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Miniature Piezo Motor / Slide for High Volume Applications
High-Dynamics Fast Steering Mirror Platforms Provide Larger Deflection-Angles
New High-Performance Piezo Actuators and High-Voltage Amplifiers
DuraAct™ Piezocomposite Patch Transducers for Adaptronics and Smart Structures
NEXACT®: Novel Compact OEM Piezo Stepping Motor / Actuator with Long Travel Range
Open-Frame XY Piezo-Motor Stage with Linear Encoders
Miniature Linear Translation Stage
Micropositioning Stages & Hexapods

Hexapod Six-Axis
Micropositioning		 Actuators &
Micrometers		 Voice Coil
Scanning Stages		 Vertical
Translation Stages		 Rotation Stages
& Tilt Stages

6º of Freedom
Vacuum Compatible
Capacity: To 200 kg
Travel: 10 mm-50 mm
Forces to 30 N
Resolution to 50 nm
Scanning Freq:10s of Hz
Velocity to 240 mm/s
Travel: 20 mm / 6 mm

ActiveDrive™ Motor
Fast Response
Travel: to 12.5 mm (1/2")
Forces to 100 kN
Sub-nm Resolution
Fast Response

Linear Translation
Stages		 Motorized
Micro-Series		 Piezo Linear Motors/Stages Motion
Controllers		 Piezo Nanopositioning
Stages

ActiveDrive™ Motor
Lead- or Ball- Screw
    Drive
Travel: 5 to 306 mm

Miniature Stages
Lead- or Ball- Screw
    Drive
Travel: to 25 mm or 360°

Fast Scanning
Ultrasonic Motor Drives
Compact

Servo/Stepper/
    Piezomotor Options
1-18 Channel Options
PC-Card, OEM /
    Rack-mount

1-6 Axis
Sub-nm precision
Low-Profile Options
 

PI is the world leader in parallel kinematics six-axis hexapod precision positioning systems. In addition to multi-axis hexapod micro-robots, PI also offers a wide selection of innovative precision positioning stages for scientific and industrial applications.

Advantages: ultra-compact precision stages; choice of drives (piezo linear motor, voice-coil linear motor, or DC-servo / stepper with ballscrew or leadscrew); choice integration (integrated servo driver, integrated controller); piezo-upgrades.

More Information...

Selection Guides
Hexapods Brochure
Experience / Custom Systems
Reasons for Choosing PI
Test and Quality Control
Precision Miniature Translation Stages Catalog


Linear Translation Stages

Product Image - Fast Miniature Linear Translation Stage with Integrated Optical Linear Encoder

M-122 Fast Miniature Linear Translation Stage with Integrated Optical Linear Encoder


  • Travel Range 25 mm
  • 0.1 µm Optical Linear Encoder for Highest Accuracy & Repeatability
  • Min. Incremental Motion to 0.2 µm
  • Max. Velocity 20 mm/s
  • Cross-Roll Bearings
  • Recirculating Ball Screw Drives Provide High Speeds & Long Lifetimes
Product Description | Specs / Drawings | Ordering Info | PDF
Product Image - High-Resolution Micro-Translation Stages with Ballscrew Drive

M-110.2 - M-112.2 High-Resolution Micro-Translation Stages with Ballscrew Drive


  • Travel Ranges 5, 15 and 25 mm
  • MTBF 5000 h
  • Very Cost Effective
  • Min. Incremental Motion to 50 nm
  • Max. Velocity 2 mm/s
  • Closed-Loop DC Motors and Stepper Motors
  • Non-Contact Limit and Reference Switches
  • Optional Recirculating Ball Screw Drives Provide High Speeds & Long Lifetimes
  • Vacuum-Compatible Versions Available to 10-6 hPa
Product Description | Specs / Drawings | Ordering Info | PDF
Product Image - PILine Miniature Translation Stages

M-663 PILine® Miniature Translation Stages with Closed-Loop Ultrasonic Piezo Linear Motors


