Precision Linear Stage,  Motorized Stages, Linear Motion

Linear Stages for Precision Motion Control


Linear Stages, Minimized Angular Errors
A linear stage is a positioning device providing high precision linear motion with minimized runout. This behavior is critical to the success of industrial and scientific applications from beamline systems to semiconductor manufacturing and photonics instrumentation.

From Cost-Effective to Ultra High Performance
Stage designs vary from cost-effective open-loop stepper-motor systems to closed-loop, direct-metrology equipped positioners with linear electromagnetic motor drives.

Air Bearing Linear Stages for the Highest Performance Requirements
When the highest precision is required, Air Bearing Linear Stages are recommended. PI USA provides air bearing linear and rotary stages based on on over 200 man-years of in-house air bearing experience.
More information on Linear Air Bearings

Vertical and Multi-Axis Motion
In addition to the linear translation stages shown on this page, vertical (lift) positioners as well as XY-systems and multi-axis stages, for high-precision motion applications are also available.

Vacuum, too
As a specialist for vacuum motion systems, PI miCos also offers HV and UHV vacuum compatible linear positioning stages.


XY Stages Z Stages Rotary Stages Pushers / Actuators


Low-Cost Linear Translation Stages




Low-Cost Linear Translation Stage: VT-80 Series

 
Low-Cost Linear Translation Stage: VT-80 Series
  • Motorized Positioning Range: 25 to 300 millimeters
  • Maximum Load: 5 kg
  • Maximum Velocity: 20 mm/second
  • Maximum Positioning Resolution: 0.2 micrometers
  • Position Reproducibility: 0.4 micrometers unidirectional +/ 10 micrometers bidirectional



Specifications & Drawings, Request Quote l PDF Datasheet


Low Cost Precision Motorized Linear Translation Stage, Long Travel: VT-75 Series

 
Low Cost Precision Motorized Linear Translation Stage, Long Travel: VT-75 Series
  • Motorized Positioning Range: 50 to 600millimeters
  • Maximum Load: 5 kg
  • Maximum Velocity: 100 mm/second
  • Maximum Positioning Resolution: 0.4 micrometers
  • Position Reproducibility: 0.4 micrometers unidirectional +/- 0.6 micrometers bidirectional




Specifications & Drawings, Request Quote l PDF Datasheet


Compact Positioning Stages




Miniature Precision Linear Stage: MTS-70 Series

 
Miniature Precision Linear Stage: MTS-70 Series
  • Motorized Positioning Range: 10 millimeters
  • Maximum Load: 2 kg
  • Maximum Velocity: 8 mm/second
  • Maximum Positioning Resolution: 0.05 micrometers
  • Position Reproducibility: 0.1 micrometers unidirectional +/- 0.2 micrometers bidirectional
  • Linear Position Feedback Encoder: Optional



Specifications & Drawings, Request Quote l PDF Datasheet


Miniature Piezo Motor Linear Stage: Q-545 Series

 
Miniature Piezo Motor Linear Stage, Q-545 Series
  • 13 mm and 26 mm Travel
  • Closed-Loop, with Stick-Slip Piezo Motor
  • Vacuum Versions and Non-Magnetic Versions available
  • Optical Encoder, 2nm Resolution
  • Velocity of 10 mm/sec
  • Load capacity up to 1 kg




Specifications & Drawings, Request Quote l PDF Datasheet


Precision Miniature Translation Stage: MTS-65 Series

 
Precision Miniature Translation Stage: MTS-65 Series
  • Motorized Positioning Range: 13 to 52 millimeters
  • Maximum Load: 2 kg
  • Maximum Velocity: 10 mm/second
  • Maximum Positioning Resolution: 0.05 micrometers
  • Position Reproducibility: 0.1 micrometers unidirectional 0.2 micrometers bidirectional
  • Linear Position Feedback Encoder: Optional



Specifications & Drawings, Request Quote l PDF Datasheet


Compact Precision Linear Translation Stage: LS-40 Series

 
Compact Precision Linear Translation Stage: LS-40 Series
  • Motorized Positioning Range: 13 to 52 millimeters
  • Maximum Load: 2 kg
  • Maximum Velocity: 5 mm/second
  • Maximum Positioning Resolution: 0.1 micrometers
  • Position Reproducibility: 0.1 micrometers unidirectional 3 micrometers bidirectional



