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Modular Digital Piezo Controller & Driver, 3 & 6 Axis
Next Generation Digital Piezo Controller for Nanopositioning Applications
PI Newsletter #36: M-810 Mini Hexapod, S-330 High Dynamics Steering Mirrors, P-737 Specimen Scanning Stage, E-753 Piezo Controller
Fast Piezo-Z Stage for Microscope Automation, 3D-Imaging
Open-Frame XY Piezo-Motor Linear Slide with Encoders
Tools for Microscopy, Imaging, Biotech, Nanotechnology

PIFOC® Objective Scanners Well Plate Scanner, Z-Axis Stages XY & XYZ Scanning Stages XYZ for SPM, AFM XY Linear Motor Stages

Sub-nm Resolution
Fast Response
Travel: To 460 µm

Travel: To 500 µm
Nanometer Resolution
Millisecond
    Response Times

To 300µm /Axis
Low Profile
Choice of Sensors

Travel: 5 x 5 x 5 µm
Compact
1 msec Step & Settle

Travel: 25 x 25 mm
Compact Design
Compatible with PI
    Scanning Stages
Fast Beam Steering Mirrors Nano-Manipulators, Piezo Steppers 6-Axis Alignment Systems Digital & Analog Piezo Controllers High Speed Controllers & Amplifiers

Optical Deflection to
    100 mrad
Closed-Loop
Zero Friction Flexure
    Guides

Long Travel
High Speed
Very High Resolution

Travel: 40 mm / 60ş
Parallel Kinematics
Sub-Micron Precision

1 to 6 Axes
High Speed Interfaces
External Software
    Support

Analog & Digital
    Controllers
Benchtop &
    OEM Versions

 
Piezo positioning & scanning stages are fundamental tools for high-resolution microscopy. The rapid response and sub-atomic resolution allow scientists to create higher-quality images faster. PI provides a large variety of fast objective lens positioners (Z-motors), as well as sample scanners for deconvolution and 3D imaging (Z-stack acquisition) and fast focusing stages.

PIFOC® piezo-actuated Z-scanners typically achieve 10 times higher focusing speed & precision than motorized drives. Controllers come with a high-bandwidth analog interface for extremely fast response and compatibility with all major image acquisition packages.

More Information & Catalog Downloads...


 
PIFOC® High-Speed Nanofocusing Z-Drives
Product Image - High-Speed Nanofocusing/Scanning Z-Drives with Direct Metrology

P-721 PIFOC® High-Speed Nanofocusing/Scanning Z-Drives for Super-Resolution Microscopy


  • Scans and Positions Objectives with Sub-nm Resolution
  • High Linearity and Stability with Direct-Measuring Sensors
  • Travel to 100 µm, fast Settling Time
  • Very Straight Motion for Enhanced Focus Stability
  • Ask about DIC Prism Holder Option
  • Ideal for Super-Resolution Microscopy Applications
  • Compatible with Metamorph™ Imaging Software
  • Quick Lock Adapter for Easy Attachment
Product Description | Specs / Drawings | Request Quote | PDF
Product Image - High-Speed Nanofocusing/Scanning Z-Drives

P-720 PIFOC® High-Speed Microscope Objective Nanofocusing/Scanning Z-Drives


  • Scans and Positions Objectives with Sub-nm Resolution
  • Low Inertia for Fast Settling
  • Frictionless Precision Flexure Guiding System
  • Travel to 100 µm
  • Straightness of Travel Ł13 µrad
  • PICMA® High-Performance Piezo Drives
Back to Top Product Description | Specs / Drawings | Request Quote | PDF
Product Image - Long Range Nanofocusing/Scanning Z-Drives with Direct Metrology

P-725 PIFOC® Long-Range, High-Speed Nanofocusing Z-Drives with Direct Metrology


  • Scans and Positions Objectives with Sub-nm Resolution
  • High Linearity and Stability with Direct-Measuring Capacitive Sensors
  • Travel to 460 µm, Fast Response & Settling Time
  • Frictionless Precision Flexure Guiding System
  • Enhanced Guiding Precision for Better Focus Stability
  • Ask about DIC Prism Holder Option
  • Controller Compatible with Metamorph™ Imaging Software
  • Quick Lock Adapter for Easy Attachment
Product Description | Specs / Drawings | Request Quote | PDF
Product Image - High-Power Nanofocusing/Scanning Z-Drives with Direct Metrology

