compensation of Stick/Slip During Startup and Settling
  • Active Backlash Compensation
  • Excellent Velocity Control
  • Millisecond Settling to Nanometer Accuracy
  • Reliable Execution of Minimal Increments


Specifications & Drawings, Request Quote l PDF Datasheet




High Load, Long Travel Motorized Linear Stages




High Precision Linear Translation Stage: LS-180 Series

 
High Precision Linear Translation Stage: LS-180 Series
  • Motorized Positioning Range: 155 to 508 millimeters
  • Maximum Load: 100 kg
  • Maximum Velocity: 200 mm/second
  • Maximum Positioning Resolution: 0.05 micrometers
  • Position Reproducibility: 0.05 micrometers unidirectional 0.1 micrometers bidirectional
  • Linear Position Feedback Encoder: Optional



Specifications & Drawings, Request Quote l PDF Datasheet


Precision Linear Translation Stage: LS-270 Series

 
Precision Linear Translation Stage: LS-270 Series
  • Motorized Positioning Range: 155 to 1016mm
  • Maximum Load: 150 kg
  • Maximum Velocity: 150 mm/second
  • Maximum Positioning Resolution: 0.05 micrometers
  • Position Reproducibility: 0.05 micrometers unidirectional +/- 0.04 micrometers bidirectional
  • Linear Position Feedback Encoder: Optional



Specifications & Drawings, Request Quote l PDF Datasheet



XY Stages Z Stages Rotary Stages Pushers / Actuators



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