Bookmark this site
Deutsch

Catalog Downloads
Technotes
PI Seminars
Manuals / Software

Download a PDF copy of PI Newsletter #40
Visit PI's New Online Store
See PI's New Informative Software Webpage
Miniature Piezo Motor / Slide for High Volume Applications
High-Dynamics Fast Steering Mirror Platforms Provide Larger Deflection-Angles
New High-Performance Piezo Actuators and High-Voltage Amplifiers
DuraAct™ Piezocomposite Patch Transducers for Adaptronics and Smart Structures
NEXACT®: Novel Compact OEM Piezo Stepping Motor / Actuator with Long Travel Range
Open-Frame XY Piezo-Motor Stage with Linear Encoders
Miniature Linear Translation Stage
Piezo Ceramic Motors / Piezo Linear Motor Stages / Non Magnetic Ceramic Actuators

RodDrive Ceramic Linear Motor Actuators High-Speed Ultrasonic Translation Stages High-Res / High Force Nanopositioning Motors XY Piezo Motor Linear Slide Controllers for Piezo Motors

Ultrasonic OEM Linear
    Motors
Compact
Load Capacity to 10 N
Travel: 20 mm-50 mm
20000 h MTBF
Vacuum Versions
Travel: to 20 mm
Self-Locking
Sub-nm Resolution

Travel: 25 x 25 mm
0.1 µm Resolution
Scanner Insert option
Open- & Closed-Loop
1-2 Channels
Integrated drivers

Highload Piezo Actuators Flexure Lever
Piezo Actuators		 Piezo® Bender
Actuators		 PICMA® Long Life Piezo Stacks Servo & Stepper Actuators

Extremely High Stiffness
Pushing Forces
    to 30,000 N
Pulling Forces
    to 3500 N
Flexure Guided
Closed- & Open-Loop
Resolution <1 nm
Closed-Loop
Vacuum-Compatible
Nanometer-Range
    Resolution
Extreme Lifetime
Sub-msec Response
Sub-nm Resolution
Travel to 50mm
50 nm Resolution
Affordable Stepper
    Versions

Download These Catalogs and Brochures for More Information...

More Data...

Selection Guides
Piezo Linear Motor Introduction
PILine® Ultrasonic Piezomotor Working
    Principle
NEXLINE® Piezo-Walk® Working Principle
Linear Actuators
    Catalog		 Miniature Linear
    Stages Brochure 		Piezo Motors Catalog

PI manufactures several types of piezoelectric linear motors: Ultrasonic piezo motors (resonant motors), and Piezo Walk® stepping motors. Both are intrinsically vacuum compatible, non-magnetic and are self locking at rest. They basically provide unlimited travel, yet they are very different in their design, specifications and performance.
PILine® ultrasonic resonant piezo motor actuators are characterized by very high speed to 1000 mm/s and a very compact and simple design (systems down to 8mm in length are available).
NEXLINE® and NEXACT® linear motors can achieve much higher forces and picometer range resolution but are more complex and not as fast.
PiezoWalk® and ultrasonic piezo motors are in principle nonmagnetic and vacuum-compatible, a perfect match for many applications in the semiconductor industry.



PILine® Ultrasonic Linear Piezo Motor / Actuators
Product Image - PILine Miniature High-Speed, Ultrasonic Piezo Linear Motor for OEMs

U-164 PILine® Linear Drive, Fast, Compact OEM Ultrasonic Linear Motor


  • Patented Principle Features with High Forces in Small Space
  • Easy Mounting
  • Max. Velocity 500 mm/s
  • Acceleration up to 5 g
  • Min. Incremental Motion to 0,05 µm
  • Self Locking, Push-/Pull Forces to 4 N
  • No Electro-Magnetic Fields
  • Integrated Actuators & Positioning Systems Also Available
Back to Top Product Description | Specs / Drawings | Ordering Info | PDF
Product Image - PILine RodDrive Integrated Piezo Linear Motor Drive

M-674 PILine® RodDrive Integrated Piezo Linear Motor Drive


  • Drive-Component for Integration into Micropositioning Systems
  • Flexible Choice of Travel Ranges to Several 100 mm
  • Flexible Choice of Push/Pull Forces to Several 10 N
  • Minimum Incremental Motion to 0.05 Micron
  • Velocity to 400 mm/s
  • Self-Locking
Product Description | Specs / Drawings | Ordering Info | PDF
PILine® Translation Stages
Product Image - PILine Miniature Translation Stages with Closed-Loop Ultrasonic Piezo Linear Motors

M-663 PILine® Miniature Translation Stages with Closed-Loop Ultrasonic Piezo Linear Motors


  • Smallest Translation Stage with Closed-Loop Linear Motor Drive and Linear Encoder
  • 19 mm Travel Range
  • Velocity up to 400 mm/s
  • Accelerations up to 20 g
  • Resolution to 0.1 Micron
  • Integrated Direct-Metrology Linear Encoder
  • AutoLock Feature
  • XY Combinations Available
  • 20000 h MTBF
  • Vacuum Versions Available
Back to Top Product Description | Specs / Drawings | Ordering Info | PDF
Product Image - PILine Miniature Translation Stages with Closed-Loop Ultrasonic Piezo Linear Motors

M-664 PILine® Miniature Translation Stages with Closed-Loop Ultrasonic Piezo Linear Motors


  • Travel Range 25 mm
  • Max. Velocity 400 mm/s
  • Ultra-Low Profile, 15 mm
  • Direct Metrology Linear Encoder with 0.1 µm Resolution
  • High Guiding Accuracy with Crossed Roller Bearings
  • Compact XY Combinations
  • Piezo Linear Motor with 6 N Drive Force
  • Self Locking at Rest
Back to Top Product Description | Specs / Drawings | Ordering Info | PDF
Product Image - PILine Miniature Translation Stages with Ultrasonic Piezo Linear Motors