P-726 High-Power PIFOC® Nanofocusing Z-Drives


  • Resonant frequency: 430 Hz (with 300 g), 1100 Hz without objective
  • Closed-loop position noise: <0.4 nm
  • Position stability over 100 s: 4 nm
  • Maximum operating frequency (amplitude <10 µm): 150 Hz*
  • Maximum operating frequency with full travel (100 µm): 60 Hz*
  • Settling time (10 µm steps): 6 ms**
  • Settling time (full travel): 15 ms**
Back to Top Product Description |
Product Image - Fast Beam Steering Mirrors

S-334 S-334 Miniature Piezo Tip/Tilt-Mirror


  • Miniature Design
  • Optical Beam Deflection to 120 mrad (~ 6.8°)
  • Coplanar Axes & Fixed Pivot Point Eliminate Polarization Rotation
  • Factory Installed Mirror
  • Millisecond Response, Resolution to 0.5 µrad
  • Closed-loop Position Servo-Control for High Accuracy
  • For Mirrors up to 12.5 mm (0.5") Diameter
  • Frictionless, High-Precision Flexure Guiding System
  • Parallel Kinematics for Enhanced Dynamics and Better Multi-Axis Accuracy
Product Description | Specs / Drawings | Request Quote | PDF

Product Image - Low-Profile Z/Tip/Tilt Piezo Nanopositioning Stages for Microscopy with Parallel Metrology

P-541.ZCD Low-Profile Z/Tip/Tilt Piezo Nanopositioning Stages for Microscopy with Parallel Metrology


  • Lowest Profile Z-Tip/Tilt Stage: Only 16.5 mm (0.6")
  • Z and Tip/Tilt Versions
  • Choice of Strain Gauge (Lower Cost) or Capacitive Sensors (Higher Performance)
  • 100 µm Linear Travel Range, 1 mrad Tilt
  • 80 x 80 mm Clear Aperture
  • PICMA® High-Performance Piezo Actuators for Superior Lifetime
  • Ideal for fast Z-Stack Acquisition and 3D Deconvolution Imaging

Product Description | Specs / Drawings | Request Quote | PDF
Product Image - Z-Axis Microscopy Piezo Stage for High-Resolution Sample Positioning and Scanning

P-737 PIFOC® Z-Axis Microscopy Piezo Stage for High-Resolution Sample Positioning and Wellplate Scanning


  • High-Speed Piezo Z-Motion with Travel Ranges to 500 µm
  • Nanometer Resolution
  • Large Clear Aperture for Wellplate Scanning, Specimen Holders
  • Perfect Mechanical Fit to XY OEM Manual or Motorized Stages
  • Sub-Millisecond Response Times
Product Description | Specs / Drawings | Request Quote | PDF

Product Image - PI nano™ Z, Low Profile, Low Cost, High-Speed Piezo-Z Slide Scanner

P-736 PI nano™ Z, Low Profile, Low Cost, High-Speed Piezo-Z Slide Scanner


  • Extremely Fast Step & Settle, From 5 msec
  • Low Profile for Easy Integration: 20 mm (0.8")
  • 100 and 200 µm Travel Ranges
  • Longest Lifetime with Proprietary PICMA® Piezo Technology
  • Cost Effective due to Low-Cost Piezoresistive Sensors
  • Compatible w/ Leading Image Acquisition Software Packages
  • Closed-Loop Control for High Repeatability and Accuracy
  • 24 Bit USB Controller & Software Included

Product Description
XY & XYZ Scanning Stages
Product Image - Low-Profile, XY Piezo Scanning Microscopy Stages with Parallel Metrology

P-545 PI nano™ XY & XYZ 1x3 Piezo Stage Systems


  • Low Profile for Easy Integration: 20 mm (0.8“)
  • Large Aperture for 1x3"Slides. Accessories & Holders Available
  • All Parts Black Anodized for Minimum Reflections
  • 200µm Standard Travel Range, Longer Ranges Available
  • Longest Lifetime with Proprietary PICMA® Piezo Technology
  • Cost Effective due to Low-Cost Piezoresistive Sensors
  • Compatible w/ Leading Image Acquisition Software Packages
  • Closed-Loop Control for High Repeatability and Accuracy
  • Millisecond Step Time, ideal for Super-Resolution Microscopy
  • Recessed Sample Holders for Maximized Utility

Product Description | Download the Tools for Microscopy Catalog | Controller Manual | Request Quote
Product Image -  M-545 Open-Frame Microscope Stage
Long-Range Motion for Sample Positioning

