Tag: Metrology

Metrology for Precision Motion Systems at PI USA

1.  Introduction When building high precision positioning systems using our PIglide air bearing products, performing the metrology and testing is one of the most critical steps in the process. Only with proper metrology can we verify that our products and systems meet the specifications that our customers demand. In this article, we discuss the various […]

Measuring the Smallest Resolution of a Positioning Stage

The trace above, measured by a laser interferometer, shows peak-to peak noise (black) of a linear motor positioning system on the order of 1.8 nm (controller is actively holding a position, no position change commanded). The noise measured by the external metrology (laser) contains the sum of all mechanical and electrical sources – the amplifier […]

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About PI

PI (Physik Instrumente) is a leading manufacturer of precision motion control equipment, piezo motors, air bearing stages and hexapod parallel-kinematics for semiconductor applications, photonics, bio-nano-technology and medical engineering. PI has been developing and manufacturing standard & custom precision products with piezoceramic and electromagnetic drives for 4 decades. The company has been ISO 9001 certified since 1994 and provides innovative, high-quality solutions for OEM and research. PI is present worldwide with fifteen subsidiaries, R&D / engineering on 3 continents and total staff of more than 1,000.

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