Specifications & Drawings, Request Quote l PDF Datasheet


Precision Linear Translation Stage: LS-65 Series

 
Precision Linear Translation Stage: LS-65 Series
  • Motorized Positioning Range: 26 to 102 millimeters
  • Maximum Load: 6 kg
  • Maximum Velocity: 10 mm/second
  • Maximum Positioning Resolution: 0.2 micrometers
  • Position Reproducibility: 0.3 micrometers unidirectional 5 micrometers bidirectional



Specifications & Drawings, Request Quote l PDF Datasheet




Additional Miniature Positioning Stages
with Stepper, Servo and Piezo Motor Drives







High Precision Stages




Compact High Precision Linear Translation Stage: LS-120 Series

 
Compact High Precision Linear Translation Stage: LS-120 Series
  • Motorized Positioning Range: 40 millimeters
  • Maximum Load: 10 kg
  • Maximum Velocity: 90mm/second
  • Maximum Positioning Resolution: 0.05 micrometers
  • Position Reproducibility: 0.1 micrometers unidirectional +/- 0.1 micrometers bidirectionally
  • Linear Position Feedback Encoder: Optional



Specifications & Drawings, Request Quote l PDF Datasheet


Precision Linear Positioning Stage: PLS-85 Series

 
Precision Linear Positioning Stage: PLS-85 Series
  • Motorized Positioning Range: 26 to 102 millimeters
  • Maximum Load: 10 kg
  • Maximum Velocity: 100 mm/second
  • Maximum Positioning Resolution: 0.05 micrometers
  • Position Reproducibility: 0.05 micrometers unidirectional +/- 0.1 micrometers bidirectional
  • Linear Position Feedback Encoder: Optional



Specifications & Drawings, Request Quote l PDF Datasheet


High Precision Linear Translation Stage: LS-110 Series

 
High Precision Linear Translation Stage: LS-110 Series
  • Motorized Positioning Range: 26 to 305 millimeters
  • Maximum Load: 10 kg
  • Maximum Velocity: 90 mm/second
  • Maximum Positioning Resolution: 0.05 micrometers
  • Position Reproducibility: 0.1 micrometers unidirectional 0.1 micrometers bidirectional
  • Linear Position Feedback Encoder: Optional



Specifications & Drawings, Request Quote l PDF Datasheet


Ultra High Precision Linear Stage: UPM-160 Series

 
Ultra High Precision Linear Stage: UPM-160 Series
  • Motorized Positioning Range: 205 millimeters
  • Maximum Load: 15 kg
  • Maximum Velocity: 100 mm/second
  • Maximum Positioning Resolution: 0.001 micrometers
  • Position Reproducibility: 0.035 micrometers unidirectional 0.035 micrometers bidirectional
  • Linear Position Feedback Encoder: Optional



Specifications & Drawings, Request Quote l PDF Datasheet


High Accuracy Linear Positioning Stage: HPS-170 Series

 
High Accuracy Linear Positioning Stage: HPS-170 Series
  • Motorized Positioning Range: 52 to 305 millimeters
  • Maximum Load: 35 kg
  • Maximum Velocity: 90 mm/second
  • Maximum Positioning Resolution: 0.05 micrometers
  • Position Reproducibility: 0.05 micrometers unidirectional +/- 0.05 micrometers bidirectional
  • Linear Position Feedback Encoder: Optional



Specifications & Drawings, Request Quote l PDF Datasheet


Affordable Linear Motor Stages / High Speed




High Speed, High Precision Linear Motor Positioner: LMS-60 Series

 
High Speed, High Precision Linear Motor Positioner: LMS-60 Series
  • Motorized Positioning Range: 25 to 65 millimeters
  • Maximum Load: 3 kg
  • Maximum Velocity: 500 mm/second
  • Maximum Positioning Resolution: 0.015 micrometers
  • Position Reproducibility: 0.1 micrometers unidirectional +/- 0.1 micrometers bidirectional
  • Linear Position Feedback Encoder: Included



Specifications & Drawings, Request Quote l PDF Datasheet


High Speed, High Precision Linear Motor Positioner: LMS-80 Series

 
High Speed, High Precision Linear Motor Positioner: LMS-80 Series
  • Motorized Positioning Range: 120 millimeters
  • Maximum Load: 5 kg
  • Maximum Velocity: 500 mm/second
  • Maximum Positioning Resolution: 0.015 micrometers
  • Position Reproducibility: 0.1 micrometers unidirectional +/- 0.1 micrometers bidirectional
  • Linear Position Feedback Encoder: Included