  • Smallest Translation Stage with Closed-Loop Linear Motor Drive and Linear Encoder
  • 20 mm Travel Range
  • Velocity up to 500 mm/s
  • Accelerations up to 20 g
  • Resolution to 0.1 Micron
  • Integrated Direct-Metrology Linear Encoder
  • AutoLock Feature
  • XY Combinations Available
  • 20,000 h MTBF
  • Vacuum Versions Available
Product Description | Specs / Drawings | Ordering Info | PDF
Product Image - PILine Miniature Translation Stages with Closed-Loop Ultrasonic Piezo Linear Motors

M-664 PILine® Miniature Translation Stages with Closed-Loop Ultrasonic Piezo Linear Motors


  • Travel Range 25 mm
  • Max. Velocity 400 mm/s
  • Ultra-Low Profile, 15 mm
  • Direct Metrology Linear Encoder with 0.1 µm Resolution
  • High Guiding Accuracy with Crossed Roller Bearings
  • Compact XY Combinations
  • Piezo Linear Motor with 6 N Drive Force
  • Self Locking at Rest
Back to Top Product Description | Specs / Drawings | Ordering Info | PDF
Product Image - PILine Miniature Translation Stages with Ultrasonic Piezo Linear Motors

M-661 - M-662 PILine® Miniature Translation Stages with Ultrasonic Piezo Linear Motors


  • Smallest Translation Stage with High-Speed Linear Motor Drive
  • 20 mm Travel Range
  • Velocity to 500 mm/s
  • Acceleration to 20 g
  • Resolution to 50 Nanometer
  • Self-Locking
  • XY-Combinations Available
  • 20000 h MTBF
  • Vacuum Versions to 10-7 hPa
Product Description | Specs / Drawings | Ordering Info | PDF

Product Image - PILine Low-Profile Translation Stages with Closed-Loop Ultrasonic Piezo Linear Motors

M-682 Compact Closed-Loop Translation Stage with High-Force Powerful Piezomotor Drive


  • Integration of the Powerful PILine® RodDrive
  • Low Profile, Compact Dimensions
  • Max. Velocity 350 mm/s
  • Up to 7 N Pushing Force
  • Direct Metrology Linear Encoder, 0.1 µm Resolution
  • Non-Magnetic and Vacuum-Compatible Versions Available
Product Description | Specs / Drawings | Ordering Info | PDF

Product Image - Low-Profile XY Open-Frame Piezomotor Stage with Linear Encoders

M-686 Low-Profile XY Open-Frame Piezomotor Stage with Linear Encoders


  • Integrated Closed-Loop Piezomotor Drives Provide High Speed to 100 mm/s
  • 25 x 25 mm Travel Ranges
  • Integrated Linear Encoders with 0.1 µm Resolution
  • Compact Design; 27 mm Profile Height, 150 x 150 mm Footprint
  • Large Clear Aperture 78 x 78 mm, 66 x 66 mm in Extreme Position
  • Self-Locking at Rest
  • Compatible with PI Piezo Nanopositioning / Scanning Stages
Product Description | Specs / Drawings | Ordering Info | PDF
Product Image - Series of Miniature Translation Stages

M-311 – M-318 Miniature Translation Stages


  • Extremely Compact
  • All-Stainless-Steel Construction
  • X, XY and XYZ Versions
  • Optional PiezoMike for Nanometer Resolution
  • 4 mm Clear Aperture
  • Linear Ball Bearings
Product Description | Specs / Drawings | Ordering Info | PDF
Product Image - Ultra-High-Precision, Side-Drive Stages with Magnetic-Kinematic Bearings

M-011 Ultra-High-Precision, Side-Drive Stages with Magnetic-Kinematic Bearings


  • Travel Range to 15 mm
  • Compact Side Drive
  • Straightness/Flatness ≤ 0.2 Micron
  • PZT Drive for Scanning and Tracking Applications
  • 0.1 Micron Resolution with Closed-Loop DC Motor
  • 5 Nanometer Resolution with Closed-Loop PZT Drive
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Product Image - Ultra-High-Precision, Side-Drive Stages with Magnetic-Kinematic Bearings