M-545 Open-Frame Microscope Stage Long-Range Motion for Sample Positioning


  • Carries Directly P-545 PI nano™ Nanopositioning Stages
  • Low Profile for Easy Integration: 30 mm
  • 25 x 25 mm Travel Range
  • Micrometer Screws, Motor Upgrade Available
  • For Nikon, Zeiss, Leica und Olympus Microscopes
Back to Top Product Description | Specs / Drawings | Request Quote
Product Image -  Low-Profile OEM XY Piezo-Scanners for Imaging Applications

P-713 · P-714 Low-Profile OEM XY Piezo-Scanners for Imaging Applications


  • Ideal for Interlacing, CCD Resolution Enhancement
  • Compact Size of only 45 x 45 x 6 mm
  • Clear Aperture
  • Highly Cost-Efficient Design
  • 15 x 15 µm Travel Range
  • Parallel-Kinematics Design for Higher Dynamics
Back to Top Product Description | Specs / Drawings | Request Quote | PDF
Product Image -  Ultra-High-Speed, XY / XYZ Scanning Microscopy Stages with Parallel Metrology

P-733.2DD · P-733.3DD Ultra-High-Speed, XY / XYZ Scanning Microscopy Stages with Parallel Metrology


  • Higher Speed Through Direct Drive
  • Up to 2.2 kHz Resonant Frequency in X and Y
  • 30 x 30 or 30 x 30 x 10 µm Travel Range
  • 100 Picometers Resolution
  • Capacitive Sensors for Highest Linearity
  • Parallel-Kinematics/Metrology for Enhanced Responsiveness / Multi-Axis Precision
  • Active Runout Compensation
  • 50 x 50 mm Clear Aperture
  • Frictionless Precision Flexure Guiding System
  • PICMA® High-Performance Piezo Drives
Back to Top Product Description | Specs / Drawings | Request Quote | PDF
Product Image - High-Dynamics XY and XYZ Nanopositioning / Scanning Stages

P-733 High-Dynamics XY and XYZ Nanopositioning / Scanning Stages with Parallel Metrology


  • Travel Ranges of 100 x 100 µm in X, Y and 10 µm in Z
  • Direct Metrology with Capacitive Sensors
  • Resolution to 0.1 nm
  • Parallel Kinematics for Better Multi-Axis Accuracy and Dynamics
  • Parallel Metrology for Active Trajectory Control
  • 50 x 50 mm Clear Aperture for Transmitted-Light Applications
  • Vacuum Compatible for Applications to 10-9 hPa
Product Description | Specs / Drawings | Request Quote | PDF

Product Image - Low-Profile, XY Piezo Scanning Microscopy Stages with Parallel Metrology

P-541.2CD Low-Profile, XY Piezo Scanning Microscopy Stages with Parallel Metrology


  • Low Profile for Easy Integration: 16.5 mm (0.6")
  • Parallel Kinematics and Optional Parallel Metrology for Fast Response and Superior Multi-Axis Precision
  • Choice of Strain Gauge (Lower Cost) or Capacitive Sensors (Higher Performance)
  • To 200 x 200 µm Travel Range
  • Direct Drive Version for High-Speed Positioning & Scanning
  • 80 x 80 mm Clear Aperture
  • PICMA® High-Performance Piezo Actuators for Superior Lifetime

Product Description | Specs / Drawings | Request Quote | PDF

Product Image - PIMars™ XYZ Piezo Scanning- and Nanopositioning Stages

P-561 · P-562 · P-563 PIMars™ XYZ Piezo Scanning- and Nanopositioning Stages with Parallel Metrology


  • To 300 x 300 x 300 µm Travel Range
  • Parallel-Kinematics/Metrology for Enhanced Responsiveness / Multi-Axis Precision
  • Direct Metrology with Capacitive Sensors for Highest Precision
  • 66 x 66 mm Clear Aperture
  • Versions to 6-DOF
  • Ultra-Fast XY and XYZ Versions Available
  • Ultra-High-Vacuum Versions up to 10-9 hPa Available
  • Invar, Super-Invar and Titanium Versions Available
  • PICMA® High-Performance Piezo Drives

Back to Top Product Description | Specs / Drawings | Request Quote | PDF

Product Image - Low-Profile XY Open-Frame Piezomotor Stage with Linear Encoders

M-686 Low-Profile XY Open-Frame Piezomotor Linear Slide with Linear Encoders


  • Integrated Closed-Loop Piezomotor Drives Provide High Speed to 100 mm/s
  • 25 x 25 mm Travel Ranges
  • Integrated Linear Encoders with 0.1 µm Resolution
  • Compact Design; 27 mm Profile Height, 150 x 150 mm Footprint
  • Large Clear Aperture 78 x 78 mm, 66 x 66 mm in Extreme Position
  • Self-Locking at Rest
  • Compatible with PI Piezo Nanopositioning / Scanning Stages