Specifications & Drawings, Request Quote l PDF Datasheet


High Accuracy Linear Motor Stages: Speed & Precision




Ultra High Accuracy Linear Motor Positioning Stage, High Speed & High Accuracy: UPS-150 Series

 
Ultra High Accuracy Linear Motor Positioning Stage, High Speed & High Accuracy: UPS-150 Series
  • Motorized Positioning Range: 52 to 305 millimeters
  • High Speed Linear Motor
  • Maximum Load: 15 kg
  • Maximum Velocity: 600 mm/second
  • Maximum Positioning Resolution: 0.001 micrometers
  • Position Reproducibility: 0.015 micrometers unidirectional +/- 0.025 micrometers bidirectional
  • Center Mounted Linear Position Feedback Encoder



Specifications & Drawings, Request Quote l PDF Datasheet


High Speed, High Precision Linear Stage, Linear-Motor-Driven: LMS-230 Series

 
High Speed, High Precision Linear Stage, Linear-Motor-Driven: LMS-230 Series
  • Motorized Positioning Range: 52 millimeters
  • Maximum Load: 15 kg
  • Maximum Velocity: 400 mm/second
  • Maximum Positioning Resolution: 0.001 micrometers
  • Position Reproducibility: 0.01 micrometers unidirectional +/- 0.02 micrometers bidirectional
  • Center Mounted Linear Position Feedback Encoder



Specifications & Drawings, Request Quote l PDF Datasheet


High Speed, High Precision Linear Stage, Linear-Motor-Driven: LMS-180 Series

 
High Speed, High Precision Linear Stage, Linear-Motor-Driven: LMS-180 Series
  • Motorized Positioning Range: 155 to 508 millimeters
  • Linear Electromagnetic Motor
  • Maximum Load: 45 kg
  • Maximum Velocity: 500 mm/second
  • Maximum Positioning Resolution: 0.015 micrometers
  • Position Reproducibility: 0.05 micrometers unidirectional +/- 0.1 micrometers bidirectional
  • Linear Position Feedback Encoder: Included



Specifications & Drawings, Request Quote l PDF Datasheet


High Speed, High Precision Linear Stage, Linear-Motor-Driven: LMS-300 Series

 
High Speed, High Precision Linear Stage, Linear-Motor-Driven: LMS-300 Series
  • Motorized Positioning Range: 415 to 815 millimeters
  • Maximum Load: 100 kg
  • Maximum Velocity: 800 mm/second
  • Maximum Positioning Resolution: 0.005 micrometers
  • Position Reproducibility: 0.05 micrometers unidirectional +/- 0.05 micrometers bidirectional
  • Linear Position Feedback Encoder: Included



Specifications & Drawings, Request Quote l PDF Datasheet


Ultra High Precision Air Bearing Stages




PIglide A110

 
PIglide A110
  • Motorized Positioning Range: 400mm
  • Maximum Velocity: 1 m/s
  • Maximum Resolution: 1nm
  • No Exposed Cables or Air Lines (100mm Travel)


Specifications & Drawings, Request Quote


Atlas 201

 
Atlas 201
  • Motorized Positioning Range: 500mm
  • Maximum Load: 35kg
  • Maximum Velocity: 2 m/s
  • Maximum Acceleration: 2 G's
  • Maximum Positioning Resolution: 0.25µm, straightness/flatness
  • Table Size to 210mm x 210mm


Specifications & Drawings, Request Quote


High Load, Long Travel Stages




High Precision Linear Translation Stage: LS-180 Series

 
High Precision Linear Translation Stage: LS-180 Series
  • Motorized Positioning Range: 155 to 508 millimeters
  • Maximum Load: 100 kg
  • Maximum Velocity: 200 mm/second
  • Maximum Positioning Resolution: 0.05 micrometers
  • Position Reproducibility: 0.05 micrometers unidirectional 0.1 micrometers bidirectional
  • Linear Position Feedback Encoder: Optional



Specifications & Drawings, Request Quote l PDF Datasheet


Precision Linear Translation Stage: LS-270 Series

 
Precision Linear Translation Stage: LS-270 Series
  • Motorized Positioning Range: 155 to 1016mm
  • Maximum Load: 150 kg
  • Maximum Velocity: 150 mm/second
  • Maximum Positioning Resolution: 0.05 micrometers
  • Position Reproducibility: 0.05 micrometers unidirectional +/- 0.04 micrometers bidirectional
  • Linear Position Feedback Encoder: Optional



Specifications & Drawings, Request Quote l PDF Datasheet
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