M-014 Ultra-High-Precision, Side-Drive Stages with Magnetic-Kinematic Bearings


  • Travel Range 25 mm
  • Compact Side Drive
  • Straightness/Flatness ≤0.3 Micron
  • PZT Drive for Scanning and Tracking Applications
  • 0.1 Micron Resolution with Closed-Loop DC Motor
  • 5 Nanometer Resolution with Closed-Loop PZT Drive
  • 30 mm Ř Clear Aperture
Product Description | Specs / Drawings | Ordering Info | PDF
Product Image - Translation Stages with Crossed Roller Bearings

M-126 Translation Stages with Crossed Roller Bearings


  • To 25 mm Travel Range
  • Manual, DC-Servo and Stepper-Motor Drives
  • ActiveDrive™ Option
  • Compatible with Leading Industrial Motion Controllers
  • Crossed Roller Bearings
  • <0.1 Micron Resolution
  • XY and XYZ Combinations
  • Direction-Sensing Origin Switch
  • Non-Contact Limit Switches
Product Description | Specs / Drawings | Ordering Info | PDF
Product Image - High-Resolution Translation Stages with Stepper and DC Motor Drives

M-403, M-404, M-413, M-414 High-Resolution Translation Stages with Stepper and DC Motor Drives


  • Cost-Effective Design
  • Modular System with 4 Series: M-403, M-404, M-413, M-414
  • Preloaded Leadscrews or Recirculating Ball Screws
  • Travel Ranges from 25 to 300 mm
  • Stress-Relieved Aluminum Base 80 and 120 mm Width
  • Minimum Incremental Motion to 0.1 Micron
  • Resolution to 0.017 Micron
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Product Image - High-Precision Translation Stages with Crossed Roller Bearings

M-400 Series High-Precision Translation Stages with Crossed Roller Bearings


  • Travel Ranges to 150 mm
  • Stress-Relieved Aluminum Stage Base for Highest Stability
  • Crossed Roller Bearings
  • Manual, DC-Servo and Stepper-Motor Drives, ActiveDrive™ Option
  • Compatible with Leading Industrial Motion Controllers
  • Manual Knob for Convenient Position Adjustment
  • Non-Contact Direction-Sensing Origin Switch
  • Non-Contact Limit Switches
Product Description | Specs / Drawings | Ordering Info | PDF
Product Image - Ultra-Compact, High-Accuracy Translation Stages

M-605 Ultra-Compact, High-Accuracy Translation Stages


  • Integrated Linear-Scale Encoders for Highest Accuracy
  • Travel Ranges 25 mm (1") and 50 mm (2")
  • Velocity up to 50 mm/sec.
  • Active Drive™ Motors
  • Compatible with Leading Industrial Motion Controllers
  • Stress-Relieved Aluminum Stage Base for Highest Stability
  • Zero-Backlash Recirculating Ballscrews
  • Non-Contact, Direction-Sensing Origin Switch
  • Non-Contact Limit Switches
  • Load Capacity 20 kg
  • >20,000 Hours MTBF
Product Description | Specs / Drawings | Ordering Info | PDF
Product Image - Low-Profile Translation Stages with Ballscrew Drives

M-505 Low-Profile Translation Stages with Ballscrew Drives


  • Travel Ranges to 150 mm (6 inches)
  • Velocity up to 50 mm/sec.
  • ActiveDrive™ Motors
  • Compatible with Leading Industrial Motion Controllers
  • Stress-Relieved Aluminum Stage Base for Highest Stability
  • Zero-Backlash Recirculating Ballscrews
  • Non-Contact Direction-Sensing Origin Switch
  • Non-Contact Limit Switches
  • Load Capacity 100 kg
  • > 20,000 Hours MTBF
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Product Image - Low-Profile, High-Load Translation Stages with Ballscrew Drives