Product Description | Specs / Drawings | Request Quote | PDF
XYZ for SPM, AFM
Prodcut Image - High-Speed, XY(Z) Piezo Stages for Nanotechnology, SPM, AFM

P-363 PicoCube® High-Speed, XY(Z) Piezo Stages for Nanotechnology, SPM, AFM


  • Ultra-High-Performance Closed-Loop Scanner for AFM/SPM
  • Compact Manipulation Tool for Nanotechnology
  • Resonant Frequency 9.8 kHz
  • Ultra-High-Precision Capacitive Feedback
  • Parallel-Motion Metrology for Highest Linearity and Stability
  • 50 Picometers Resolution
  • 5 x 5 x 5 µm Travel Range
  • Very Small Package
  • Rugged Design
Product Description | Specs / Drawings | Request Quote | PDF
Prodcut Image - Miniature Hexapod

M-810 – Minature Hexapod


  • Most-Compact Hexapod in the PI Portfolio
  • Travel Range 40 x 40 x 13 mm
  • Resolution of a Single Strut <100 nm
  • Integrated Driver Electronics
Product Description | Specs / Drawings | Request Quote | PDF
Prodcut Image - Piezoceramic Tubes (HVPZT)

PT120 – PT140 Piezoceramic Tubes (HVPZT)


  • Standard & Custom Sizes
  • For OEM Applications
  • XYZ-Positioning
  • Sub-Nanometer Resolution
  • Large Diameters to 80 mm
  • Wall Thickness as Small as 0.3 mm
  • For Scanning Microscopy (STM, SFM, etc.)
Back to Top Product Description | Specs / Drawings | Request Quote | PDF
Prodcut Image - Linear Actuator, Manipulator, Piezo Stepper

N-380, N-381 NEXACT® Linear Actuator, Manipulator, Piezo Stepper


  • Travel Range 30 mm
  • Novel, Zero-Wear Piezo Stepping Drive, Ideal for Micro- and Nano-Manipulation
  • Integrated Linear Encoder Option for Highest Accuracy with 20 nm Resolution
  • Very High Acceleration, e.g. for Cell Penetration
  • Two Operating Modes: Continuous Stepping Mode and Continuously Variable, High-Dynamics Analog Mode for 30 pm Resolution**
  • Up to 10 N Force Generation
  • Self-Locking at Rest, no Heat Generation
  • Smooth Motion, no Closed-Loop Jitter
  • Vacuum-Compatible and Non-Magnetic Versions
Back to Top Product Description | Specs / Drawings | Request Quote | PDF
High Speed Controllers & Amplifiers
Prodcut Image - Compact LVPZT Piezo Amplifier & Servo-Controller

E-625 Compact LVPZT Piezo Amplifier & Servo-Controller with High-Speed RS-232 Interface


  • Integrated 20-Bit High-Speed RS-232 Interface
  • Network Capability with up to 4 Channels
  • For Capacitive, LVDT and Strain Gauge Position Sensors
  • Wave Table for User-Defined Curves
  • GCS (General Command Set) Compatible
Product Description | Specs / Drawings | Request Quote | PDF
Prodcut Image - LVPZT Piezo Amplifier / Servo-Controller

E-665 LVPZT Piezo Amplifier / Servo-Controller with Fast RS-232 Interface


  • Integrated High-Speed RS-232 Interface & 20-bit DAC
  • Network Capability with up to 12 Channels
  • Piezo Driver with 36 W Peak Power
  • SGS, LVDT and Capacitive Sensor Servo-Control
  • Table for User-Defined Curves
  • GCS (General Command Set) Compatible
  • UL and CSA certified
Back to Top Product Description | Specs / Drawings | Request Quote | PDF
Product Image - Digital Piezo Controller

E-761 Digital Piezo Controller


  • Winner of the SEMI Technology Innovation Showcase Award
  • 20 mm Travel Range, <0.1 Nanometer Resolution (Open-Loop)
  • Integrated High-Resolution Incremental Encoder (Closed-Loop)
  • Active Force Generation to 400 N
  • >600 N Holding Force, Self-Locking
Product Description | Specs / Drawings | Request Quote | PDF
Piezo Drivers, Piezo Amplifiers, Piezo Nanopositioning Controllers Overview
Product Image - PI Controlelrs and Amps

More Information on PI Controllers, Drivers and Amplifiers


Papers on PI Products in Microscopy Applications