Surface Slope Metrology: High Precision Tilt Stage Achieves 30nrad Absolute Accuracy

A recent paper shows significant advances in the accuracy of long trace profilers, auto-collimator based deflectometers, and other surface metrology instrumentation. Scientists at the ALS X-Ray Optics Laboratory, HZB/BESSY-II and PTB devised a new universal calibration method for deflectometers.  One key component in the system is a high accuracy, piezo-motor-driven flexure tilt stage developed in […]

Sinusoidal Scanning Motion Performance: Air Bearings vs. Mechanical Bearings

Application Description Most of the motion solutions we work on typically require either point-to-point positioning or constant velocity scanning motion. In these applications, customers are usually concerned with accuracy, repeatability, or velocity regulation. One special type of motion that is occasionally required is sinusoidal scanning motion. In these applications, the motion stage is expected to […]

Image Stabilization and Multi-Axis Patterned Motion Simulation

Motion simulation is crucial in the evaluation of many devices, including vibrating testing of vehicles or airplanes, response testing of accelerometers or gyroscopes and image sensors such as those used in high end cameras and smartphones. Repeatable multi-axis motion simulation can help tweak advanced algorithms in image stabilization systems and verify the performance of opto-mechanical […]

Performance and Applications of Inertia Based Positioning Drives: Q-Motion

Size matters in miniaturization and automation – smaller is usually better. Traditional electromagnetic motors have limitations when it comes to shrinking dimensions while maintaining high efficiency and accuracy of motion with minimized energy consumption. Piezo ceramic inertia motors can fill this gap. The Q-Motion dubbed miniature direct drives can be employed in linear positioners, rotary […]

Performance of Direct-Drive Linear Motor Stages in Precision Positioning Applications

Brushless direct drive linear motors provide advantages over leadscrew and ballscrew driven positioning stages when it comes parameters such as acceleration, maximum speed, accuracy, constancy of velocity, and avoidance of vibration. This article explains types of motors, encoders and provides test data of PI’s new V-551 linear motor stage.   Iron Core and Ironless Motors […]

Ultra-High Precision Positioning Actuators to Align Mirror Segments in the E-ELT Telescope

Hybrid Concept Using Piezo / Voice Coil and Screw Drives for the E-ELT Telescope The combination of “coarse” precision screw drives for long distance motion and ultra-high resolution actuators such as piezo and voice-coil-based systems allows combining travel ranges up to hundreds of millimeters with response, smoothness and resolutions not achievable with conventional drives. The […]

Ultra-High Precision AFM with 6-Axis Laser and Piezo Scanner for Traceable Measurements on Semiconductors and Step Standards

Atomic force microscopy (AFM) is used for surface measurements with resolution down to atomic levels – dimensions that are far beyond even the highest resolution optical microscopes. AFM is a noncontact procedure, with forces between a very fine measuring tip and the object surface revealing information about the topography, chemical surface condition, defects, etc. Atomic […]

Sensor Influence on the Precision of Piezo Positioning Stages

The choice of feedback sensor is one of the key performance factors of a piezo positioning stage. Below is a comparison between the two most commonly used sensors. When the absolute positioning information plays a critical role in scientific results, researchers prefer capacitive sensors. When cost is most important and / or results are based […]

Force & Position Control in Precision Automation

A host of applications can benefit from fast actuation systems equipped with precise metrology for controlling both force and position accurately. These include: Fast production testing of touch- and force-sensitive and haptic components; Delicate, high-speed automated assembly procedures where position vs. force is important; Testing of physical characteristics such as compliance, damping or other material […]

Reliable Piezo Motion Devices for Industrial and Space Applications

Piezo ceramics convert electrical energy directly into mechanical motion and vice versa, based on crystalline solid state effects. Piezo actuators are quite unique in combining force, speed and precise motion into a small package. To make them more accessible for OEM designers, manufacturers can package the actuators inside an arrangement of flexures providing precision guidance, […]

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About PI

PI (Physik Instrumente) is a leading manufacturer of precision motion control equipment, piezo motors, air bearing stages and hexapod parallel-kinematics for semiconductor applications, photonics, bio-nano-technology and medical engineering. PI has been developing and manufacturing standard & custom precision products with piezoceramic and electromagnetic drives for 4 decades. The company has been ISO 9001 certified since 1994 and provides innovative, high-quality solutions for OEM and research. PI is present worldwide with fifteen subsidiaries, R&D / engineering on 3 continents and total staff of more than 1,000.

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