M-511 · M-521 · M-531 Low-Profile, High-Load Translation Stages with Ballscrew Drives


  • Travel Ranges to 306 mm (12")
  • Velocity up to 125 mm/sec.
  • ActiveDrive™ Motors
  • Compatible with Leading Industrial Motion Controllers
  • Linear-Scale Encoders for Highest Accuracy
  • Stress-Relieved Aluminum Stage Base for Highest Stability
  • Zero-Backlash Recirculating Ballscrews
  • Non-Contacting Origin and Limit Switches
  • PIIntelliStage™ Version with Integrated Controller
  • Load Capacity 100 kg
  • >20000 Hours MTBF
Product Description | Specs / Drawings | Ordering Info | PDF
Product Image - Voice-Coil Scanning System

M-511.HD Long-Travel, High-Speed Nanopositioning Systems


  • Hybrid Sytem Combines Advantages of Piezoelectrics and Electromagnetic Drives
  • 4 Nanometer Linear Encoder Resolution
  • 100 mm Travel
  • Velocities to 125 mm/sec
  • Active Compensation of Stick/Slip During Startup and Settling
  • Active Backlash Compensation
  • Excellent Velocity Control
  • Millisecond Settling to Nanometer Accuracy
  • Reliable Execution of Minimal Increments
  • High Drive and Holding Forces with Minimal Power
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Voice Coil Scanning Stages
Product Image - Voice-Coil Scanning System

V-106 Long-Travel, High-Dynamics Scanning System with Voice Coil Drives


  • Fast Scanning and Positioning
  • Scanning Frequency 10s of Hz
  • Travel Ranges of 20 mm and 6 mm
  • Velocity up to 240 mm/s
  • Linear Encoder Allows 0.2 Micron Repeatability
  • Available PCI-Card Controller with On-Board Amplifiers
Product Description | Specs / Drawings | Ordering Info | PDF

Actuators & Micrometers

Product Image - High-Resolution DC-Mike Actuators

M-227 High-Resolution DC-Mike Actuators


  • 10, 25 & 50 mm Travel Ranges
  • 0.05 Micron Minimum Incremental Motion
  • Non-Rotating Tip
  • Closed-Loop DC Motor
  • Compatible with Leading Industrial Motion Controllers
  • Sub-Nanometer Resolution with Optional PZT Drive
  • >5,000 Hours MTBF
Product Description | Specs / Drawings | Ordering Info | PDF
Product Image - High-Resolution Closed-Loop DC-Mike & Stepper Actuators

M-228 - M-229 Stepper-Mike Linear Actuators with Limit Switches


  • Cost-Efficient Design
  • To 10 mm or to 25 mm Travel Range
  • 46 nm Resolution (with C-663 Controller)
  • 50 N Load Capacity
  • Non-Rotating Tip
  • Max. Velocity 1.5 mm/s
  • Non-Contact Limit and Reference Switches Compact Design
Back to Top  M-228 Product Description | M-228 Specs / Drawings | M-228 Ordering Info | M-228 PDF
Parametric Search      M-229 Product Description | M-229 Specs / Drawings | M-229 Ordering Info | M-229 PDF
Product Image - High-Resolution Closed-Loop DC-Mike & Stepper Actuators

M-230 High-Resolution Closed-Loop DC-Mike & Stepper Actuators


  • 10 & 25 mm Travel Range
  • 0.05 Micron Minimum Incremental Motion
  • Non-Rotating Tip
  • Velocity to 2 mm/sec.
  • Closed-Loop DC Motors and Stepper Motors
  • Compatible with Leading Industrial Motion Controllers
  • Integrated Hall-Effect Origin and Limit Switches
  • Front Mount or Clamp Mount
  • >5,000 Hours MTB
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Product Image - High-Resolution Closed-Loop DC-Mike Actuators