M-661 - M-662 PILine® Miniature Translation Stages with Ultrasonic Piezo Linear Motors


  • Smallest Translation Stage with High-Speed Linear Motor Drive
  • 20 mm Travel Range
  • Velocity to 500 mm/s
  • Acceleration to 20 g
  • Resolution to 50 Nanometer
  • Self-Locking
  • XY-Combinations Available
  • 20000 h MTBF
  • Vacuum Versions to 10-7 hPa
Product Description | Specs / Drawings | Ordering Info | PDF

Product Image - PILine Low-Profile Translation Stages with Closed-Loop Ultrasonic Piezo Linear Motors

M-683 Precision Micro Translation Stage Low-Profile & High-Speed with Ultrasonic Piezomotor, Direct Position Metrology


  • Max. Velocity 350 mm/sLow Profile: Only 21 mm Height
  • Compact XY Combination Possible
  • Up to 6 N Force Generation
  • Direct Metrology Linear Encoder, 0.1 µm Resolution
  • Travel Ranges 25 and 50 mm
  • Excellent Guiding Accuracy Through Crossed Roller Bearings
  • PILine®: Non-Magnetic and Vacuum-Compatible Working Principle
  • Self-Locking at Rest
Product Description | Specs / Drawings | Ordering Info | PDF

Product Image - PILine Low-Profile Translation Stages with Closed-Loop Ultrasonic Piezo Linear Motors

M-692 PILIne® OEM Micro Linear Stage Cost-Effective, Low-Profile and Fast: Ultrasonic Piezomotor Drive


  • Travel Ranges 20 and 90 mm
  • Max. Velocity 350 mm/s
  • Very Low Profile: Only 14 mm Height
  • Closed-Loop with Linear Encoder
  • Cost-Effective Design
  • Compact XY Combination Possible
  • Up to 6 N Force Generation
  • Self-Locking at Rest
Product Description | Specs / Drawings | Ordering Info | PDF

Product Image - Low-Profile XY Open-Frame Piezomotor Stage with Linear Encoders

M-686 Low-Profile XY Open-Frame Piezomotor Linear Slide with Linear Encoders


  • Integrated Closed-Loop Piezomotor Drives Provide High Speed to 100 mm/s
  • 25 x 25 mm Travel Ranges
  • Integrated Linear Encoders with 0.1 µm Resolution
  • Compact Design; 27 mm Profile Height, 150 x 150 mm Footprint
  • Large Clear Aperture 78 x 78 mm, 66 x 66 mm in Extreme Position
  • Self-Locking at Rest
  • Compatible with PI Piezo Nanopositioning / Scanning Stages
Product Description | Specs / Drawings | Ordering Info | PDF
NEXLINE® / NEXACT® Nanopositioning Drives
Prodcut Image - NEXLINE Miniature High-Load Piezo Nanopositioning Drive

N-310 NEXLINE® Compact NEXACT® OEM Piezo Stepping Drives


  • 20 mm Standard Travel Range
  • Compact and Cost-Effective Design
  • 0.03 nm Resolution
  • To 10 N Push/Pull Force
  • Low Operating Voltage
  • Self Locking, with no Heat Dissipation, Nanometer Stability
  • Non-Magnetic and Vacuum-Compatible Working Principle
Product Description | Specs / Drawings | Ordering Info | PDF
Prodcut Image - NEXLINE Linear Actuator, Manipulator, Piezo Stepper

N-380, N-381 NEXLINE® Linear Actuator, Manipulator, Piezo Stepper


  • Travel Range 30 mm
  • Novel, Zero-Wear Piezo Stepping Drive, Ideal for Micro- and Nano-Manipulation
  • Integrated Linear Encoder Option for Highest Accuracy with 20 nm Resolution
  • Very High Acceleration, e.g. for Cell Penetration
  • Two Operating Modes: Continuous Stepping Mode and Continuously Variable, High-Dynamics Analog Mode for 30 pm Resolution**
  • Up to 10 N Force Generation
  • Self Locking at Rest, no Heat Generation
  • Smooth Motion, no Closed-Loop Jitter
  • Vacuum-Compatible and Non-Magnetic Versions
Back to Top Product Description | Specs / Drawings | Ordering Info | PDF
Prodcut Image - NEXLINE Miniature High-Load Piezo Nanopositioning Drive

N-111 NEXLINE® OEM Linear Actuator Nanopositioning Over Long Travel, PiezoWalk® Principle


  • Travel Range 10 mm
  • Resolutionto 0.025 nm Open-Loop,5 nm Closed-Loop
  • Up To 50 N Force Generation and 70 N Holding Force
  • Self-Locking at Rest, No Heat Generation
  • Non-Magnetic and Vacuum-Compatible Working Principle
  • Cleanroom Compatible
Back to Top Product Description | Specs / Drawings | Ordering Info | PDF
Product Image - NEXLINE High-Load Piezo Nanopositioning Drive

N-216 NEXLINE® Linear Actuator High-Force PiezoWalk® Drive for Long-Range Nanopositioning


  • Travel Range 20 mm
  • Resolutionto 0.03 nm Open-Loop, 5 nm Closed-Loop
  • Up to 800 N Holding Force
  • Self-Locking at Rest
  • Non-Magnetic and Vacuum-Compatible Working Principle
  • Cleanroom Compatible
Product Description | Specs / Drawings | Ordering Info | PDF


 
Hexapods    Piezo    P-652 Piezo Motor   Nanopositioning Catalog   Piezo Nano-Positioning and Parallel Kinematics    White Papers on Piezo Motor Design