Tag: EUVL

6-Axis Parallel Kinematics for UHV Alignment and Active Vibration Cancellation for Semiconductor Applications

Inspection tools in the semiconductor industry, laser alignment and adjustment tools for the next generation of extreme ultraviolet lithography (EUVL) require highly accurate motion, often in all 6 degrees of freedom. Parallel kinematics structures provide an elegant and highly flexible way to achieve precise multi-axis motion. Different designs have found successful applications in 6D precision […]

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About PI

PI (Physik Instrumente) is a leading manufacturer of precision motion control equipment, piezo motors, air bearing stages and hexapod parallel-kinematics for semiconductor applications, photonics, bio-nano-technology and medical engineering. PI has been developing and manufacturing standard & custom precision products with piezoceramic and electromagnetic drives for 4 decades. The company has been ISO 9001 certified since 1994 and provides innovative, high-quality solutions for OEM and research. PI is present worldwide with fifteen subsidiaries, R&D / engineering on 3 continents and total staff of more than 1,000.

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