M-231 High-Resolution Closed-Loop DC-Mike Actuators


  • 17 mm Travel Range
  • 0.1 Micron Minimum Incremental Motion
  • Velocity up to 2.5 mm/sec.
  • Closed-Loop DC Motor
  • Compatible with Leading Industrial Motion Controllers
  • Integrated Hall-Effect Origin and Limit Switches
  • Fits M-105 & F-110 Fiber Aligners
  • >5,000 Hours MTBF
Product Description | Specs / Drawings | Ordering Info | PDF
Product Image - Compact, High-Resolution, Closed-Loop DC-Mike Actuator

M-232 Compact, High-Resolution, Closed-Loop DC-Mike Actuator


  • 17 mm Travel Range
  • 0.1 Micron Minimum Incremental Motion
  • Velocity up to 2.5 mm/sec.
  • Closed-Loop DC Motor
  • Compatible with Leading Industrial Motion Controllers
  • Integrated Hall-Effect Limit and Origin Switches
  • Fits M-105 & F-110 Fiber Aligners
  • >5,000 Hours MTBF
Product Description | Specs / Drawings | Ordering Info | PDF
Product Image - Heavy-Duty High-Resolution Closed-Loop DC-Mike & Stepper Actuators

M-235 Heavy-Duty High-Resolution Closed-Loop DC-Mike & Stepper Actuators


  • 20 mm or 50 mm Travel Range
  • 0.1 Micron Minimum Incremental Motion
  • High-Speed Direct Drive Option
  • 120 N Push/Pull Load
  • 100 N Lateral Load Limit
  • Preloaded Ultra-Low-Friction Ball Screw with Non-Rotating Tip
  • Closed-Loop DC Motors and Stepper Motors
  • Compatible with Leading Industrial Motion Controllers
  • Integrated Hall-Effect Limit & Origin Switches
  • >20,000 Hours MTBF
  • Vacuum Versions
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Product Image - Differential Micrometer Drives

M-238 Heavy-Duty DC-Mike Actuators


  • High Load Capacity to 400 N
  • Optional 0.1 Micron Direct Metrology Linear Encoder for Exceptional Precision
  • Travel Range to 50 mm
  • Minimum Incremental Motion to 0.3 Micron
  • Max. Velocity: 30 mm/s
  • Preloaded Frictionless Ball Screw
  • MTBF > 20.000 h
  • Vacuum-Compatible Versions Available for 10-6 hPa
Product Description | Specs / Drawings | Ordering Info | PDF
Product Image - PILine® RodDrive Integrated Piezo Linear Motor Drive

M-674 PILine® RodDrive Integrated Piezo Linear Motor Drive


  • Drive-Component for Integration into Micropositioning Systems
  • Flexible Choice of Travel Ranges to Several 100 mm
  • Flexible Choice of Push/Pull Forces to Several 10 N
  • Minimum Incremental Motion to 0.05 Micron
  • Velocity to 400 mm/s
  • Self-Locking
Product Description | Specs / Drawings | Ordering Info | PDF
Product Image - PiezoMike: Piezoelectric Micrometer Drive

P-853 - P-854 PiezoMike: Piezoelectric Micrometer Drive


  • Alternative for Standard Micrometer Drives
  • Manual Travel to 18 mm
  • Piezoelectric High-Resolution Travel to 25 Micron
  • Sub-Nanometer Resolution
  • Dynamic Operation to 10 Hz

Product Description | Specs / Drawings | Ordering Info | PDF
Prodcut Image - NEXLINE Miniature High-Load Piezo Nanopositioning Drive

N-110 NEXLINE® Miniature High-Load Piezo Nanopositioning Drive


  • Winner of the SEMI Technology Innovation Showcase Award
  • 3 mm Travel Range
  • <0.1 Nanometer Resolution (Open-Loop)
  • Active Force Generation to 30 N
  • >50 N Holding Force Self-Locking
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Product Image - EXLINE High-Load Piezo Nanopositioning Drive

