Tag: Piezo Motor

Surface Slope Metrology: High Precision Tilt Stage Achieves 30nrad Absolute Accuracy

A recent paper shows significant advances in the accuracy of long trace profilers, auto-collimator based deflectometers, and other surface metrology instrumentation. Scientists at the ALS X-Ray Optics Laboratory, HZB/BESSY-II and PTB devised a new universal calibration method for deflectometers.  One key component in the system is a high accuracy, piezo-motor-driven flexure tilt stage developed in […]

Self-Locking Actuator for Hexapod Applications Combines High Push-Pull Force with Picometer Resolution for Active Optical Alignment in Astronomy

1. Introduction Astronomical telescopes usually employ active position control for primary mirror surfaces using motorized mechanical actuators. The motion needed is generally quasistatic, to compensate gravitational and thermal effects. Another application for precision actuators within the telescope at a significantly faster motion response is the high speed tip/tilt control of a secondary or tertiary mirror. […]

Overview of Different Piezo Motor Design Principles

The basic principle of the piezo ceramic motor has been known for almost 100 years. However, it took decades to get from an idea to a reliable, industrial product. Just like with electromagnetic motors, many different types have been developed and tested over the years. Today, one can say that piezo motors have become mainstream […]

Ultra-Stable Mirror Mounts for LINC-NIRVANA High Resolution Imager are based on Self-clamping PiezoWalk Motors

An extremely stable motorized mount for initial alignment of two dichroic beam splitters in the instrument was required. The mirrors reflect visible light and transmit the NIR are located close to the pupil plane are very sensitive to tilt and flexure errors which could be introduced to the wave-front sensor. The technical specifications to be […]

Piezo-Mechanisms in X-Ray Spectroscopy: Energy Selection in a Beam Line

PiezoWalk principle shows advantages for Monochromator crystal fine adjustment Piezo-based mechanisms have long been used in precision scientific instruments for precision motion generation. Previously, the limited motion characteristics of simple piezo actuators often made the use of a dual stage coarse/fine approach necessary. A novel approach based on a long-travel PiezoWalk drive shows promise in […]

Performance and Applications of Inertia Based Positioning Drives: Q-Motion

Size matters in miniaturization and automation – smaller is usually better. Traditional electromagnetic motors have limitations when it comes to shrinking dimensions while maintaining high efficiency and accuracy of motion with minimized energy consumption. Piezo ceramic inertia motors can fill this gap. The Q-Motion dubbed miniature direct drives can be employed in linear positioners, rotary […]

Piezo Flexure Actuators, Nanopositioners, and Other Piezo Mechanisms for Precision Motion Control Applications

Flexure-guided and motion-amplified actuators and positioning stages provide convenience and performance for the OEM designer and scientist. Piezo actuators, a special form of electro-ceramics, are the gold standard when it comes to precision, speed, and force in a small package. To make them more accessible for the OEM designer, manufacturers package the actuators inside an […]

Reliability of Ultrasonic Motors

1.  Overview PILine® positioning systems are based on a direct drive using ultrasonic piezo motors. Therefore, very low response times as well as accurate positioning can be accomplished. Due to the particular operating principle, PILine® ultrasonic motors are self-locking even when switched off, a great advantage when it comes to position stability. Ultrasonic motors are […]

Positioning Capabilities of Ultrasonic Motors

  1.  Overview While conventional positioning systems convert the rotary motion of a motor into linear motion using a spindle, PILine® positioning systems are based on a special direct drive. This completely eliminates backlash and play and enhances the response time and positioning accuracy. Furthermore, they offer high-resolution positioning and fast step-and-settle performance. At the […]

High Stability Positioning Stage with Self-Clamping Ceramic Linear Motors Provides Long-Term Nanoscale Stability

An insidious nanoscale instability process is the quasi-asymptotic settling due to lubricant flow processes in drive, alignment and adjustment elements such as lead-screws and micrometer drives. It has been thought that this progresses at the nanoscale over many minutes, but conventional position-metrology instrumentation is typically less stable than recent process tolerances over the timescales involved, […]

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About PI

PI (Physik Instrumente) is a leading manufacturer of precision motion control equipment, piezo motors, air bearing stages and hexapod parallel-kinematics for semiconductor applications, photonics, bio-nano-technology and medical engineering. PI has been developing and manufacturing standard & custom precision products with piezoceramic and electromagnetic drives for 4 decades. The company has been ISO 9001 certified since 1994 and provides innovative, high-quality solutions for OEM and research. PI is present worldwide with fifteen subsidiaries, R&D / engineering on 3 continents and total staff of more than 1,000.

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