Ultra-Stable Mirror Mounts for LINC-NIRVANA High Resolution Imager are based on Self-clamping PiezoWalk Motors

An extremely stable motorized mount for initial alignment of two dichroic beam splitters in the instrument was required. The mirrors reflect visible light and transmit the NIR are located close to the pupil plane are very sensitive to tilt and flexure errors which could be introduced to the wave-front sensor. The technical specifications to be […]

Advances in Precision Motorized Positioning Systems: Selection Criteria

Motion drive and control technologies are advancing rapidly. This means engineers have access to an expanding spectrum of options to leverage previously unattainable performance and form factors. Rapidly evolving production processes have driven needs for motion control systems that provide higher accuracy, speed, resolution, and repeatability. The motion industry has responded with an expanding palette […]

Overview of Different Piezo Motor Design Principles

The basic principle of the piezo ceramic motor has been known for almost 100 years. However, it took decades to get from an idea to a reliable, industrial product. Just like with electromagnetic motors, many different types have been developed and tested over the years. Today, one can say that piezo motors have become mainstream […]

Surface Slope Metrology: High Precision Tilt Stage Achieves 30nrad Absolute Accuracy

A recent paper shows significant advances in the accuracy of long trace profilers, auto-collimator based deflectometers, and other surface metrology instrumentation. Scientists at the ALS X-Ray Optics Laboratory, HZB/BESSY-II and PTB devised a new universal calibration method for deflectometers.  One key component in the system is a high accuracy, piezo-motor-driven flexure tilt stage developed in […]

6-Axis Parallel Kinematics for UHV Alignment and Active Vibration Cancellation for Semiconductor Applications

Inspection tools in the semiconductor industry, laser alignment and adjustment tools for the next generation of extreme ultraviolet lithography (EUVL) require highly accurate motion, often in all 6 degrees of freedom. Parallel kinematics structures provide an elegant and highly flexible way to achieve precise multi-axis motion. Different designs have found successful applications in 6D precision […]

Self-Locking Actuator for Hexapod Applications Combines High Push-Pull Force with Picometer Resolution for Active Optical Alignment in Astronomy

1. Introduction Astronomical telescopes usually employ active position control for primary mirror surfaces using motorized mechanical actuators. The motion needed is generally quasistatic, to compensate gravitational and thermal effects. Another application for precision actuators within the telescope at a significantly faster motion response is the high speed tip/tilt control of a secondary or tertiary mirror. […]

Hexapods and Parallel Kinematics Positioning Systems FAQs

Hexapod positioners are often referred to as Stewart Platforms. A hexapod is based on a 6-axis (XYZ, Pitch, Roll, Yaw) actuator system arranged in parallel between a top and bottom platform. PI parallel kinematics (PKM) precision positioning systems have many advantages over serial kinematics stages, such as lower inertia, improved dynamics, smaller package size, and […]

Advances in Piezo Nanopositioning Controllers – Digital vs. Analog

Digital piezo nanopositioning controllers have a reputation for being expensive and only cost efficient in high-end applications. A recent new design approach has changed this situation, making advanced digital control features affordable for main stream piezo motion applications. History of Digital Motion Controllers Position control for magnetic motors has been almost exclusively digital for nearly […]

Super-Resolution Optical Microscopy, Nanoscopy, and Nanopositioning Motion Control

Much has changed since the first optical microscope was designed in the late 16th century by Hans and Zaccharias Janssen, two Dutch spectacle makers. For the first time, their invention put multiple lenses to use, resulting in much higher magnifying power than a single lens could achieve. For almost 400 years optical microscopy did not […]

Piezo-Mechanisms in X-Ray Spectroscopy: Energy Selection in a Beam Line

PiezoWalk principle shows advantages for Monochromator crystal fine adjustment Piezo-based mechanisms have long been used in precision scientific instruments for precision motion generation. Previously, the limited motion characteristics of simple piezo actuators often made the use of a dual stage coarse/fine approach necessary. A novel approach based on a long-travel PiezoWalk drive shows promise in […]

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About PI

PI (Physik Instrumente) is a leading manufacturer of precision motion control equipment, piezo motors, air bearing stages and hexapod parallel-kinematics for semiconductor applications, photonics, bio-nano-technology and medical engineering. PI has been developing and manufacturing standard & custom precision products with piezoceramic and electromagnetic drives for 4 decades. The company has been ISO 9001 certified since 1994 and provides innovative, high-quality solutions for OEM and research. PI is present worldwide with fifteen subsidiaries, R&D / engineering on 3 continents and total staff of more than 1,000.

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