N-214 NEXLINE® High-Load Piezo Nanopositioning Drive


  • Winner of the SEMI Technology Innovation Showcase Award
  • 20 mm Travel Range, <0.1 Nanometer Resolution (Open-Loop)
  • Integrated High-Resolution Incremental Encoder (Closed-Loop)
  • Active Force Generation to 400 N
  • >600 N Holding Force, Self-Locking
Product Description | Specs / Drawings | Ordering Info | PDF
Product Image - High-Resolution Stepper-Mike Actuators

M-168 High-Resolution Stepper-Mike Actuators


  • 10, 25 & 50 mm Travel Ranges
  • Resolution <0.1 Micron
  • 2- and 5-Phase Stepper Motor
  • Manual Positioning Knob
  • Sub-Nanometer Resolution with Optional PZT Actuator
  • >5,000 Hours MTBF
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Product Image - Micrometer Drives with Rotating Tips

M-619 – M-626 Micrometer Drives with Rotating Tips


  • 1 Micron Sensitivity
  • 10 Micron Graduations
  • Travel up to 25 mm
  • Model M-626.05 with Lockable Spindle
Product Description | Specs / Drawings | Ordering Info | PDF
Product Image - Precision Micrometer Drives with Non-Rotating Tips

M-631 Precision Micrometer Drives with Non-Rotating Tips


  • 10, 25 and 50 mm Travel
  • Pitch 0.5 mm/Rev.
  • Low-Friction Construction
  • 1 Micron Manual Sensitivity
  • Sub-Nanometer Resolution with Optional PZT Actuator
Product Description | Specs / Drawings | Ordering Info | PDF
Product Image - Differential Micrometer Drives

M-653 Differential Micrometer Drives


  • 0.1 Micron Sensitivity
  • 1 Micron Graduations
  • Travel to 20 mm
Product Description | Specs / Drawings | Ordering Info | PDF
Vertical Translation Stages

Product Image - Vertical Micropositioning Stage

M-501 Vertical Micropositioning Stage


  • Travel Range 12.5 mm (1/2")
  • Ultra-High-Resolution Encoder
  • ActiveDrive™ Motor
  • Compatible with Leading Industrial Motion Controllers
  • Stress-Relieved Aluminum Stage Base for Highest Stability
  • Zero-Backlash Recirculating Ballscrews
  • Non-Contact Origin and Limit Switches
  • >20,000 Hours MTBF
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Parametric Search     Product Description | Specs / Drawings | Ordering Info | PDF
Product Image - High-Load Vertical Micropositioning Stage

M-451 High-Load Vertical Micropositioning Stage


  • 3 Nanometer Design Resolution
  • 12 kg Load Capacity, High Stiffness
  • <100 Nanometer Minimum Incremental Motion
  • 12.5 mm (1/2") Travel Range
  • ActiveDrive™ Motor
  • Compatible with Leading Industrial Motion Controllers
  • Non-Contact Origin and Limit Switches
  • Mounting Platform for P-500 and PIMars™ Piezo- Nanopositioning Systems
  • Self Locking

Product Description | Specs / Drawings | Ordering Info | PDF
Product Image - M-714 Hybrid Piezo/DC-Motor Nanopositioning Z-Stage

M-714 Hybrid Piezo/DC-Motor Nanopositioning Z-Stage


  • Hybrid Sytem Combines Advantages of Piezoelectrics and Electromagnetic Drives
  • 2 Nanometer Linear Encoder Resolution
  • High Holding Forces with Minimum Power Consumption, without Counterbalancing the Load
  • Active Compensation of Stick/Slip During Startup and Settling
  • Active Backlash Compensation
  • Excellent Velocity Control
  • Millisecond Settling to Nanometer Accuracy
  • Reliable Execution of Minimal Increments


Product Description | Specs / Drawings | Ordering Info | PDF

Rotation Stages & Tilt Stages

Product Image - Tip/Tilt Stages

M-044 Tip/Tilt Stages


  • One- & Two-Axis Tilt Stages
  • Zero Backlash
  • Sub-microradian Resolution
  • Manual and DC-Motor Drives
  • Compatible with Leading Industrial Motion Controllers
  • Optional Piezo Drives for Tracking and Scanning
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Product Image - Micro Rotation Stages with Worm Gear Drive

M-116 Micro Rotation Stages with Worm Gear Drive


  • Ultra-Compact Design
  • Continuous Rotation
  • 2.5 microradian Design Resolution
  • Clear Aperture
  • Velocity up to 20 degrees/second
  • Preloaded Anti-Backlash Worm Drive
  • Fits Directly on M-110 Micro Translation Stages
  • Compatible with Leading Industrial Motion Controllers
  • Non-Contact Reference Switch
  • Up to 10 microradian Repeatability
Product Description | Specs / Drawings | Ordering Info | PDF
Product Image - Rotation Stages with Worm Gear Drive

M-038 Rotation Stages with Worm Gear Drive (100 mm diameter)


  • Ultra-High Resolution
  • Continuous Rotation
  • Preloaded Worm Drive for Zero Backlash
  • ActiveDrive™ DC-Motor, Stepper-Motor and Manual Versions
  • Compatible with Leading Industrial Motion Controllers
  • Clear Aperture

Product Description | Specs / Drawings | Ordering Info | PDF
Product Image - Compact Precision Tangent-Arm Rotation Stages with Optional DC-Motor and Piezo Drives

M-035 Compact Precision Tangent-Arm Rotation Stages with Optional DC-Motor and Piezo Drives


  • Sub-Microradian Resolution
  • 360o Coarse Range, up to 19o Fine Range with <1 microradian Resolution
  • Precision Micrometer or DC Motor Drives
  • Piezo Option for High-Resolution Scanning and Tracking
  • Ø 20 mm Clear Aperture
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Product Image - Precision Tangent-Arm Rotation Stages with Optional DC-Motor and Piezo Drives

M-036 Precision Tangent-Arm Rotation Stages with Optional DC-Motor and Piezo Drives


  • Sub-Microradian Resolution
  • 360o Coarse Range, up to 21o Fine Range
  • Precision Micrometer or DC Motor Drives
  • Piezo Option for High-Resolution Scanning and Tracking
  • Ø 30 mm Clear Aperture
Product Description | Specs / Drawings | Ordering Info | PDF
Product Image - Series Rotation Stages with Worm Gear Drive

M-060 Series of Rotation Stages with Worm Gear Drive


  • Continuous Rotation
  • Ultra - High Resolution
  • Velocity up to 90 deg/sec.
  • Preloaded Worm Drive for Zero Backlash
  • ActiveDrives™ DC-Motor, Stepper-Motor and Manual Versions
  • Compatible with Leading Industrial Motion Controllers
  • Direction - Sensing Origin Switch
Product Description | Specs / Drawings | Ordering Info | PDF
Product Image - Rotation Stages with Worm Gear Drive

M-037 Rotation Stages with Worm Gear Drive (60 mm diameter)


  • Ultra-High Resolution
  • Compact Design
  • Continuous Rotation Range
  • Preloaded Worm Drive for Zero Backlash
  • ActiveDrive™ DC-Motor, Stepper Motor and Manual Versions
  • Compatible with Leading Industrial Motion Controllers
  • 20 mm ø Clear Aperture

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Hexapod Six-Axis Micropositioning Systems

Product Image - M-810 Miniature Hexapod M-810 Miniature Hexapod
  • Most-Compact Hexapod in the PI Portfolio
  • Travel Ranges 40 x 40 x 13 mm, Rotation to 60 Degrees
  • Load Capacity to 5 kg
  • Resolution of a Single Strut 40 Nm
  • Min. Incremental Motion to 200 Nm
  • Repeatability up to ±0.5 µm
  • Velocity to 10 mm/s
Product Description | Specs / Drawings | Ordering Info | PDF
Product Image - M-824 Vacuum Hexapod M-824 Compact Six-Axis Parallel Kinematics Microrobot
  • Six Degrees of Freedom
  • Vacuum Compatible Versions
  • Load Capacity 10 kg
  • Travel Ranges to 45 mm (linear), 25° (rotation)
  • 7 Nanometer Resolution
  • 300 Nanometer Min. Incremental Motion
  • Repeatability ±0.5 Micron
  • Very Compact Design
  • Self Locking to 10 kg
Product Description | Specs / Drawings | Ordering Info | PDF
Product Image - HexaLight 6-Axis-Parallel Kinematics Microrobot M-840 HexaLight™ Six-Axis Parallel Kinematics Microrobot
  • Six Degrees of Freedom
  • Rapid Response
  • No Moving Cables for Improved Reliability and Precision
  • 10 kg Load Capacity
  • Repeatability to ±2 Micron
  • Actuator Resolution to 0.016 Micron
  • Significantly Smaller and Stiffer than Serial-Kinematics Systems, Better Dynamics
  • Vacuum-Compatible Versions
  • Virtualized Pivot Point
  • Sophisticated Controller Using Vector Algorithms
  • 20000 h MTBF
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Product Image - M-850 Hexapod M-850 Hexapod Six-Axis-Parallel Kinematics Microrobot
  • Six Degrees of Freedom
  • Works in Any Orientation
  • No Moving Cables for Improved Reliability and Precision
  • 200 kg Load Capacity (Vertical)
  • Heavy-Duty, Ultra-High-Resolution Bearings for 24/7 Applications
  • Repeatability to ±1 Micron
  • Actuator Resolution to 0.005 Micron
  • Significantly Smaller and Stiffer Package than Conventional Multi-Axis Positioners
  • Vacuum-Compatible Versions
  • Linear and Rotary Multi-Axis Scans
  • Virtualized Center of Rotation (Pivot Point)
  • Sophisticated Controller Using Vector Algorithms
  • 20000 h MTBF
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Product Image - M-850 High Load Hexapod M-850K Ultra-High-Load Hexapod
  • Six Degrees of Freedom
  • Max. Load Capacity to 1000 kg
  • Repeatability to 2 µm
  • Drive: Brushless Motors with Brake
  • Vacuum Compatible up to 10-6 hPa
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Product Image - HexAlign 6-Axis Precision Alignment System / Manipulator (Hexapod) F-206 HexAlign™ Six-Axis Precision Alignment System / Manipulator (Hexapod)
  • Parallel Kinematics with 6 Degrees of Freedom
  • 0.033 Micron Actuator Resolution
  • Repeatability 0.3 Micron in Space
  • No Moving Cables for Improved Reliability, Reduced Friction
  • Better Dynamics, More Compact than Serial Kinematics Systems
  • For Scanning and Alignment
  • Cartesian Coordinate Control with Virtualized Pivot Point.
  • Powerful Digital Controller with Open Source LabView™ Drivers, DLL Libraries...
  • Integrated Fiber Alignment Routines
Product Description | Specs / Drawings | Ordering Info | PDF
6-Axis, Long-Travel Piezo Nanopositioning / Scanning Stage with Parallel Metrology

P-587 Six-Axis, Long-Travel Piezo Nanopositioning / Scanning Stage with Parallel Metrology


  • For Scanning and Positioning in all Six Degrees of Freedom
  • 800 x 800 x 200 Micron Linear Range
  • Up to 10 mad Rotational Range
  • Precision Trajectory Control
  • Parallel - Kinematics / Metrology for Enhanced Responsiveness / Multi-Axis Precision
  • Direct Metrology with Capacitive Sensors for Highest Precision
  • ID-Chip for Auto Calibration Function
  • PICMA® High - Performance Multilayer Piezo Drives
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Parametric Search     Product Description | Specs / Drawings | Ordering Info | PDF